Instruction manual

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Table of Contents (Cont’d)
3.9.8 Data Entry Function................................................................................ 3-94
3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation ....................... 3-97
3.9.11 Printing images using Report generation function.................................. 3-99
3.9.12 Copy Image ............................................................................................ 3-101
3.9.13 Copy Image information text................................................................... 3-101
3.9.14 Oblique Image ........................................................................................ 3-102
3.9.15 Optional setting....................................................................................... 3-103
3.9.16 Password Setting.................................................................................... 3-105
3.9.17 Setting Login Name ................................................................................ 3-105
3.10 Image Quality........................................................................................................ 3-107
3.10.1 Accelerating Voltage and Image Quality................................................. 3-107
3.10.2 Condenser Lens Setting and Image Quality ........................................... 3-108
3.10.3 Objective Lens Aperture Size and Image Quality ................................... 3-108
3.11 Mechanical Column Alignment ............................................................................. 3-109
3.11.1 Preparative Operation for Alignment ...................................................... 3-109
3.11.2 Mechanical Alignment of the Electron Gun............................................. 3-110
3.11.3 Alignment of the Beam Monitor Aperture................................................ 3-110
3.11.4 Alignment of the Objective Lens Aperture .............................................. 3-111
3.11.5 Mechanical Alignment of the First Condenser Lens ............................... 3-111
3.11.6 Mechanical Alignment of the Second Condenser Lens .......................... 3-111
3.11.7 Stigma Alignment (electro-magnetic alignment) ..................................... 3-112
3.11.8 Aperture Alignment (electro-magnetic alignment) .................................. 3-112
3.12 Using SEM Data Manager.................................................................................... 3-114
3.12.1 Precaution About SEM Data Manager.................................................... 3-114
3.12.2 Functions ................................................................................................ 3-115
3.12.3 Operation................................................................................................ 3-119
4. MAINTENANCE............................................................................................................. 4-1
4.1 Maintenance of Electron optical Column .............................................................. 4-1
4.1.1 Maintaining Vacuum of Electron Gun and Intermediate Chamber ......... 4-1
4.1.2 Replacement and Cleaning of Objective Lens Aperture......................... 4-1
4.1.3 Cleaning of Aperture Plates.................................................................... 4-3
4.2 Maintenance of Rotary Pump ............................................................................... 4-5
4.2.1 Oil Change.............................................................................................. 4-5
4.2.2 Replacement of Oil Mist Trap ................................................................. 4-6
4.2.3 Troubleshooting...................................................................................... 4-7
4.3 Maintenance of Air Compressor ........................................................................... 4-8
4.3.1 Checkup and Maintenance..................................................................... 4-8
4.3.2 Troubleshooting of Air Compressor........................................................ 4-10
4.3.3 Location and Functions of Major Components ....................................... 4-11