User's Manual

Length Measure-
ment
Position Tolerance
(MPE)
General Formula
Lenght Measure-
ment
EUni:0:LT,MPE
2)
Pos. 1 to 2
(1.5 m dis-
tance)
±32 μm ±21 μm + 8.5 μm/m
Pos. 3 to
15
(3 m dis-
tance)
±46 μm
Pos. 16 to
19
(6 m dis-
tance)
±72 μm
Pos. 20 to
29
(1.5 m dis-
tance)
±32 μm
Pos. 30 to
35
(9 m dis-
tance)
±97 μm
Pos. 36
(1.5 m to
10 m)
±14 μm
(ADM)
±14 μm (ADM)
Pos. 37
(1.5 m to
20 m)
±14 μm
(ADM)
Pos. 38
(1.5 m to
30 m)
±14 μm
(ADM)
Pos. 39
(1.5 m to
40 m)
±14 μm
(ADM)
Pos. 40
(1.5 m to
50 m)
±14 μm
(ADM)
2)
in accordance with ISO 10360-10:2021, chapter 6.4
Description of the System 41