Instruction manual

PRECAUTION - 3
(1) Allow an interval of at least 20 seconds between turning on or off the EVAC POWER and
DISPLAY POWER switches.
(2) Replace the oil filter of the oil-sealed rotary pump every six months.
(3) For the air compressor and oil-sealed rotary pump, perform draining of water, check of oil
level etc. with reference to the check card attached to the instrument.
(4) Do not press the EMERGENCY switch except in emergencies. Using this switch causes a
complete instrument shutdown that will necessitate a complete instrument restarting.
(5) When attaching the electron gun cover, make sure the lead wires are not in contact with the
heater.
3. GENERAL PRECAUTIONS
(1) Maintenance items other than those described in this manual should be left to the service
engineer.
(2) Any replacement of the FE (field emission) tip should be performed by a Hitachi
High-Technologies Corporation service representative.
4. MEASURES FOR EMERGENCY
(1) Turn off the main switch on the distribution board.
(2) If water is leaking, close the valve of cooling water to cut off the water supply.
(3) After taking steps (1) and (2), carry out other suitable measures.
(4) Inform the service shop.
NOTICE