Instruction manual
1-2
1.1.3 Line Power Requirement
(1) Single-phase AC, 4 kVA, 50/60 Hz.
When the supplied power line voltage is 100V, the instrument works by direct connection.
When the supplied power line voltage is other than 100V (200V or others), use a step down
transformer to step the power line voltage down to 100V. The transformer which meets to
the standard of the country shall be prepared locally.
Refer to 1.3.1 Power and Ground Wirings for connection method.
NOTICE:
(a) Line power fluctuation should be slow, and no abrupt fluctuation is allowable.
(b) Continuous energization is required
(c) Allowable line voltage fluctuation is ±10 % max.
(2) AC Power Distribution Unit should be located within 10 m of the power distribution board on
the wall (since input AC cord is only 10 m long).
(3) Be sure to use an exclusive power switch on the distribution board which is provided by the
user and feed the power through the switch.
1.1.4 Grounding
Connect the instrument to ground based on the standard of your country.
Avoid sharing the ground terminal with other power equipments. Be sure to ground the
instrument independently.
1.1.5 Water Supply and Drain
The following water supply conditions should be satisfied.
Water flow rate : 1 to 1.5 L/min
Water pressure : 50 to 100 kPa
Water temperature : 10 to 20 °C (temperature variation: 0.5 °C or less/10 min)
It is recommended to supply water via a cooling water circulation unit. When using city water,
natural drainage is required. If an appreciable amount of deposit is found, a proper water filter
should be attached. The drain port should be located at the floor level and water pressure must
be free from pulsation in a short cycle.
The water temperature for cooling the objective lens must be maintained so it is not more than 7
°C lower than the room temperature. Condensation will form when the difference between the
temperatures exceeds 7 °C. And if the SEM is used for a long time under the condition where
condensation forms, the objective lens area will become rusted and eventually be damaged, in
which case the complete set of objective lens parts will require to be replaced.
It is recommended to provide a water-leakage protection. Refer to Figure S-12 in Safety
Summary section.