User Manual

MMS
®
Inspection SPG High 39
Glossary
• Calibration shim, thin shim of a specified thickness. An adjustment to the
corresponding profile height value is performed for each calibration foil
thickness.
Calibration
A calibration is a reference measurement, which adjusts the gage to the two
extreme values of zero and "maximum height" (air value). You can run the cal-
ibration with up to 2 calibration shims (from the scope of supply).
Calibration method
The calibration method is a predefined calibration procedure. This procedure
determines the measurement accuracy for subsequent measurements. A cali-
bration method consists of one or a combination of both of the following cali-
bration steps:
Calibration zero: Measurements on the glass plate from the scope of supply
Calibration foil: Measurements on the calibration shim, which lies directly on
the glass plate.
• Required material: Calibration shims from the scope of supply. The hole
in the calibration shim (foil) marks the specified measuring area.
Measuring application
A measuring application can be characterized not only by the measurement
location or the Sample, but also by the measuring settings, e.g. limit monitor-
ing and measured reading grouping. If any one of these parameters changes,
there is a new measuring application and you have to create a new Batch.
Sample
• Large surface with several measurement locations
• Part of any size
Specimen
see under Calibration standards
Coefficient of variation V [%]
Percentage scatter of a series of measurements, i. e. standard deviation from the mean
value. V [%] is a characteristic process constant. A sudden change in V [%] indicates
a change in process conditions.