Instruction manual

2 - 12
［Alarm according to gun baking］
Message
No.
description recovering operation
E31(+
buzzer)
HV cable head is not placed to t
the cable holder properly.
E32(+
buzzer)
Baking protection cover is not put.
E34(+
buzzer)
Ion pump high voltage is not
applied.
E35(+
buzzer)
Ion pump 1 vacuum degraded
while baking
E36(+
buzzer)
Baking time setting is not correct.
Refer to 4.10 Gun baking.
［Alarm according to ECO mode setting］
E37(+
buzzer)
Start gun baking while in ECO
mode
E38(+
buzzer)
Evacuation start time must be 5
hours or more later from present
time.
E39(+
buzzer)
Start ECO mode while gun baking
E99(+
buzzer)
Specimen exchange rod is not at
its proper position or at present in
other errors (E01, E02, E03,
E05, E08, E09, E06, E14)
Refer to ECO mode operation
［Errors due to equipment failure］
E01（＊）
Control power supply error
(DC24V)
E02（＊）
Control power supply error
(DC15V)
E03（＊）
Control power supply error
(DC12)
E04（＊）
Vacuum valve did not work
correct
E05（＊）
Rotary pump (or dry pump) is not
working
E06（＊）
GV did not work correct
E07（＊）
Filament of Pi gauge broken
Contact to service engineer