user manual

2.1.4
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2.1.4 Specimen Stage (Type II)
Figure 2.1-4 shows the appearance of specimen stage driven by motors (Type II).
Fig. 2.1-4 Large Specimen Stage (Type II)
• Range of movement in X direction: 0 to 100 mm
• Range of movement in Y direction: 0 to 50 mm
• Range of movement in Z direction: WD = 5 to 65 mm
(X-ray analysis position is at 10 mm working distance)
• Range of movement in R direction: 360° continuously
• Range of movement in T direction: -20° to 90°
• Touch sensor and absorbed current measurement terminal: This terminal is for the
measurement of the absorbed
current of the electron image of
a specimen (normally it is used
as a touch sensor terminal).
Absorbed current
measuring terminal
(normally used as a
touch sensor terminal)