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6.3 Specification of S-3400N External Communication (Option)

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SetStageHomePosition2 0: Normal

receiving

Excluding 0:

Abnormal

receiving

Home position

move2

(Z=65 mm)

SetVacuumMode 0 : High vacuum

1 : Low vacuum

0 : Normal end

2 : Abnormal end

Vacuum mode

setting

SetVacuum 6 to 270：6 – 270

(Pa)

0 : Normal end

2 : Abnormal end

Vacuum value

setting

SetSemCommand Command string 0: Normal

receiving

Excluding 0:

Abnormal

receiving

Extension

command

setting