user manual

6.3.2

6 - 15

Table 6.3-3 Event Command

Command Return Contents

HVOnChange 0 : HV-OFF

1 : HV-ON

HV changing

VaccChange 300-30000：0.3-30ｋ

Acceleration voltage changing

HVOnFinished Completion of HV setting

VaccFinished Completion of acceleration

voltage setting

MagChange 5-300000：x5-x300k Magnification changing

WDChange 400-7000：4.00-

70.00mm

W.D. changing

ObjLensChange Coarse：０-16383

Fine：0-4095

Focus value changing

ProbeCurrentChange 0-1000：0.0-100.0 Probe current changing

ABCFiniished Completion of ABCC

AFCFinished Completion of AFC

StagePositionChange Stage position changing

StagePositionFinished Completion of stage move

VacuumModeChange 0 : High vacuum

1 : Low vacuum

Vacuum mode changing

VacuumChange 6-270：6-270Pa Vacuum value changing

SemCommandFinished End of extension command