Datasheet

HAF Series – High Accuracy
-750 -600 -150-450 -300 750600150 450300
Flow (SCCM)
0
-0.12
-0.06
0
0.06
0.12
Pressure Drop (inches H
2
O)
Pressure Drop (inches H
2
O)
Flow (SCCM)
200-200
-0.6
-0.4
-0.2
0
0.2
0.4
0.6
0-50 50 150-150 100-100
0 20 40 60 80 100
0
50
100
150
200
250
300
Time (s)
Temperature (°C)
Max. temp. = 243 °C
Max. temp. = 205 °C
Housing temp. (top of device)
Pin temp. (bottom of device)