Instruction manual

2 - 10
The display status changes as the following table by depressing the MODE switch.
Display
status
Status indicator
lamp
Numeric /
character
display
description
Initial status No lamp blinks No indication (Normal running status)
IP1 IP1 lamp blinks IP1vacuum
XE−Y （X−Y Pa）
IP2 IP2 lamp blinks IP2 vacuum
XE−Y （X−Y Pa）
IP3 IP3 lamp blinks IP3 vacuum
XE−Y （X−Y Pa）
S.C S.C lamp blinks Specimen
chamber
vacuum
XE−Y （X−Y Pa）
S.E.C S.E.C lamp blinks Specimen
exchange
chamber
vacuum
XE−Y （X−Y Pa）
ECO ECO lamp blinks 00.00 Evacuation start time
(refer to ECO mode setting)
BAKE BAKE lamp blinks 10.00 Baking time
(refer to 4.10 Gun baking)
In the initial status, the display status changes as the following table by depressing the SELECT
switch.
Display
status
Numeric / character display description
Initial status No indication (Normal running status)
Date XX.XX month. day
Time XX.XX hour. minute
Cooling
water flow
FX.XX、F―――― Water flow L/min）
―――― shows water flow is off.
Other indication will appear on the Numeric / character display.
Numeric / character display description
APXX Waiting cooling time for the aperture heater before stopping
evacuation or introducing air into specimen chamber.
XX is in minutes.
PdXX Waiting the TMP stops its revolution. Pd means “Power
Down”.
XX is in minutes
E−XX
Alarm or error message. XX is number of the message.
POFF “Power off”. It shows that the evacuation power (pumps,
valves) is shut off (control power supply is on).