Instruction manual

4-13
(4) If you do not find any failure mentioned above, contact a service engineer.
4.4.3 When Specimen Chamber Vacuum is not Good
If HV applicable status (HV indicator on GUI blinks in yellow and ON button is enable) is not
given even after about 1 to 1.5 hour has been passed from starting specimen chamber
evacuation check the followings.
(1) Check specimen chamber vacuum. It shall be better than 2x10-3Pa to apply HV.
Note that in the period of 15 minutes after TMP NORMAL lamp is lit, HV does not becomes
enable to be applied.
(2) If you attached some assembly unit, e.g. objective lens aperture unit, before starting
evacuation, introduce air into the specimen chamber and detach the unit. Clean up and
grease up the O-ring of the unit and attach it again. Then, start evacuation again.
(3) Check if your specimen is not wet. If the specimen is not dry, outgas from the specimen may
cause long evacuation time.
(4) If you do not find any failure mentioned above, contact a service engineer.
4.4.4 When Ion Pump Vacuum Degraded
When ion pump vacuum indicators are worse than the followings, carry out gun baking referring
to instruction manual.
IP1: 2 x 10
-7
Pa
IP2: 2 x 10
-6
Pa
IP3: 5 x 10
-5
Pa
If these are not improved by gun baking, contact a service engineer.
CAUTION
Beware of
electric shock
• Voltages up to 100 V AC and 30 kV DC are used in this
instrument. Touching the interior could cause an
electric shock.
• Never remove the covers of main unit, control unit or
power unit and touch internal parts or circuits while
power is connected to the instrument. There is a
danger of fatal or serious injury due to electric shock.
• Do not detach the covers of the instrument.