Instruction manual

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(4) Record A / B selection
It selects which screen is to be recorded by Record functions.
2.3.6 Operation Panel
Operation Panel has three tabs.
Controls and setup tools for SEM operation are placed on the SEM and UTILITY tabs.
Arrangement of controls is possible to be customized over two tabs.
The STAGE tab contains controls for the specimen stage. All controls are available for Type2 5
axes motorized stage, and partially available for Type1 manual and Type1 3 axes motorized
stage.
The following pictures show typical arrangement.
SEM tab STAGE tab UTILITY tab
Fig 2-20 Operation panel