user manual

3.2 Mounting a Specimen

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(2) Loading a Specimen

(a) Set the specimen holder on the specimen holder receptacle on the stage.

(b) Using the handles on both sides of the specimen stage, push the stage into the chamber.

Refer to 3.2.4.2 Measuring and Setting the Specimen Height

(2) Setting the Specimen Height and Specimen Size

IMPORTANT: Do not touch the operation parts such as gears and driving screws and note that

clothes are never placed when you bring the hand close to the movement

mechanism in the specimen stage by the specimen exchange, etc.

IMPORTANT: The height of a specimen should be measured with great care. Be sure to set

the specimen size and height on the Stage Control menu. If they are not

properly set, when the specimen is tilted or Stage Z is small, the specimen can

touch the objective lens or the backscattered electron detector that is provided

on the underside of the objective lens, potentially causing damage to the

specimen, objective lens, and backscattered electron detector.

(d) Press the EVAC button on the front EVAC Panel located on the front side of the main

unit or click EVAC located in the upper right section of the Control Panel. Evacuation of

the specimen chamber then commences. After approximately 2 minutes accelerating

voltage can then be energized.

EVAC Panel Control Panel

Fig. 3.2-17 EVAC Button (evacuating the specimen chamber)

CAUTION: When inserting the stage into the specimen chamber, be careful so that your

fingers will not be caught between the stage and the specimen chamber.

IMPORTANT: When evacuating the chamber, be sure to hold the stage tightly against the

chamber to ensure a tight fit before turning the evacuation process on.

Evacuation cannot take place unless the specimen stage has a tight fit with the

chamber.