Instruction manual

4-21
4.10 Gun Baking operation
CAUTION
Gun baking operation must be carried out by a service engineer or a person who has been
trained by Hitachi High-Technologies Corporation or its service representatives.
Use the following steps for gun baking operation.
(1) Turn HV to OFF.
NOTICE
Confirm that the HV Lamp on the right side ion pump cover is
extinguished. If it still is lit, never go to next steps.
(2) Remove two fixing screws and then the protection cover.
(A protection is provided so that gun HV is forced to off when the
cover is removed. )
(3) Pull out the HV cable from the electron gun
(4) Insert the HV cable into the HV cable holder provided at the left
side of ion pump cover.
(A protection is provided so that baking will not start if the cable
is not placed in the holder.)
(5) Remove two screws at the top of the column cover and remove
the cover.
HV Lamp
Protection cover
Screws