Instruction manual

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Table of Contents (Cont’d)
4.4 Troubleshooting.................................................................................................... 4-12
4.4.1 When Column Evacuation does not Work .............................................. 4-12
4.4.2 When Specimen Exchange Chamber Vacuum is not Good ................... 4-12
4.4.3 When Specimen Chamber Vacuum is not Good .................................... 4-13
4.4.4 When Ion Pump Vacuum Degraded ....................................................... 4-13
4.4.5 When Emission Current is not Set at Normal Value ............................... 4-14
4.4.6 When Image is not Shown on Screen .................................................... 4-14
4.4.7 When Image is Very Noisy ..................................................................... 4-15
4.4.8 When You cannot Correct Astigmatism.................................................. 4-16
4.4.9 When Auto Focus or Auto Stigma does not Work Satisfactorily............. 4-16
4.4.10 When S-4800 control program does not start up.................................... 4-17
4.4.11 When PC has Hanged up ....................................................................... 4-17
4.4.12 When Error Messages are shown .......................................................... 4-18
4.5 Operation for shutting down all power supply of S-4800 ...................................... 4-18
4.6 Operation when power was shut down by power line failure................................ 4-18
4.7 Operation for Starting S-4800 ........................................................................... 4-19
4.8 Operation when power line failure recovered ....................................................... 4-20
4.9 Operation when Water supply stopped by failure................................................. 4-20
4.10 Gun Baking operation........................................................................................... 4-21
4.11 Caution on Maintenance....................................................................................... 4-25
5. REPLACEMENT PARTS ............................................................................................... 5-1
5.1 Consumables and Spare Parts............................................................................. 5-1
5.1.1 Consumables.......................................................................................... 5-1
5.1.2 Replacement Parts ................................................................................. 5-2
5.1.3 Spare Parts............................................................................................. 5-3
6. ACCESSORY OPERATION .......................................................................................... 6-1
6.1 Model S-5080 Auto-Camera (Option)................................................................... 6-1
6.1.1 Configuration .......................................................................................... 6-1
6.1.2 Specifications.......................................................................................... 6-3
6.1.3 Assembling the Camera ......................................................................... 6-5
6.1.4 Operation................................................................................................ 6-6
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