Instruction manual

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4.4 Troubleshooting
4.4.1 When Column Evacuation does not Work
When the column evacuation system does not work, check the followings.
(1) Is an error message shown?
If an error message is shown on the evacuation control panel, refer to XXXXXX to find the
cause of the error and make countermeasure to it.
(2) Check the TMP lamps on the evacuation control panel. Both NORMAL and POWER lamp
shall be lit in normal evacuation condition. The POWER lamp will be lit about 10 minutes after
starting evacuation. The Normal lamp will be lit further after about 10 minutes.
(3) If you do not find any failure mentioned above, or could not make effective countermeasure,
contact a service engineer.
4.4.2 When Specimen Exchange Chamber Vacuum is not Good
When about 10 minutes has been passed after starting SEC evacuation by EVAC switch or Open
switch and the vacuum of the specimen exchange chamber does not reach to the specified value,
buzzer will sound and the error E-17 will be shown on the evacuation control panel. Check the
follows.
(If the specimen is wet and therefore needs more evacuation time, leave it. Buzzer and error
indication will stop by STOP button. When vacuum reaches to specified value, evacuation
sequence will continue to next step even after causing the E-17 error.)
(1) Introduce air into the specimen exchange chamber by the AIR button. Clean up and grease
up the O-ring seal of the chamber. Then start evacuation again.
(2) Check if your specimen is not wet. If the specimen is not dry, outgas from the specimen
may cause long evacuation time.
(3) Check oil level of rotary pumps. If the level is not normal, add or exchange oil of rotary
pumps referring to instruction manual.
CAUTION
Rotary pump
Beware of high
temperature
The surface of the rotary pump reaches a temperature of
about 70°C while the pump is operating.
Touching it could result in a serious burn.