Instruction manual
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Table of Contents (Cont’d)
3.3 Application of High Voltage .................................................................................. 3-12
3.3.1 Condition where the gun high voltage is applicable................................ 3-12
3.3.2 Flashing .................................................................................................. 3-12
3.3.3 Setting of Accelerating Voltage and Emission Current........................... 3-13
3.3.4 Application of High Voltage..................................................................... 3-14
3.4 Optimizing the Electron Beam .............................................................................. 3-15
3.4.1 Selecting a Magnification Mode.............................................................. 3-15
3.4.2 Selecting Electron Optical Column Condition......................................... 3-15
3.4.3 Column Alignment Operation.................................................................. 3-20
3.5 Operation for Image Observation ......................................................................... 3-24
3.5.1 SE detector............................................................................................. 3-24
3.5.2 Selecting Magnification........................................................................... 3-18
3.5.3 Selecting Scanning Speed...................................................................... 3-29
3.5.4 Image Brightness and Contrast Adjustment ........................................... 3-31
3.5.5 Focus and Astigmatism Correction......................................................... 3-34
3.5.6 Operation of the Specimen Stage (Type I - Manual Stage).................... 3-37
3.5.7 Operation of the Specimen Stage (Type 2 - 5-Axis Motorized Stage).... 3-41
3.6 Saving and Recording Images.............................................................................. 3-71
3.6.1 Saving and Recording Images................................................................ 3-71
3.6.2 Preparing Images for Recording............................................................. 3-72
3.6.3 Setting Conditions for Image Capturing.................................................. 3-73
3.6.4 Image Capturing ..................................................................................... 3-74
3.6.5 Saving a Scanning Image (Direct Save)................................................. 3-75
3.6.6 Saving Captured Images ........................................................................ 3-76
3.6.7 Taking Photographs (Option).................................................................. 3-76
3.7 Using SEM Data Manager.................................................................................... 3-79
3.8 At the End of Daily Use......................................................................................... 3-80
3.8.1 Turning High Voltage Off ........................................................................ 3-80
3.8.2 Setting the Stage at the Specimen Exchange Position .......................... 3-80
3.8.3 Taking Out a Specimen .......................................................................... 3-80
3.8.4 Closing Windows and Shutting the Display Power................................. 3-82
3.9 Using Other Functions.......................................................................................... 3-83
3.9.1 Screen Mode .......................................................................................... 3-83
3.9.2 Split Screen and Dual Mag Mode........................................................... 3-85
3.9.3 Signal Selection and Color Mixing.......................................................... 3-86
3.9.4 X-ray Analysis Mode............................................................................... 3-88
3.9.5 Signal Processing................................................................................... 3-90
3.9.6 Operating Condition Memory.................................................................. 3-92
3.9.7 Pseudo Color Display ............................................................................. 3-94