Instruction manual

4-5
4.2 Maintenance of Rotary Pump （Only for P/N 539-9010 and 539-9060）
NOTICE
Instruments shipped to Europe area where CE marking conformity is necessary do not provide
with the rotary pump. Also instruments those shall be compliant to SEMI-S2 guideline do not
provide with the rotary pump even when shipped to outside of Europe area.
CAUTION
Rotary pump
Beware of high
temperature
The surface of the rotary pump reaches a temperature of
about 70°C while the pump is operating.
Touching it could result in a serious burn.
The time point of inspection cannot be uniformly determined because operating conditions of
vacuum pumps differ. To minimize trouble and maximize service life, conduct periodic
inspections (at least once every six months) according to the operating conditions.
4.2.1 Oil Change
Condition of the pump oil exerts a great influence on the ultimate
vacuum level and the service life of pump. For enabling the pump to
provide adequate performance, check the level and contamination of
oil through the oil gauge window as frequently as possible.
Under normal operating conditions, oil should be replaced with new
one every 6 months, though the recommended period of oil change
differs according to actual operating conditions.
(1) Discharge of Oil
(a) Remove the oil injection plug.
(b) Turn the drain valve to discharge oil from inside the box
(or remove the drain plug in case of VR16-K/N).
NOTICE: For fastening the drain plug, screw it in correctly by hand, and then tighten lightly
with a spanner or the like.
CAUTION
The rotary pump is a heavy object weighing about 30 kg. So be careful when
lifting the pump for oil change or the like.
Oil injection
plug
Drain
plug
Drain
valve