Instruction manual

2 - 8
Fig. 2-8a shows the control panel for evacuation.
Fig. 2-8a Evacuation Control Panel
[EMERGENCY OFF] switch : Shuts down S-4800 entirely in an emergency.
[EVAC POWER] switch : Main switch of evacuation system.
[STAGE POWER] switch : Main switch of Stage controller (Type 2 only).
IP Backup PS operation area : Optional Ion pump backup power supply operation area.
IP POWER switches : Power switches of ion pump high voltage.
IP RESET switches : Reset switches of ion pump high voltage.
Lamps inside of switches are lighten when IP high voltage is
ON.
SC EVAC switch : Starts specimen chamber evacuation. The lamp blinks while
the sequence is advancing.
SC AIR switch : Starts introduction of air into specimen chamber.
TMP indicator lamps : POWER lamp indicates TMP power is ON. NORMAL shows
TMP is in normal running state.
APT HEATER switch : When turned to AUTO, objective aperture heater will be on
when specimen chamber vacuum is high. When turned to
DEGASS, the heater is kept at higher temperature for
degassing. Set to AUTO for usual operation.
The lamp is lit while heater current is ON.
EMERGENCY
OFF switch
Display / Operation
area
TMP
Indicator lamp
IP POWER switch
EVAC POWER
switch
APT HEAT
switch
S.C EVAC
switch
S.C AIR
switch
IP RESET
switches
STAGE POWER
switch
IP Backup PS
Operation area
(Option)