Manual

28
5. Precautions for Use
5.5 Suction Rate
The robot will conform to cleanliness class 10 when air is sucked at a specified rate from the quick suction
joint provided on a side face of the base.
x The user must provide the suction device and suction air tube (I12).
Model Suction rate (Nl/min)
IX-NNC50/60 60
IX-NNC70/80 80
A
pplicable tube:
Outer diameter I12
(inner diameter I8)
Quick suction joint
z The clean room must be designed as a down-flow environment.
z Cleanliness class 10 corresponds to a particle size of 0.1 Pm.
z The robot will generate dust if suction is not provided.
Caution