user manual

3.5 Operation for Image Observation
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IMPORTANT: The BSE uses semiconductor elements in its detection unit. To prevent
damage to the semiconductor elements and the specimen, the following
precautions should be observed:
• The movable range for the stage must be observed strictly. In particular, a short WD or a
high angle tilt can cause the stage or specimen to touch the detector, damaging the sensor.
See 3.5.6 Operation of the Specimen Stage (Type I - Manual Stage).
• The specimen height should be set accurately by using the supplied specimen height gauge.
See 3.2.3.2 Measuring and Setting the Specimen Height.
• For the Type II stage, always measure the specimen height using a specimen height level
gauge and set the specimen height in the Stage tab of the Operation Panel. If the actual
specimen height is greater than the set height, the specimen can come into contact with the
semiconductor sensor even within the software-defined movable range.
See 3.2.4.2 Measuring and Setting the Specimen Height.
See 3.5.7.3 Setting Specimen Size and Detectors in Use.
• When inserting the specimen stage use the interference verification protective metal fixture
and check the operating range of the stage axes so that the specimen will not touch the
fixture; the specimen stage should be used only within that range.
See 3.5.6.6 Checking the Ranges of T-axis Tilting and Z-axis Motion when Observing a Bulk
Specimen.
• To prevent any contact between a specimen and the detector sensor, the Z (WD) should be
used in a range greater than 5 mm.
Fig. 3.5-4 Interference Verification Protective Fixture