user manual

6.3.2
6 - 13
Command Set value Return Contents
SetStagePosition X：0-
100000000(nm)
100 nm Step
Y：0-50000000(nm)
100 nm Step
Z：5000000-
70000000
(nm)
100000 nm
Step
T：-20000-90000
x1000(deg)
0.1deg Step
R：0-359900
x1000(deg)
0.1deg Step
0: Normal
receiving
Excluding 0:
Abnormal
receiving
5 axis moving
SetStagePositionXYR X：0-
100000000(nm)
100 nm Step
Y：0-50000000(nm)
100 nm Step
R：0-359900
x1000(deg)
0.1deg Step
0: Normal
receiving
Excluding 0:
Abnormal
receiving
3 axis(XYR) moving
SetStageHomePosition 0: Normal
receiving
Excluding 0:
Abnormal
receiving
Home position
move
(Z=10 mm)