Owner's manual

2. Installation
54
2.4 Clean-Room Type
x Cleanroom type can have the performance to comply with Cleanroom Class 10 (0.1ȝm) by vacuuming the
air at the two vacuum joints. The table below shows the reference of vacuuming capacity at the maximum
speed for each model.
Have the pipe layout to make the vacuum performance at the two points get even.
x Have all the base attachment holes at the bottom of the unit closed when using the unit. If there is a
through hole on the body, it can drop the cleanliness.
2.4.1 Reference for Vacuuming Capacity
Lead Vacuuming Capacity
Model
[mm] Nl/min (L/min)
3 15 (16)
6 30 (32)
12 50 (54)
RCP4CR-SA5C
20 80 (86)
3 15 (16)
6 30 (32)
12 50 (54)
RCP4CR-SA6C
20 80 (86)
4 30 (32)
8 40 (43)
16 70 (75)
RCP4CR-SA7C
24 90 (97)
2.4.2 Vacuum Joint
A quick joint structure is applied to the vacuum joint so an air tube available in the market can be easily
joined.
Model Air Tube Outer Diameter
RCP4CR-SA5C
RCP4CR-SA6C
I6
RCP4CR-SA7C
I8