user manual

4.1 Maintenance of Electron Optical Column
4 - 18
Fig. 4.1-37 Condenser Aperture Assembly
Holder
50E-1677
Pipe 1
52E-6526
Holder ring
50E-1493
Aperture
535-1289
Pipe holder
52E-6531
Pipe 2
52E-6527
Pipe 3
52E-6528
Pipe 4
52E-6529
41.5 mm
38.0 mm
87.0 mm
27.0 mm