Instruction manual

4-18
4.4.12 When Error Messages are shown
Messages shown on the S-4800 GUI includes operation assist messages, warning for operation
and messages showing instrumental error.
Messages are shown with number. Refer to the list of messages in appendix page.
4.5 Operation for shutting down all power supply of S-4800
(1) Shut off HV and shut down PC. Then turn DISPLAY power switch
(2) Turn the EVAC POWER switch to O (OFF).
After 30 minutes of cooling time for the objective lens aperture heater and 5 minutes of TMP
power down, evacuation system stops. POFF will be shown on the evacuation control panel.
(4) Turn IP1, IP2 and IP3 switches on the evacuation control panel to OFF.
(5) At the back of the display unit, turn off IP,EVAC,DISPLAY and OUTER BAKE breakers. And
then, turn the MAIN breaker to off. If the MAIN breaker is type of straight lever, set it down. If it
is round handle type, turn it to counter clockwise fully.
(6) Turn off the MAIN switch in the power distribution panel of customers site.
(7) Stop cooling water supply. Wait time as in the case of oil diffusion pump system is not
necessary.
When using water circulator, shut its power down. If it is linked with SEM power, the water
circulator will stop running when S-4800 is shut off.
4.6 Operation when power was shut down by power line failure
If power source was shut off by power line failure, turn switches and breakers as the same
manner as above 4.5 (2) to (7)
Straight Lever type Round Handle type
MAIN breaker (ELB) RESET button