User guide

8 - 5
PN 074-566-P1B
Composer Elite Operating Manual
Temperature readout
exceeds 71°C and then
displays 99.999°C until
Acoustic Sensor cools to
71°C. Temperature cycling
continues if cause is not
resolved.
Electronics failure
activated the Thermal
Safety Switch.
Invalid Concentration. Exchange Interconnect
cable. If symptom persists,
contact INFICON.
Temperature: ABOVE
TEMP is constantly
displayed.
Acoustic Sensor is located
where ambient
temperature exceeds
Temperature Setpoint 1.
Invalid Concentration. Increase Temperature
Setpoint 1 to ambient
temperature plus 5°C
(refer to section 2.1.1.3,
Heated Process Tubing
and Acoustic Sensor
Temperatures, on page
2-2).
Temperature: BELOW
TEMP, NEAR TEMP, or
ABOVE TEMP is
displayed.
Temperature has not yet
reached Temperature
Setpoint 1.
Invalid Concentration. Wait for STEADY and AT
TEMP to appear (refer to
section 3.2.3, How to
Calibrate, on page 3-3).
Temperature: BELOW
TEMP, NEAR TEMP, or
ABOVE TEMP is
displayed after AT TEMP
was displayed.
Acoustic Sensor
temperature changed from
Temperature Setpoint 1.
Invalid Concentration. Wait for STEADY and AT
TEMP indicators to appear
before performing
Reference Zero (refer to
section 3.2.3, How to
Calibrate, on page 3-3).
Thickness and/or
composition of film on
substrate is incorrect.
Incorrect Molecular
Weight and/or Gamma
was entered.
Depends on magnitude of
Wrong Molecular Weight /
Gamma error.
Enter correct Molecular
Weight and Gamma (refer
to Table B-1 and section
4.1.4, What To Do when
the Specific Heat Ratio for
a Gas is Unknown, on
page 4-3).
Table 8-1 FMEA (continued)
Symptom Possible Cause Effect on Concentration
Accuracy
Remedy