Instruction manual

PRECAUTION - 13
4. Water Supply and Drain
(1) Water flow rate ........................ 1 to 1.5 L/min
(2) Water pressure........................50 to 100 kPa
(3) Water temperature...................10 to 20 °C (temperature variation: less than 0.5 °C/10 min)
(4) Water supply port .................... One port, with Rc 3/8 taper internal thread.
(If water contains significant deposit or impurities, consult
Hitachi High-Technologies Corporation separately.)
(5) Water drain port.......................One port, more than 20 mm in diameter
(natural drainage type)