User's Manual

Table Of Contents
ISO length measurement – in-line
Probing Size and Probing Form
PSize.Sph.1x25:SMR:LT,MPE ±20 μm
PForm.Sph.1x25:SMR:LT,MPE 50 μm
2)
in accordance with ISO 10360-10:2021, chapter 6.2
ISO Probing Measurement –traversal
A
d
d
d
d
d
d
d
d
B
B
B
B
B
B
B
B
A
A
A
A
A
A
A
25484_001
2.8.4 Reector
Hollow Corner Cube Reectors (RRR and BRR) and glass prisms (TBR) are
available with the following tolerances:
Roundness (Ball) Value
Red-Ring Reector (RRR) < ±3 μm
Break Resistant Reector (BRR) < ±3 μm
Tooling Ball Reector (TBR) < ±6 μm
Reectors
42 Description of the System