O P E R A T I N G M A COMPOSER Gas Concentration Controller ® IPN 074-289 N U A L
O P E R A T I N G M A N U A COMPOSER Gas Concentration Controller ® IPN 074-289L TWO TECHNOLOGY PLACE EAST SYRACUSE, NY 13057-9714 USA P. O . B O X 1 0 0 0 FL-9496 BALZERS, LIECHTENSTEIN BONNER STRASSE 498 D-50968 COLOGNE, GERMANY P h o n e : + 3 1 5 . 4 3 4 . 11 0 0 Fax: +315.437.3803 Email: reachus@inficon.com Phone: +423.388.50.36 Fax: +423.388.47.51 Email: reachfl@inficon.com Phone: +49.0.221.347.1999 Fax: +49.0.221.347.1478 Email: reachld@inficon.
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Composer Operating Manual Table Of Contents Chapter 1 IPN 074-289L Getting Started 1.1 1.1.1 1.2 1.2.1 1.3 1.4 1.4.1 1.4.2 1.4.3 1.5 1.6 1.7 1.7.1 1.7.2 1.7.3 1.8 1.9 1.10 1.10.1 1.10.1.1 Introduction . . . . . . . . . . . . . . . . . . . . Description of the Instrument System Using this Manual . . . . . . . . . . . . . . . Symbols and their Definitions . . . . . . Performance Specifications . . . . . . . . How To Contact Customer Support . . Application Support . . . . . . . . . . . . . .
Composer Operating Manual 1.10.4.1 When Used as a Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18 1.10.4.2 Basic Connection to a Reactor (Concentration Measuring Mode) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19 1.10.4.3 How to Connect the Instrument for Independent Control of the Concentration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20 1.10.4.4 Basic Connection To A Reactor—Bulk Flow Control Mode . . . . . . . . . 1-21 1.
Composer Operating Manual Chapter 3 Applications Guide 3.1 3.1.1 3.1.2 3.1.3 3.1.4 3.1.5 3.1.6 3.1.7 3.1.8 3.1.9 3.1.9.1 3.1.10 . . . . . . . . . . . . . . . . 3-1 . . . . . . . . . . . . . . . . 3-1 . . . . . . . . . . . . . . . . 3-1 . . . . . . . . . . . . . . . . 3-2 . . . . . . . . . . . . . . . . 3-2 . . . . . . . . . . . . . . . . 3-4 . . . . . . . . . . . . . . . . 3-5 . . . . . . . . . . . . . . . . 3-5 . . . . . . . . . . . . . . . . 3-6 . . . . . . . . . . . . . . . . 3-6 . . . . . . . . . . .
Composer Operating Manual 3.2.1.3 Typical Parameter Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24 3.2.1.4 Setting Total Flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24 3.2.1.5 Computing the System’s Time Constant . . . . . . . . . . . . . . . . . . . . . . . 3-25 3.2.1.6 Calculation Example. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25 3.2.2 3.2.3 3.2.3.1 How to Precisely Tune a Control Loop .
IPN 074-289L Composer Operating Manual 4.3.5.2 Optional - Composer LCD Display Description . . . . . . . . . . . . . . . . . . . 4-9 4.3.5.2.1 Numerical Display and Units Indicators . . . . . . . . . . . . . . . . . . . . . . . . 4-10 4.3.5.2.2 State Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11 4.3.5.2.3 Instrument Zero Indicators. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12 4.3.5.2.4 Communication Indicators . . .
Composer Operating Manual Chapter 6 Diagnosing Problems 6.1 6.2 6.2.1 6.2.2 6.2.3 6.2.4 6.2.5 6.2.6 6.3 6.4 6.5 6.5.1 6.5.2 6.6 6.6.1 6.6.2 Introduction . . . . . . . . . . . . . . . . . . . . . . . Failure Effects Mode Analysis (FEMA) . . . Category 1; Temperature Related . . . . . . Category 2; Acoustic Generator Related . Category 3; Acoustic Receiver Related . . Category 4; Installation Related . . . . . . . . Category 5; User Related . . . . . . . . . . . . . Category 6; Miscellaneous . . . . . . . .
Composer Operating Manual Chapter 8 IPN 074-289L Software Guide 8.1 8.2 8.2.1 8.2.2 8.2.3 8.2.3.1 Introduction . . . . . . . . . . . . . . . . . Getting Started . . . . . . . . . . . . . . Computer System Requirements . Software Installation . . . . . . . . . . First Time Use. . . . . . . . . . . . . . . Set Up Communications . . . . . . . . . . . . . . . . . . . . . . . . . 8.2.3.2 Verify Communications with Composer . . . . . . . . . . . . . . . . . . . . . . . . . 8-3 8.2.3.
Composer Operating Manual Chapter 9 Bibliography Chapter 10 Glossary Chapter 11 Recommended Parts List 11.1 Replacement Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1 Chapter 12 Quick Use Guide 12.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Composer Operating Manual Chapter 1 Getting Started 1.1 Introduction The Composer system is designed to measure and generate signals appropriate for the measurement and control of the composition of binary gasses. It is optimized for operation at pressures as low as 70 Torr (9.33 kPa) and with supply line temperatures as high as 65 °C. It has unsurpassed precision and reproducibility when measuring small concentrations of heavy molecular weight components in a low molecular weight carrier gas. 1.1.
Composer Operating Manual For the LED version of the Controller module, a software application called the Setup Tool allows the complete configuration for a single application. One of two standard lengths of Interconnect Cable is provided with the purchase of an Instrument System. There is also an optional 24 V(dc) Power Supply module.
Composer Operating Manual 1.3 Performance Specifications The following sections provide the Composer’s performance specifications. Transducer’s swept volume 18 cc Temperature range of transducer 0 - 65 °C, controlled from 25 to 65 °C; heating only Temperature range of controller 0 - 50 °C Transducer’s pressure range 70 - 1000 Torr (9.33 - 133.3 kPa) operational range without zero shift 0 - 1520 Torr (0 - 202.
Composer Operating Manual 1.4 How To Contact Customer Support If you have a question about your instrument, please read this Operating Manual before contacting Customer Support. If you can not find the answer in this manual, decide whether: your difficulty is with how you are using the instrument—in this case, contact Application Support. or your instrument needs repair—in this case, contact Field Service and Repair Support.
Composer Operating Manual 1.4.3 Returning Your Instrument Do not send your instrument without first speaking with a Customer Support Representative. You must obtain an RMA (Return Material Authorization) number from the Customer Support Representative. If the delivery of a package without an RMA number is attempted, INFICON® will refuse delivery and the package will be returned to you.
Composer Operating Manual 1.6 Physical Requirements The following sections provide the physical dimensions, weight, mounting requirements, ventilation requirements, and the perimeter for maintenance access required by the Composer. Physical dimensions Transducer: 3.75" H x 5.5" W x 5.6" D (9.53 cm x 14 cm x 14.2 cm) Controller: 3.5" H x 8.0" W x 12.0" D (8.9 cm x 20.3 cm x 30.5 cm) Weight Transducer: 4.8 lb. (2.2 kg) Controller: 6 lb. (2.
Composer Operating Manual 1.7 Electrical Power Requirements The following sections detail the electrical power requirements for the Composer as minimally required by, or supplied by the optional Power Module. WARNING Failure to comply with the electrical power requirements stated below may result in the unit malfunctioning or being damaged, and could result in personal bodily injury. 1.7.1 Rated Output to Composer Voltage . . . . . . . . . . . . . . . . . . . . .
Composer Operating Manual 1.7.2 Rated Input Operational Voltage Range . . . . . . 90 to 264 V(ac) Overvoltage . . . . . . . . . . . . . . . . . . Category II (EN 61010-1, Annex J) Frequency Range . . . . . . . . . . . . . 47 to 63 Hz Mains Connection . . . . . . . . . . . . . 3 Wire L, N, G Unit Mains Connector . . . . . . . . . . IEC320 Inrush Current . . . . . . . . . . . . . . . . < 30 A peak Line Fusing . . . . . . . . . . . . . . . . . . Required, consistent with power rating of supply Line Cord . . .
Composer Operating Manual 1.8 Environmental Requirements The following paragraphs detail the Composer’s environmental requirements. Use This instrument is designed for indoor use only. Altitude range The Composer can be used to a maximum altitude of 2000 meters (6561 feet). For applications above this altitude, please consult the factory. Maximum humidity Non-condensing relative humidity at operating temperature. Pollution degree Category II (as defined by EN61010-1, only non-conductive pollution occurs).
Composer Operating Manual 1.10.1 Physical Installation The Transducer is connected to the Reactor’s delivery tubing with Cajon™ VCR-4 fittings. Although a vertical orientation is shown, there is no restriction on mounting orientation. It is recommended that the Transducer be secured by means other than relying on the plumbing. Two 1/4"−20 holes are provided on two faces of the Transducer for this purpose. Any one of the four threaded holes will provide a ground connection.
Composer Operating Manual 1.10.1.1 Use with Heated Delivery Lines The Transducer may be attached to Delivery Lines heated to a maximum of 60 °C. The temperature of the Transducer’s Resonant Chamber is controlled to a maximum of 65 °C. This temperature is a user determined parameter. It takes less than 15 minutes for the Resonant Chamber to reach temperature and up to 1 hour for maximum stability. Normal temperature excursions are ± 0.05 °C or less.
Composer Operating Manual 1.10.2.1.1 The BNC Connectors Because complete BNC cables are so common, there are no mating connectors supplied in the ship kit for the Controller’s source and recorder outputs. It is recommended that completed BNC type cables be purchased locally, even if one end is cut off for connection to the external apparatus. 1.10.2.2 The D Shell Connectors The D shell connectors use solder cup contacts that will accept solid or stranded wire with a maximum individual wire size of 20 AWG.
Composer Operating Manual Figure 1-2 Solder Cup Connector Wire Strip Length 1/4" (6.4 mm) Solder Cup Contacts Grounding Indents (Plug Only) 1.10.2.3 How to Connect Electrical Power to the Instrument All external electrical power is supplied to the Controller through the DB-9 style POWER connector. It is subsequently distributed to the Transducer through the Interconnect Cable. 1.10.2.
Composer Operating Manual 1.10.2.5 Protective Grounding Requirements The Controller and Transducer must be connected to a low impedance and reliable earth ground using a high quality solid copper conductor of the shortest possible length. It is recommended that this wire be a minimum of 16 gauge and that any connector terminals be soldered.
Composer Operating Manual 1.10.3.2 Connections To Earth Ground The ground connection on the Controller is a threaded stud with a hex nut. It is convenient to connect a ring terminal to the ground strap, thus allowing a good connection with easy removal and installation. The ground connection to the Transducer may be made to any one of four 1/4"-20 mounting holes. See Figure 1-3 for the suggested grounding scheme.
Composer Operating Manual 1.10.3.3 Minimizing Noise Pickup from External Cabling When an instrument is fully integrated into a deposition system, there are many wire connections; each a potential path for noise to be conducted to the inside. The likelihood of these wires causing a problem can be greatly diminished by using the following guidelines: Use shielded coax cable or twisted pairs for all connections. Minimize cable lengths by centralizing the controller.
Composer Operating Manual 1.10.4 Connections to the Reactor When integrating this Instrument System there are three basic levels of integration to the Reactor. As a Monitor, where the measured concentration is either automatically recorded or just visually observed. Any adjustments to the system is either manually executed or the Reactor’s controller makes the adjustments based on user or OEM supplied algorithms.
Composer Operating Manual 1.10.4.1 When Used as a Monitor Concentration output is available from an analog voltage output, see section 4.3.6.8 on page 4-27. It is also available visually on a scrolling recorder screen from the optional Monitor Software package or the optional LCD display. When used as a Monitor, it is only necessary to view the concentration as displayed on the LCD display or the Monitor Software’s main screen.
Composer Operating Manual 1.10.4.2 Basic Connection to a Reactor (Concentration Measuring Mode) If a permanent connection from the Reactor’s electronics is made to the back panel’s CONCENTRATION OUT connector, the reactor’s controller may be configured to read the value of concentration and display it on the main controller interface. The reactor’s controller may then be able to independently manipulate variables to maintain or vary concentration. See Figure 1-5.
Composer Operating Manual 1.10.4.3 How to Connect the Instrument for Independent Control of the Concentration This Instrument System is also capable of independent control of the concentration. An analog control voltage is available on the CONTROL OUT connector for this purpose. This control voltage is intended to be used as the control input voltage to a mass flow controller. A suggested control configuration is shown in Figure 1-6.
Composer Operating Manual The parameters necessary for tuning the concentration maintaining Control Loop are readily visible and alterable through the LCD display or the optional Monitor software. In the absence of the optional software, these parameters may be configured permanently at the time the Instrument System is installed through a temporary digital setup link using the Setup software (see section 8.2 on page 8-1). There are three parameters to optimize.
Composer Operating Manual 1.10.5.2 Positioning There is no preferred orientation for the Transducer. It is, however, best to maintain the correct inlet / outlet convention. However, if the connections to the inlet and outlet are reversed, there will be no difference in performance until the flow exceeds about 1000 sccm. The inlet tube is intentionally longer than the outlet tube so that the incoming gas more closely reaches the Resonant Chamber’s temperature before entering. 1.10.5.
Composer Operating Manual 1.10.5.5 Transducer Series Composer transducers are divided into two series. The controller must be configured to match the transducer’s series by properly setting SW#1 CFGR1. See section 4.3.6.5 on page 4-25. The series is determined by the series designated on the transducer’s serial number label. Set the switch active if the serial number’s series is 18 or lower, otherwise leave the switch in the off state.
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Composer Operating Manual Chapter 2 How the Instrument Works 2.1 Speed of Sound and Gas Composition The speed of sound, C, in an ideal gas is equal to: C = γRT ---------M [1] where: C Capacity at Constant Pressure-------------------------------------------------------------------------------------γ = ------p = Heat = 1.4 for Air Heat Capacity at Constant Volume Cv [2] T = Kelvin temperature R = Universal Gas Constant = 8.
Composer Operating Manual C f = ------2L [6] In practice, the exact value of L is unimportant. Composition is computed from knowledge of the mixture's frequency relative to the frequency of the pure gas as follows.
Composer Operating Manual Combining 12, 13 and 14: [(g – h)(1 – h)] λ { 1 + ( m – 1 )x } = ------------------------------------------------ + h [x(1 – g) + (g – h)] [15] Simplifying leads to, 2 Ax + Bx + C = 0 [16] where, A = λ( m – 1)(1 – g) [17] B = λm ( g – h ) + λ ( 1 – 2g + h ) – h ( 1 – g ) [18] C = (λ – 1)(g – h) [19] Since the equation is obviously a quadratic, the solutions are of the following form.
Composer Operating Manual Figure 2-1 Mole Fraction of Trimethylindium in H2 vs. Instrument’s Frequency A simple explanation of the functioning of this Instrument System is that it measures concentration by first determining the resonant frequency of the gas flowing through it and then comparing the measured resonant frequency to that of the pure carrier gas. Utilizing this frequency ratio, λ , and the physical parameters of the gasses, m and γ , the concentration is derived.
Composer Operating Manual (Manipulated Variable). It is normal for this temperature to be controlled to +/0.05 °C. It is also normal for an offset between the value of the temperature parameter and the actual temperature. Measurement of the speed of sound is also dependent on the instrument’s ability to precisely measure the amplitude of sound transmission through the Resonant Chamber. This is especially difficult as the pressure in the Resonant Chamber is lowered.
Composer Operating Manual 2.3 Control Loop Primer The instrumental advances in measurement speed, precision and reliability would not be complete without a means of translating this improved information into improved process control. For a CVD process, this means keeping the reactor’s inlet concentration as close as possible to the target concentration.
Composer Operating Manual Figure 2-2 Response of process to an open loop step change at t=0 (control signal is increased) T1 = t ( 0.632 ) – L [23] Change in Output K p = ------------------------------------------------------------- [24] Change in Control Signal The value of three parameters are determined from the process reaction curve. They are the Steady State Process Gain, Kp, the Dead Time, L, and the Time Constant, T1.
Composer Operating Manual controllers. R(s) represents the concentration set point. The feedback mechanism is the error generated by the difference between the measured concentration, C(s), and the target concentration, R(s). Figure 2-3 PID Controller Block Diagram concentration C(s) set point error R(s) + E(s) Σ Kc(1+s/Ti + Td*s) Kp exp(-L/s) T1s + 1 [process] [controller] The key to using any control system is to choose the proper values of K , T c d and T .
Composer Operating Manual ∞ ITAE = ∫ t e ( t ) dt [28] 0 ITAE is insensitive to the initial and somewhat unavoidable errors, but it will weight heavily errors occurring late in time. Optimum responses defined by ITAE will consequently show short total response times and larger overshoots than with either of the other criteria.
Composer Operating Manual Or, If the change-in-error is negative (moving away from set point), then the action is large negative (reduce control power by largest allowable limit). There are about twenty-five such rules in our controller logic. Each rule is mathematically transformed using operations of fuzzy logic. At the end, the outcome of all the rule base are combined by centroid method to yield a numerical value for action.
Composer Operating Manual Figure 2-4 Comparison of PID and Fuzzy Logic Control PID Control: Process Gain = 0.96, Dead Time = 14 sec., Time Const. = 28 sec. IPN 074-289L Fuzzy Logic Control Process Gain = 0.96, Dead Time = 14 sec., Time Const. = 28 sec.
Composer Operating Manual 2.5 Instrument Overview The Instrument System Block Diagram, see Figure 2-5, depicts the general layout of the complete system. Overall layout first depends on the convenient location of the Transducer within the flow of the precursor delivery system. The controller may then be located up to twenty feet away (five feet is preferred) either in a relay rack, table top, or deployed within the reactor.
Composer Operating Manual 2.6 Description of Subsystems The two major components which comprise the Composer are the Transducer and the Controller. 2.6.1 Transducer IPN 761-601 The basic Transducer element is the resonant chamber with the inlet and outlet tubes providing a means of transporting the gasses from the reactor’s supply lines, through the transducer’s case and finally connecting to the structure that defines the shaped resonant chamber, see Figure 2-6.
IPN 074-289L Figure 2-6 .
Composer Operating Manual 2.6.2 Controller IPN 761-600 The following sections describe the 761-600 controller; see the block diagram in Figure 2-7 on page 2-19. 2.6.2.1 CPU (Central Processing Unit) U30, U26, U28 The CPU section uses an Intel 80C196KC(U30) for the controller running at 19.6608 MHz along with a DS1244Y(U26) 32X8 battery backed RAM and a PSD302(U28) for ROM and address decoding.
Composer Operating Manual 2.6.2.3 FPGA U33 The FPGA is an Actel A1010B programmed to act as an interface to the various sections of the system. It provides a bi-directional parallel port between the CPU and the DSP along with the necessary logic for handshaking and power up boot loading of the DSP by the CPU. The FPGA also performs a serial to parallel, parallel to serial conversion and handshaking to read and write the temperature A/D by either the CPU or the DSP.
Composer Operating Manual 2.6.2.5 Sensor Temperature Control U3, U5D, U13, U14, VR1, U19, Q2 Temperature of the sensor is measured by a Crystal Semiconductor A/D converter CS5516-AS (U13). The 16 bit converter is configured to measure a range of temperature from 0 to 80 °C thus yielding a resolution of 1.22e-3 degrees. Precision is maintained by the use of .1% resisters with low TCO (R25,26,27,32,33) and AC excitation to eliminate thermocouple effects.
Composer Operating Manual 2.6.2.7 Power Supply U27, U25, U23, U11, U10, U22, U4 A LT1070(U27) is used as an 18 volt pre-regulator adjusted by R60. A UC3846(U25) is used to drive the primary of isolation transformer T1 with Q3 and Q4. Secondary winding outputs are rectified and filtered and then regulated by U23, U11, U10 and U22 to -15, +15, +5 and -5 volts. A DS1231(U4) is used to detect power fail and to provide a power up reset pulse. 2.6.2.
IPN 074-289L Figure 2-7 Electrical System Block Diagram Composer Operating Manual 2 - 19
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Composer Operating Manual Chapter 3 Applications Guide 3.1 Advice and Tips The following paragraphs review many of the common questions encountered during setup and operation. 3.1.1 What is the Required Warm Up Time Once the set point for the Transducer’s temperature is altered, it will take up to 15 minutes for the temperature to settle around the operating point. It may take even more time if the temperature set point is lowered and is close to the ambient temperature.
Composer Operating Manual NOTE: Always wait for the STEADY lamp on the Controller’s front panel to illuminate before completing the Reference Zero establishment process; that is, actually pressing the switch. This indicates that the measurement conditions are stable and a relative equilibrium has been reached. It sometimes takes many minutes for the light (low molecular weight) carrier gas to clean the Resonant Chamber of any residual Precursor or other heavy gasses.
Composer Operating Manual to a range of about 1.1 to 1.7 for almost every known gas. Consequently, guesses that are wrong don’t make a lot of practical difference if they are reasonable guesses. It is also possible to make intelligent guesses about unknown gasses using the value of the Specific Heat Ratio for a similar gas. Interestingly, it is almost always more accurate to overestimate the Specific Heat Ratio than to underestimate by the same amount; see Table 3-1 and Figure 3-1.
Composer Operating Manual NOTE: Long term use of the Composer with some of the materials listed in Table 3-1 may not be possible. The user is responsible for ensuring compatibility of use for all materials. Figure 3-1 When the Specific Heat Ratio for a Gas is Unknown it is Generally Better to Overestimate the Specific Heat Ratio In an ideal environment none of the parameters that influence the concentration measurement change.
Composer Operating Manual 3.1.6 What is the Effect of Pressure Variation? Because not all mixtures are purely ideal and the use of Diaphragms to separate the toxic and corrosive gasses from the Exciting and Receiving microphones is required, this Instrument System displays a small influence from pressure changes. The effects of pressure variation on concentration are shown in Figure 3-2. Figure 3-2 Effect of pressure on apparent concentration IPN 074-289L 3.1.
Composer Operating Manual 3.1.8 What is the Effect of Flow Variation? There is virtually no flow induced effect on concentration measurement in this Instrument System except at the highest flow rates, see Figure 3-3, the pressure drop across the sensor is about 10 torr (1.33 kPa) per 500 sccm. Figure 3-3 Effect of flow on apparent concentration The use of a low frequency Resonant Chamber has significant advantages over Time Of Flight (TOF) methods.
Composer Operating Manual 3.1.9.1 Calculation Example The time interval for an acoustic pulse to travel 0.2 meters in hydrogen is computed as follows: The speed of sound in hydrogen is 1284 meters/second, consequently the time of transit across the chamber is 0.2 meters / 1284 meters/sec = 1.56 E-4 seconds. See Figure 3-4. In order to achieve equivalent resolution to this instrument’s resonant technique, the TOF instrument’s ability to measure the pulse must be 1/50,000 of the transit time, or: 1.
Composer Operating Manual 3.1.10 What is the Long Term Stability of this Measurement System A Composer Transducer was checked weekly for its frequency in nitrogen at 175 Torr (23.3 kPa) and 50 °C. As of this writing there does not appear to be any trend that might be construed to relate to any wear mechanism or degradation with time, see Figure 3-5. In addition, the short term measurement stability was checked at the same time and plotted as Root Allan Variance (RAV).
Composer Operating Manual 3.1.11 Properties of Optional O-ring Materials The use of some chemicals may preclude the use of Viton seals. KALREZ elastomers are factory available. These materials are somewhat more permeable than Viton, especially for small molecules. NOTE: The high permeation rate of the optional elastomers may create some confusion when leak checking. It is possible that an apparent leak can occur long (approximately 30 seconds) after a specific joint has been probed.
Composer Operating Manual 3.1.12 What Happens if the Reference Zero is Improperly Set If the Reference Zero is set when the conditions are wrong, i.e. not pure gas, two bad results occur. 1 A permanent concentration offset equal to the concentration at the time of zero is introduced. This is not corrected until a proper Zero Set is performed. 2 The sensitivity is altered, leading to an error proportional to the concentration.
Composer Operating Manual 3.1.13 Composer Bulk Flow Control Configuration 3.1.13.1 General Composers with firmware version 4.00 (LED display) or 5.00 (LCD display) and higher are designed to have an alternate configuration that allows automatic feedback control of Bulk Flow, or Flux, in addition to the standard Concentration Control. Within this context, Bulk Flow is defined as the product of Concentration (mole%) and Bubbler Flow (sccm).
Composer Operating Manual 3.1.13.3 Controller Installation (Bulk Flow) SW#8 of CFGR2 must be activated to use Bulk flow Control. See Figure 3-7 on page 3-14 for detailed information on proper wiring of the interface. Note the presence of the 4.99 megohm resistor to ground from the common connection of relays K4 and K5 on the System I/O Connector.
Composer Operating Manual The Analog I/O option card has a 9 pin D connector. The pin out is as follows: Table 3-3 Option Card 9 Pin D Connector Pinout pin # function 1 ground 2 not used 3 not used 4 Concentration Read-out 5 ground 6 MFC Read-back input 7 ground 8 not used 9 not used IPN 074-289L The System I/O connector is fully described in section 4.3.6.1 on page 4-22.
Control OUT BNC Control IN BNC Dil./Conc. Out BNC Aux. Gnd NC K5 NO K4 4.
Composer Operating Manual 3.1.13.4 Operation (Bulk Flow) The PROG key alternates the display between operate and program modes. In operation there is no requirement for operator involvement once the Composer’s pertinent parameters are set, see section 3.1.13.5 on page 3-16. The 7-digit numerical display normally provides the measured concentration. It is also possible to temporarily view other system and instrument parameters by pressing one of the keys on the front panel.
Composer Operating Manual 3.1.13.5 Programming the Controller’s Parameters (Bulk Flow) When operating in the “Bulk Flow Control” configuration, the following list of parameters must be entered. See section 4.3.5.2.7 on page 4-15 for a complete description of each parameter and section 4.3.5.3 on page 4-17 (all sections) for a description of the display’s operation. 3.1.13.5.1 List of Parameters used for Describing the Bulk Flow Control Configuration PROG # . . . . . . . . . . . . . . . . . . . . .
Composer Operating Manual Minimum Bubbler Flow (User 3) . . Parameter used to set a minimum opening for the Bubbler’s MFC, avoiding unnecessary control action on start-up and resulting unpredictable concentration profiles. This parameter is overridden during periods of external (reactor) control [when the STOP message is illuminated]. (0.000 to full MFC range.) Max Input (User 5) . . . . . . . . . . . . Parameter sets flow corresponding to Max Voltage applied to Control In connector. Min Input (User 6) . .
Composer Operating Manual 3.1.13.6 Determining Process Control Loop Parameters (Bulk Flow) 3.1.13.6.1 Gain, Kp The most important parameter for good feedback control in the Bulk Flow Control configuration is Kp. It is an easy one or two step experimental exercise to determine this parameter. Step 1- While in External (reactor) control, establish a “normal” flow of gas through the bubbler. When stable, note the displayed concentration.
Composer Operating Manual 3.1.14 Analog I/O Option — Concentration Control Configuration In addition to its use enabling the Bulk Flow Control configuration, refer to section 3.1.13 on page 3-11, the Analog I/O option provides the following features in the Concentration Control configuration. A second analog output that: – When dilution control is not used, duplicates all of the functionality of the standard Concentration Out BNC, see section 4.3.6.8 on page 4-27.
Composer Operating Manual 3.1.15 How to Sample Flow with a Composer When the flow through a pipe exceeds the Transducer’s 1800 sccm limit, sampling of the process is required. In our experience simply bypassing some of the process gas through the Transducer can compromise the Composer’s precision, long term accuracy and add noise due to pressure and flow fluctuations.
Composer Operating Manual 3.2 Tutorials The following information is available: Control Loop Fundamentals — Concentration Control, see section 3.2.1 on page 3-21. Computing the System’s Time Constant, see section 3.2.1.5 on page 3-25 for Concentration Control or section 3.1.13 on page 3-11 for Bulk Flow. How to Determine Process Parameters, see section 3.2.3 on page 3-28. What if the NOVRAM’s Battery Fails and I Lose All My Stored Parameters?, see section 3.2.4 on page 3-32.
Composer Operating Manual NOTE: The use of a chart recorder, especially when beginning a new application, is highly recommended. Connect the recorder output to the Controller’s output and use it to monitor the response to small changes in the TARGET CONCENTRATION. If you do not know if the system is fast or slow, it is straight forward to measure the delay using the chart recorder. Using manual flow control, establish a flow rate and allow the measured concentration to become steady.
Composer Operating Manual Figure 3-9 Examples of Delay, or Deadtime Settings 3.2.1.2 Tuning a Fast Delivery System If the source response has been characterized as fast (Dead Time is less than 1 second), set the INTEGRATING TYPE control parameters as follows: DEAD TIME . . . . . . . . . . . . . . . . . since this is a fast source, set this parameter’s value to 0.1 and leave it there. IPN 074-289L TIME CONSTANT . . . . . . . . . . . . . set this parameter’s value to 0.1 and leave it there. PROCESS GAIN .
Composer Operating Manual The response of a system with too little controller gain (its PROCESS GAIN value is too large) is characterized as over damped as shown in Figure 3-10. Decrease the PROCESS GAIN value until the system oscillates as is shown by the under damped curve. Proper control is established by an intermediate value that approximates the critically damped curve. Figure 3-10 Examples of Damped Curves 3.2.1.3 Typical Parameter Values 3.2.1.
Composer Operating Manual 3.2.1.5 Computing the System’s Time Constant This Instrument System operates at 1 Hz in the Amplitude Track Mode; that is, it provides a new measurement of concentration every second. Now, how fast does the Reactor respond to a change? It is determined by the gas flow rate through the Reactor’s Delivery Line and the volume of the Reactor’s gas Delivery System between where the change is induced and its entry into the Reactor’s chamber.
Composer Operating Manual 7 Start data gathering. NOTE: Zeroing the instrument is not essential, but the concentration reading should be steady. 8 Start data logging. Wait about half a minute. 9 Press the MANUAL button to bring forth a pop up window. 10 Set bubbler gas flow and adjust dilution flow if total flow is to be conserved. 11 Press the SET FLOW button on the pop up.
Composer Operating Manual 21 Use linear regression technique to fit data to Y(t) = A + Bt. Then, by comparing with the above equation, we get Tc = 1/B and Td = -A/B. Thus, Kp, Tc and Td completely characterize the process under consideration. The same technique can be used to extract these parameters at an expected set point, slightly above and slightly below the set point. The average of these parameters will then be more representative of the dynamics of the process.
Composer Operating Manual Figure 3-12 Linear regression fit of data points taken in Figure 3-11. In this particular process, the time constant and dead time are 33.5 sec and 9.1 sec respectively. Whether one uses the PID controller or the Fuzzy Logic controller, knowledge of the process to be controlled is essential, because the control parameters are ultimately derived from process parameters.
Composer Operating Manual 3.2.3.1 Using Composer Monitor Software / Setup Tool 1 From the Setup >> Process Parameters menu option (or its icon on the Toolbar), set appropriate MFC parameters, gas parameters and total gas flow. 2 If total flow is to be conserved, the DIP SW#5 on CFGR2 must be set. 3 Connect MFC control cables to the back of the instrument. 4 Evacuate the cell and gas line. 5 Press the BYPASS button in Amp Track mode to start dilution gas flow.
Composer Operating Manual 15 Enter these values through the menu Setup >> Process Parameters. Also, select the control loop type of your choice. 16 Press the SEND button on the pop up window. Now is the time to verify the control loop's actions with the new found process parameters. 17 Wait until the mole-% returns to zero and steady light is illuminated. Press the START button to initiate control loop action. This should verify that the loop parameter values are reasonable.
Composer Operating Manual 3.2.3.3 Using Composer’s Front Panel Keypad (LCD Display Option) 1 Press the PROG button on the keypad to enter programming mode. Set appropriate MFC parameters, gas parameters and total gas flow. Choose reasonable values for target concentration, process gain, dead time and time constant parameters. These are temporary values which will be modified later. 2 If total flow is to be conserved, the DIP SW#5 on CFGR2 must be set.
Composer Operating Manual 14 Enter the programming mode again. Modify the process parameters with newly found values. Also, select the control loop type of your choice. Exit programming mode. Now is the time to verify the control loop's actions with the new found process parameters. 15 Wait until the mole-% returns to zero and steady light illuminates. 16 Press the START button to initiate control loop action. This should verify that the loop parameter values are reasonable.
Composer Operating Manual 3.2.5 Why is a Digital Connection to the System Controller Preferred? IPN 074-289L Digital information is not corrupted or distorted by small changes in amplifier gain or offset that is often induced by temperature changes or grounding problems.
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Composer Operating Manual Chapter 4 Operation NOTE: If you are experienced with operating this instrument, Chapter 12, Quick Use Guide, may provide you a quicker means to find the help you need. 4.1 Initialization and Setup Although the same information must be entered into the instrument, the process varies slightly depending on if the standard or optional display is available.
Composer Operating Manual 4.1.2 Optional LCD Display The parameter set may be downloaded to the instrument in any of the methods listed in section 4.1.1 above or manually using the controller’s keyboard. Manual entry requires placing the instrument in the Program mode by pressing the PROG key on the front panel; see section 4.3.5.3 on page 4-17. The Program mode will be identified by the presence of a blinking cursor, adjacent to the highlighted parameter. There are no cursors in the Operate mode.
Composer Operating Manual 4.2.3 How to Calibrate IPN 074-289L Flow the calibration gas (usually pure carrier gas) through the Transducer at the normal operating pressure and flow rate. Allow sufficient time for the calibration gas to cleanse any mixed gasses out of the Resonant Chamber. The carrier gas has displaced all of the formerly contained gas mixes when the concentration stops changing. This condition is verified by the front panel STEADY indicator (Ú) being illuminated.
Composer Operating Manual 4.2.4 How To Revert To Factory Default Settings The factory set Reference Zero is re-established by changing any (concentration measurement effecting) parameter value such as Transducer Temperature, Carrier Gas Species, Specific Heat Ratio or Molecular Weight. The Controller’s USER SET ZERO LED will be illuminated only if a user set Reference Zero is being used for calculating Concentration. All other parameter values must be altered through the digital link.
Composer Operating Manual 4.3 How To Use The Instrument The following sections explain how to start, stop, and shut down the instrument. A description and purpose of the operating modes, displays, and system I/O connectors is also provided. 4.3.1 How To Start The Instrument Operating the instrument requires a 24 V power connection and the POWER switch in the on position (POWER LED illuminated). NOTE: The proper operation of all LED displays may be visually verified when the POWER switch is cycled on.
Composer Operating Manual 4.3.2.2 Bulk Flow Control Configuration All instrument function is controlled externally through Input #4 of the system I/O connector. Refer to section 3.1.13 on page 3-11. 4.3.3 How To Shut Down The Instrument Press the POWER switch on the front panel of the Controller. The green color of the Power LED will quickly extinguish. It is recommended that any auxiliary communication applications such as the optional Monitor Software or Setup Tool be closed first. 4.3.
Composer Operating Manual 4.3.4.2.2 Bulk Flow Control Configuration Refer to section 3.1.13 on page 3-11 for Bulk Flow Control specifics. 4.3.5 Description and Purpose of Displays The following display types are available: Standard Display Description, see section 4.3.5.1 on page 4-7 Optional - Composer LCD Display Description, see section 4.3.5.2 on page 4-9 4.3.5.1 Standard Display Description There are nine high-intensity status LEDs on the front panel of the Controller. See Figure 4-2.
Composer Operating Manual STEADY . . . . . . . . . . . . . . . . . . . . A green LED that is illuminated when the measured concentration value has been steady for 10 seconds. Its presence indicates that the Instrument System’s Reference Zero may be successfully set. The particular criteria used to light this LED is that the frequency has been within +/2.0 Hz for 10 seconds. USER SET ZERO . . . . . . . . . . . . .
Composer Operating Manual 4.3.5.2 Optional - Composer LCD Display Description The LCD display’s layout is shown in Figure 4-3. The display has three modes. 1 The first is the normal operate mode where digital composition information and various instrument status and state annunciators are visible. 2 The second mode is the program mode where the various instrument parameters are selected and the parameter values that tailor the instrument are entered.
Composer Operating Manual 4.3.5.2.1 Numerical Display and Units Indicators -.8.8.8.8.8.8.8 . . . . . . . . . . . . . . . . Numerical display for measured composition in the operate mode. Provides all numerical indication for the various parameter’s values in the program and auxiliary display modes. Indicates the various user diagnostic modes and error conditions, see section 6.5, User Diagnostics, on page 6-7, in conjunction with WARNING indicator described in section 4.3.5.2.5 on page 4-12.
Composer Operating Manual 4.3.5.2.2 State Indicators STOP . . . . . . . . . . . . . . . . . . . . . . Illuminates when the instrument’s current state is STOP. All flows are zero in Concentration Control. ♦ Means the Reactor is in control if Bulk Flow configuration is selected. HOLD . . . . . . . . . . . . . . . . . . . . . . Illuminates when the instrument’s current state is HOLD. Flow outputs stay at the last (10 second average) flows output from the state just exited. BYPASS . . . . . . . . . . . . . . .
Composer Operating Manual 4.3.5.2.3 Instrument Zero Indicators FACTORY ZERO . . . . . . . . . . . . . . Illuminates when the instrument is first powered on and indicates that the reference zero is still at factory settings for the chosen carrier gas (controlled by the molecular weight and gamma parameters of the carrier gas) and temperature. USER ZERO . . . . . . . . . . . . . . . . . Illuminates when the user has set the reference zero (which overrides the Factory Zero). See Ú below, and section 4.
Composer Operating Manual Ú . . . . . . . . . . . . . . . . . . . . . . . . . Illuminates when the concentration meets the condition for “steady" and the STEADY relay is closed, see section 4.3.6.1, Description and Purpose of SYSTEM I/O Connector, on page 4-22. You may press the ZERO switch to alter the Reference Zero when this indicator is illuminated. CONCENTRATION TARGET . . . .
Composer Operating Manual 4.3.5.2.6 Film Number Indicator PROG # . . . . . . . . . . . . . . . . . . . . . Always illuminated. Indicates function of 7 segment display below it. IPN 074-289L 8 . . . . . . . . . . . . . . . . . . . . . . . . . . Seven segment display that indicates which of the nine program descriptions is currently active or being modified. All programs may be entered and altered when the instrument is in the STOP state.
Composer Operating Manual 4.3.5.2.7 Program Parameter Indicators Table 4-1 Composer Parameters Range and Type IPN 074-289L Allowed Entries Parameter Min Max Default Type Format Concentration Target 0.0 100.0 5.0000 Float xxx.xxxx Process Gain 0.0001 999.9999 18.7000 Float xxx.xxxx Dead Time 0.01 1000.00 1.80 Float xxxx.xx Time Constant 0.01 1000.00 7.73 Float xxxx.xx Relay Limit 0.0 100.000 0.100 Float xxx.xxx Fuzzy No Yes No Cell Temperature 0.1 65.0 30.
Composer Operating Manual CONCENTRATION TARGET . . . . . The desired concentration of precursor in terms of mole %. Also used to multiply the flow read on the CONTROL IN connector to form the Bulk Flow Target. PROCESS GAIN . . . . . . . . . . . . . . The numerical value of the Processes’ gain (change in the concentration (mole %) divided by the change in the manipulated variable (volts). DEAD TIME . . . . . . . . . . . . . . . . . . The numerical value of the processes’ dead time (sec). TIME CONSTANT . . .
Composer Operating Manual MFC RANGE DIL . . . . . . . . . . . . . The parameter representing the full flow range of the mass flow controller that regulates the flow through the dilution circuit (sccm). MAX FLOW BUBBLER . . . . . . . . The parameter representing the maximum flow desired through the bubbler (sccm). This must be equal to or less than the MFC RANGE BUBBLER parameter’s value. MAX FLOW DIL . . . . . . . . . . . . . .
Composer Operating Manual LCD display for the specific location’s lighting and instrument position, see section 5.8, LCD Contrast Adjustment — (LCD Display Option Only), on page 5-6. The display portion occupies the entire left side of the instrument and is described separately in section 4.3.5.2, Optional - Composer LCD Display Description, on page 4-9.
Composer Operating Manual 4.3.5.3.1 Function and Numeric Keys The data entry and process control portion occupies the upper right portion of the front panel and consists of a numeric keypad and special function keys described below. STOP . . . . . . . . . . . . . . . . . . . . . . In Concentration Control mode pressing this key halts all process control activities, lights the STOP state indicator and sets all flows to zero. This key is active in both the operate and programming modes.
Composer Operating Manual NOTE: Holding the C key during a "power on" will unlock parameters if they have been locked by the monitor software. Holding the C key for a second cycle will set all parameters to their default settings. 0-9 . . . . . . . . . . . . . . . . . . . . . . . . . Pressing these keys in the program mode will enter into the display buffer the appropriate decimal value. Should more digits be entered than the parameter requires, only the most current keystrokes will be retained. 4.3.5.3.
Composer Operating Manual S. . . . . . . . . . . . . . . . . . . . . . . . . . Pressing this key will temporarily convert the numerical display’s function to showing the measured resonant frequency’s amplitude (millivolt RMS @ 1 V RMS drive). T . . . . . . . . . . . . . . . . . . . . . . . . . . Pressing this key will temporarily convert the numerical display’s function to showing the resonant chamber’s temperature (°C). Q . . . . . . . . . . . . . . . . . . . . . . . . .
Composer Operating Manual 4.3.6 Description of Rear Panel The rear panel of the Composer is shown in Figure 4-5. The rear panel is the same for both front panel types. Figure 4-5 Rear Panel of the Composer OPTION CONCENTRATION CFGR1 CFGR2 OUT CONTROL OUT IN RS232 POWER SYSTEM I/O SENSOR 4.3.6.1 Description and Purpose of SYSTEM I/O Connector WARNING CAUTION The current rating for the contacts for K5 is less than the current rating for the contacts K1 to K4.
Composer Operating Manual The eight inputs are active when the specific input’s terminal is pulled to ground (common) (<0.8 V) through a contact closure or with TTL/CMOS logic having current sink capability of 2 ma. (1 low power TTL load). The input ports are protected to +/- 30 V with respect to chassis ground. See Table 4-2. NOTE: These ports are updated every 200 milliseconds; signals must be present during a read cycle. All inputs are leading edge detected and executed. .
Composer Operating Manual Relay I/O # FUNCTION PIN #s Comment IN#1 SET reference zero 18 Sets a new value of Reference Zero—will not take action unless: (a) steady condition is met (see K4 above), (b) the Transducer is at temperature set point, and (c) a zero value for the MIN FLOW parameter has been set.
Composer Operating Manual 4.3.6.3 POWER Connector A DB-9 connector used for connection to a 24 volt power supply. Refer to section 1.7 on page 1-7 for a full description of the power supply requirements and pin connections. 4.3.6.4 Option Connector A DB-9 connector used for: Bulk Flow Control configuration: for providing Concentration read back output and MFC read-back input.
Composer Operating Manual Table 4-4 RS-232C Communication Baud Rates SW#4 SW#3 SW#2 RS-232C (Baud Rate) 0 0 0 4800 0 0 1 9600 0 1 0 19200 0 1 1 38400 1 0 0 57600 1 0 1 9600 1 1 0 9600 1 1 1 9600 4.3.6.6 CFGR2 The second eight contact binary encoded switch block that is used for activating various instrument features. The state of these switches is only read when power is first applied to the Controller.
Composer Operating Manual Table 4-5 Configuration SW#2 Descriptions (continued) SW 4 Function Details CONCENTRATION INput function 0 = ignore, 1 = control to target concentration equals V in min input + diff ---------------------------------------------- input voltage range IPN 074-289L where: input voltage range is set by SW-7 max = value of parameter MAX INPUT (USER#5) min = value of parameter MIN INPUT (USER#6) diff = (max-min) 5 Control Dilution Flow 0 = ignore 1 = maintain Dilution Flow
Composer Operating Manual and is updated every 200 milliseconds. It is intended for driving a chart recorder or being read by a system controller or other precision electronic measuring device. Its normal functionality is tailored by switch settings 1, 2 and 3 on the CFGR2 switch block as shown in Table 4-6. The Analog option card is configured at the same time to the same function, only 0-5 volts.
Composer Operating Manual 4.3.6.11 Analog I/O Option An optional Analog I/O card is available to support the Bulk Flow Control configuration and other features such as full time concentration read out. Refer to section 4.3.6.4 on page 4-25. 4.3.6.12 Safety Ground Refer to section 1.10.3, Electrical Grounding and Shielding Requirements, on page 1-14. A 10-32 stud and nut used for establishing an electrical safety ground to the Controller.
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Composer Operating Manual Chapter 5 Maintenance 5.1 Safety Considerations WARNING Many of the complex chemicals that will be flowed through the Transducer are either toxic or possibly pyrophoric (spontaneously ignite in air). Complete knowledge of the chemical history and appropriate handling procedures must be followed by skilled personnel. None of the materials used in the construction of the Transducer are known to be hazardous.
Composer Operating Manual 5.5 Inspecting the Transducer If the Transducer is disassembled, all components should be visually inspected during reassembly and any damaged components discarded in a safe and environmentally sound manner. Upon completion of reassembly, but prior to the installation of the insulation and transducer housing, the assembly should be carefully leak tested using a high performance Helium mass spectrometer capable of sensitivity in excess of 1x10-9 std cc/sec.
Composer Operating Manual 5 Close the Leak Test Ports with a copper gasket following the manufacturer’s suggested tightening procedure or proceed to section 5.6.2 on page 5-3 to verify Secondary Containment Vessel’s leak integrity. CAUTION The use of a copper gasket is recommended because of the ease of obtaining seal integrity compared to harder gasket materials. 5.6.
Composer Operating Manual 3 Probe with a very small amount of helium into the appropriate end of the transducer. Small openings are provided on each of the transducer’s enclosure end plates for this purpose. A probe with a small tube or hypodermic needle will easily penetrate the insulation. Helium will readily diffuse through the insulation. 4 Verify leak integrity, replace or repair and retest until leaks are eliminated. 5 Repeat steps 3 and 4 with the second Leak Test Port.
Composer Operating Manual Figure 5-1 Correctly operating Figure 5-2 Possible diaphragm damage IPN 074-289L Figure 5-3 Possible diaphragm damage 5-5
Composer Operating Manual 5.8 LCD Contrast Adjustment — (LCD Display Option Only) The LCD contrast is optimized for "above the display" viewing angles at the factory. It may be better optimized on site for use in positions that place the instrument in other viewing positions.
Composer Operating Manual Chapter 6 Diagnosing Problems 6.1 Introduction There are many built in checks and diagnostics in the firmware. There are additional diagnostics available when using the optional Monitor software package. Many of the operational diagnostics are indicated on the controller’s front panel (refer to section 4.3.5, Description and Purpose of Displays, on page 4-7 and also see section 6.5, User Diagnostics, on page 6-7). It is important to know that these LEDs are operative.
Composer Operating Manual 6.2.
Composer Operating Manual 6.2.
Composer Operating Manual 6.2.
Composer Operating Manual 6.2.5 Category 5; User Related Table 6-5 Category 5; User Related Failure Symptom Visibility Effect On Accuracy Wrong M and/or γ entered None Relative to error. Refer to section 3.1.4 on page 3-2. M and γ are identical for Warning illuminates carrier and precursor No results given. Reference Zero set at inappropriate time None Relative to delta F2 from true zero. Maximum discrepancy restricted by limits associated with designated carrier gas.
Composer Operating Manual 6.2.6 Category 6; Miscellaneous Table 6-6 Category 6; Miscellaneous Failure Symptom Visibility Effect on Accuracy Small Diaphragm leak Facility toxic gas alarms Probably minor System pressure out of specified range a) Over-signal clipping and Error relay opens b) Under - Noisy C Signal c) >1 atmosphere gauge subsequent Noisy C signal @ or near atmospheric pressures.
Composer Operating Manual 6.5 User Diagnostics Various failure modes can be identified by (1) carefully watching the WARNING LED located on the front panel of LED display units, or (2) decoding the err value displayed on LCD units. Various failure modes can be identified. See Table 6-7. There are three types of failure modes: fatal errors . . . . . . . . . . . . . . . . . . no instrument function takes place. Some communications are operative, except for remote commands. The Error relay is open. errors . .
Composer Operating Manual Table 6-7 User Diagnostics (continued) Meaning Warning LED Priority/ Pattern Indication Actions Heater failure/ Fatal The temperature has been Rapid Blink dropping for 10 seconds (~3.5 Hz, 50% but the heaters are on full. duty) Warning Place into Clear with LED error/idle mode.* Reset Error Relay opens 0x0400 Temperature range error/ Fatal The temperature is below 10 or above 65 degrees (C) Warning Place into Clear with LED error/idle mode.
Composer Operating Manual Table 6-7 User Diagnostics (continued) Error Designation/ Type Meaning Warning LED Priority/ Pattern Display and Communic ations Error Code Retry/Clear (hex) Indication Actions Bad peak shape/ Warning The R2 of the Lorentzian fit Slow Blink was less than .8 or greater than 1 (while testing peak before tracking), or the Q was less than 2 (while tracking). Warning LED Restart coarse sweep to find peak. Clear when peak found.
Composer Operating Manual 6.6 Error Detection Specific errors can be detected in one of the following ways: 1 Observing the blink pattern on the Warning LED, refer to Table 6-7 on page 6-7 for a complete list of error or warning indicated. 2 On the optional LCD Display. When an error occurs, an error code will replace the concentration output. If there is a warning (less serious problem) the "Warning" annunciator will be displayed; by pressing key 5 a warning code will be displayed.
Composer Operating Manual Chapter 7 External Communications 7.1 Introduction The Composer supports RS-232C with Checksum. 7.2 Communications Connection The Instrument System currently supports RS-232C communication only. An industry standard 9-pin D-sub-miniature connector is required to connect to the Controller. The length of the cable is limited to fifty feet according to published standards. The communications interface operates using the DTE (Data Terminal Equipment) configuration.
Composer Operating Manual 7.3 Communication Settings Serial communications baud rates between 4800 and 57600 are supported and selected on the CFGR2 switch block. Refer to section 4.3.6.6, CFGR2, on page 4-26 and to Table 4-4 on page 4-26. The communication initialization settings use baud rate,N,8,1 for the RS-232C port. 7.4 Basic Command Structure Commands are always initiated from an external computer.
Composer Operating Manual 7.4.1 Structure of a Command Sent to Composer Length Command [Subcommand] [Program Number] [Data] Checksum Length is one byte, and does not include the checksum, or the length itself. Command is one character and represents the major categories of commands. Many commands are further delimited by sub-commands. See section 7.4.3 on page 7-5. Subcommand is a further delimiter of some of the commands. Subcommands are one character. See section 7.4.3 on page 7-5.
Composer Operating Manual 7.4.2 Structure of a Response Sent from Composer Length Status Data Checksum Length is one byte, and does not include the checksum or the length itself. Status gives information about the command and the status of the instrument. Bit 7 (MSB) is set if the command sent was successful. If it is clear, the command was not successful, and the data is the error code. See section 7.4.4 on page 7-10. Bit 6 is set if there has been a power cycle since the last communication.
Composer Operating Manual 7.4.3 List of Commands with their Subcommands, Data, and Response Data. Command Subcommand/Prog Num Sent Data Response Data E(cho) Any string String that was sent H(ello) “Composer Ver x.xxx" (x.
Composer Operating Manual U(pdate) Data - value of the parameter specified by the subcommand. No response data unless there is a communications error. Subcommands: Same as for the Q command. The format of the data sent is the same as the format of the response data of the Q command.
Composer Operating Manual S(tatus) 00 Current Data float float float float byte byte (frequency amplitude concentration/phase temperature sample-number undefined) 01 Current Temperature float 03 Digital Inputs Input Response byte Input # 1 2 3 4 5 6 7 Bit # 6 5 4 3 2 1 0 04 Relay Values Relay Response byte Relay # 5 4 3 2 1 Bit # 4 3 2 1 0 05 Configuration Switches short integer 06 Analog input (voltage) float 07 Error Log 8 bytes See definition of error log below.
Composer Operating Manual 0 Frequency Float 1 Amplitude Float 2 Temperature Float 3 Concentration Float 4 BubblerFlow Float 5 DilutionFlow Float 6 R2 Float 7 Q Float 8 Step Float 9 Error Float 10 TargetConcentration Float From input if configured that way, otherwise the parameter value 11 Analog Input Float Instantaneous reading at last measurement 12 Digital Input 1 Byte bit pattern 13 Digital Output 1 Byte bit pattern 14 Configuration Switches 2 Byte bit patter
Composer Operating Manual R(emote) No data sent No Response data unless there is a communication error. Performs an action depending on the subcommand. Note: Remote commands will not be performed if there is a fatal system error. The communication error code 24 (can’t complete command) will be returned.
Composer Operating Manual 7.4.4 Error Codes 7.4.4.1 Communication Errors If there was an error with the command send to the Composer, the response message will have the MSB of the status byte cleared. There will be one byte of data with the following meaning: 03 . . . . . . . . . . . . . . . . . . . . . . . . . Message length was zero. 17 . . . . . . . . . . . . . . . . . . . . . . . . . Message length wrong for given command 18 . . . . . . . . . . . . . . . . . . . . . . . . .
Composer Operating Manual 7.4.4.2.1 System and Hardware Errors 0x8000 . . . . . . . . . . . . . . . . . . . . . Non Volatile Memory failed 0x4000 . . . . . . . . . . . . . . . . . . . . . TI failed to initialize 0x2000 . . . . . . . . . . . . . . . . . . . . . Temperature chip failed to initialize 0x1000 . . . . . . . . . . . . . . . . . . . . . DSP Initialization failure 0x0800 . . . . . . . . . . . . . . . . . . . . . Temperature chip lockup 0x0400 . . . . . . . . . . . . . . . . . . . . .
Composer Operating Manual 7.4.5 Examples NOTE: Commands and responses are all using hexadecimal representation. Example 1 Send Hello command and receive the version number back computer 014848(Hello command) composer 1582434F4D504F5345522056455220312E303030302056 (i.e. COMPOSER VER 1.0000) Example 2 Send a command to set the total channel flow to 50 on parameter set 1, then verify it by doing a query.
Composer Operating Manual Chapter 8 Software Guide 8.1 Introduction The two software applications available for interfacing the Composer with a computer are called the Composer Monitor software and the Setup Tool. The Composer Monitor software provides an effective means of monitoring and storing data using a standard RS-232C COM port. There are two display modes: Amplitude Track, and Sweep. Amplitude Track is the default mode for the Composer.
Composer Operating Manual 8.2.1 Computer System Requirements Table 8-1 Computer System Requirements Minimum System Recommended System Processor Pentium 166MHz Pentium II 350MHz RAM 32 Mb (Win95, Win98) 64 Mb (Win NT) 64 Mb Hard Disk Space (Program) 4Mb 4Mb Hard Disk Space Data (24 hours) approx. 24 Mb approx. 24 Mb per sensor Monitor 14 inch, VGA 17 inch, SVGA Resolution 800 x 600 800 x 600 or better 8.2.
Composer Operating Manual 8.2.3 First Time Use After you have connected Composer to a free COM port on your computer and applied power to it, go to the Composer Monitor or Setup Tool entry in your start menu and run the application. When the application starts, a dialog box will open up and ask for a .ini file name. It is advisable to choose a unique name for each Composer, because it stores all system parameters in that .ini file.
Composer Operating Manual 8.2.3.3 Set Up Process Parameters Once you have set up the communications parameters, 1 Go to the Setup >> Process Parameters. 2 Click on the Get button to read the parameters stored in the Composer. NOTE: You may want to save these parameters as the factory defaults. This can be done through the Settings-File >> Save As menu item.
Composer Operating Manual 8.2.3.4 Using the Applications Both applications are primarily used in the Amplitude Track mode for real time monitoring and control of precursor concentration. The Monitor software may also be used in Sweep mode as a diagnostic tool. These two principal functions will be briefly described. 8.2.3.4.1 Amplitude Track Mode The Amplitude Track mode is the default operating mode of the instrument system.
Composer Operating Manual 8.3 Software Reference This section describes the function of every button in the Composer Monitor and Setup Tool graphical user interface and shows what the various dialog boxes and windows look like. 8.3.1 Menu Bar Figure 8-1 Menu Bar All essential functions of the software are accessible through the menu items as shown in Figure 8-1. In a specific situation, when a menu item is not relevant, it remains visible but not accessible.
Composer Operating Manual Table 8-2 Menu Bar Functions (continued) Menu Sub-menu Function Setup Communications Brings up a dialog box for setting up communications with Composer. See section 8.3.4 on page 8-13. Process Parameters Brings up a dialog box for setting up MFCs, gas properties and control loop parameters. See section 8.3.5 on page 8-14. Data Display Brings up the Data Display dialog box for setting up graph scaling and the number of data points to be displayed across a full screen.
Composer Operating Manual Table 8-2 Menu Bar Functions (continued) Menu Sub-menu Function Actions Resume Collection Initiates or resumes data collection in current mode of operation. End Collection Terminates data collection in current mode of operation. Log Data This feature is not available in Setup Tool. Initiates data logging in current mode of operation. See section 8.3.9 on page 8-24. STOP Stops all gas flows. For details, see section 8.3.
Composer Operating Manual Table 8-2 Menu Bar Functions (continued) Menu Sub-menu Function Calibration Set User Zero Sets instrument zero. Should be done only when pure carrier gas is flowing at steady operating pressure. Available only in Amplitude Track Mode and only when the sensor temperature has reached set point, concentration readings are stable and bubbler MFC Min flow parameter is zero. section 8.3.8 on page 8-22. Exercise extreme caution in using this feature.
Composer Operating Manual 8.3.2 Toolbar Figure 8-2 Toolbar The Main Toolbar provides easy access to the two measurement modes and other utilities. If the Toolbar is not visible on the screen, it can be turned on by selecting Tools >> Toolbar. The function of each button on the Toolbar is explained below in Table 8-3. Table 8-3 Toolbar buttons Sweep Amplitude Track Function This feature is not available in Setup Tool. Sweep Mode is a diagnostic mode.
Composer Operating Manual Table 8-3 Toolbar buttons (continued) Function About Clicking this button shows the version number of software as well the version of firmware in the Composer. See section 8.3.14 on page 8-28.
Composer Operating Manual 8.3.3 Ribbon Bar Figure 8-3 Ribbon Bar The Ribbon bar provides access to often used functions. If the Ribbon bar is not visible on the screen, it can be selected from menu item Tools. The function of each button on the Ribbon bar is explained below. Table 8-4 Ribbon Bar Buttons Button Function Initiates or resumes data collection in current mode of operation. Resume Collection Terminates data collection in current mode of operation.
Composer Operating Manual Table 8-4 Ribbon Bar Buttons Button Function Save Graph As This feature is not available in Setup Tool. Creates a text file (default) or an image file containing all data points in the currently displayed graph. User is prompted for a file name and destination path. This function is equivalent to screen capture. The user may choose total number of data points from the menu item Setup >> Data Display. See section 8.3.10 on page 8-25.
Composer Operating Manual 8.3.5 Setup Process Parameters These parameters are necessary to set the sensor’s temperature, provide gas properties data, set up control loops and set the desired concentration. These are located in the Setup >> Process Parameters menu. The associated dialog shown in Figure 8-5. Any combination of parameters can be saved through Settings-File >> Save As menu in this dialog. Likewise, any previously saved setup file can be opened and downloaded.
Composer Operating Manual 8.3.5.1 Index Program Number. . . . . . . . . . . . . The Composer instrument can store up to nine sets of parameters under this index field. Thus, it is important that this field be appropriately selected before downloading any parameter. This field can be altered only when the control state is in Stop position. When this field is modified (1 through 9), the Get button is automatically pressed to retrieve the chosen parameter set, which becomes the current parameter set. 8.3.5.
Composer Operating Manual 8.3.5.3 Dilution MFC (sccm) Full Scale: . . . . . . . . . . . . . . . . . . A numeric data field representing the maximum flow range (sccm) of the Mass Flow Controller used to control dilution gas flow. This parameter accepts values from 0 to 5000. Max: . . . . . . . . . . . . . . . . . . . . . . . A numeric data field representing the maximum flow to be allowed. This parameter accepts numbers from 0 to 2000 (sccm) and must not exceed Full Scale value.
Composer Operating Manual Dead Time: (s) . . . . . . . . . . . . . . . A numeric data field representing the process dead time. This parameter accepts numbers from 0.01 to 1000.0 (seconds). Time Constant: (s) . . . . . . . . . . . A numeric data field representing the process time constant. This parameter accepts numbers from 0.01 to 1000.0 (seconds). Loop Type . . . . . . . . . . . . . . . . . . Select a full function PID (Proportional Integral Differential) or Fuzzy logic control loop. 8.3.5.
Composer Operating Manual 8.3.5.8 Precursor Gas Name: . . . . . . . . . . . . . . . . . . . . . . This alphanumeric data field is only for the convenience of recalling gas parameters from the Gas Properties Library. It is not downloaded to Composer. Gamma: . . . . . . . . . . . . . . . . . . . . A numeric data field representing the Precursor’s specific heat ratio and accepting numbers from 1.0000 up to 2.0000. IPN 074-289L Molecular Weight: . . . . . . . . . . . .
Composer Operating Manual 8.3.5.9 Carrier Gas Name: . . . . . . . . . . . . . . . . . . . . . An alphanumeric data field is only for the convenience of recalling gas parameters from the Gas Properties Library. It is not downloaded to Composer. Gamma: . . . . . . . . . . . . . . . . . . . . A numeric data field representing the specific heat ratio of the Carrier Gas accepts numbers from 1.00000 up to 2.00000. IPN 074-289L Molecular Weight: . . . . . . . . . . . .
Composer Operating Manual 8.3.6 Sweep Mode Sweep mode is not available in Setup Tool. This mode is used primarily as a setup and diagnostic aid. In this mode the instrument will sweep through a range starting at a user provided Start frequency and incrementing at desired step size. During the sweep the amplitude is plotted. The sensor’s temperature, amplitude (arbitrary scale) and phase (degree) at the current excitation frequency is shown in the data window.
Composer Operating Manual 8.3.7 Amplitude Track Mode Amplitude Track is the instrument’s default operating mode, as shown in Figure 8-7. In this mode the instrument will find and then lock on to the resonant frequency of the sample gas and track its movements. While tracking, the concentration of the precursor gas is plotted as mole-percent. For the sake of absolute accuracy, it is recommended that the zero frequency be first established.
Composer Operating Manual 8.3.8 Control State The Control State menu choices under Action item in the menu bar allow access to control state functions otherwise available through I/O connector at the rear of the instrument or through keyboard entry on units with display. The check mark next to the menu item displays the current Control state. The function of each selection is explained below. Control . . . . . . . . . . . . . . . . . . . . . It starts the control loop action.
Composer Operating Manual Figure 8-8 Manual Flow Control Dialog IPN 074-289L NOTE: Control, Stop, Hold, Bypass and Manual are mutually exclusive functions. The instrument will execute the last pressed function, as seen from the respective button status.
Composer Operating Manual 8.3.9 Setup Data Log File This feature is not available in Setup Tool. In the Amplitude Track and the Sweep modes, the instrument can automatically log data while it is being displayed. When the Log Data icon is pressed in the Ribbon bar or Menu item Actions >> Log Data is selected, the Data Log File Setup dialog is opened as shown in Figure 8-9. User can select the drive and directory, and enter a file name. The complete path is displayed at the bottom of the dialog.
Composer Operating Manual 8.3.10 Setup Data Display This option is located in the menu item Setup >> Data Display or can be accessed from the ribbon bar button. The dialog is shown in Figure 8-10. The user can select the number of data points to be plotted on the graph. The user can also keep auto-scaling on or off. When auto-scaling is turned off, the vertical axis is scaled in accordance with Maximum and Minimum values entered in the input fields.
Composer Operating Manual 8.3.11 Gas Properties Database Pressing the button on the Toolbar or selecting from menu item Tools >> Gas Properties Database opens the Database dialog. (see Figure 8-11.) This is where the properties of all the commonly used gases are stored. To step through the gases, use the scroll bar at the bottom of the window. To add a material to the database, press the Add New button. Fill in the blanks for the material's name, molecular weight and gamma.
Composer Operating Manual 8.3.12 Gas Concentration Calculator This feature is not available in Setup Tool. The Gas Concentration Calculator contains two separate utilities. One calculator allows off line calculations of concentration given two reference frequencies and the other calculator estimates concentration from vapor pressure and flow parameters. See Figure 8-12. Select the carrier and reactant gases from the drop down lists.
Composer Operating Manual 8.3.13 I/O Status The I/O Status menu item allows easy readout of the status of back panel system I/O input ports and output relays as displayed in Figure 8-13. Refer to section 4.3.6.1 on page 4-22 for description of digital inputs and relay outputs. Figure 8-13 Digital I/O status display The About button or menu item Help >> About allows easy readout of the date and version number of the Monitor software and the Composer firmware, as seen in Figure 8-14.
Composer Operating Manual 8.4 Errors and Warnings Reporting Errors and warnings reporting is identical in the Composer Setup Tool and the Monitor software. The errors and warnings log show up on a separate window, which gets focus when a fault occurs or the fault is removed. The fault can be related to hardware failure, broken cable, insufficient gas in the cell or simply erroneous parameter entry. Depending on the severity of the fault, the errors are organized in Fatal Errors and Non Fatal errors.
Composer Operating Manual 8.5 Multiple Composers Monitor software and Setup Tool both will support multiple Composers on one computer. With either application, up to twelve units can be simultaneously monitored provided that there is adequate number of communication ports available on the computer. When the application is started, it will ask for a unique .ini file name. It is advisable to make this name distinct and meaningful for quick identification during future use.
Composer Operating Manual Chapter 9 Bibliography A. Wajid, C. Gogol, C. Hurd, M. Hetzel, A. Spina, R. Lum, M. McDonald, R. J. Capik, "A High-Speed High Sensitivity Acoustic Cell For In-Line Continuous Monitoring Of MOCVD Precursor Gases", J. Crystal Growth 170 (1977) 237-241 L. E. Kinsler, A. R. Frey, A. B. Coppens and J. V. Sanders, "Fundamentals Of Acoustics" (Wiley, New York, 1982) IPN 074-289L P. M. Morse and K. U.
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Composer Operating Manual Chapter 10 Glossary Absolute (Pressure) The pressure of a gas measured relative to a perfect vacuum. Algorithm A mathematical procedure. Ambient The conditions of the environment, such as temperature and pressure that surround a body or object, especially a condition that affects the body or object but is not affected by it.
Composer Operating Manual Control Gain The steady state process gain. This is normally quantified as the ratio of change of the controlled variable resulting from a small change of the manipulated variable. Control Loop The complete electromechanical system that is involved with the intelligent manipulation of a variable to maintain the controlled variable at the desired value, effectively minimizing process error. A brief description of control loop theory is given elsewhere in this manual.
Composer Operating Manual Diluent The gas used for dilution of the bubbler flow to produce the desired concentration and flow. DVM Digital Volt Meter; an instrument for precision measurement of voltage. Drive Microphone The electroacoustic element that is used to amplitude modulate the diaphragm and indirectly the gas in the resonant chamber EDMIn ethyldimethylindium Enunciator A basic display device providing a message or warning to the user.
Composer Operating Manual Lorentzian A term that mathematically describes the shape of a resonance peak. This instrument uses a Lorentzian curve fit to very accurately determine the precise frequency of the resonance’s amplitude peak when operating in the Amplitude Track Mode. LSB Least Significant Bit, a term associated with the precision of analog to digital and digital to analog converters. Manipulated Variable The variable that is used to induce changes in the controlled variable.
Composer Operating Manual PID Proportional Integral Differential; A type of control loop algorithm. Power Supply Module The portion of the instrument system that converts local line power to the 24 volt DC required to operate the controller. PPM Parts Per Million, a way of expressing Concentration. Precursor A complex chemical molecule used to carry a metal (or other) atom in the vapor state that is easily broken apart to leave the desired atom on the substrate to be coated.
Composer Operating Manual Resonant Mode A standing acoustic wave. The lowest frequency mode is called the fundamental. Root Allan Variance A measure of short term stability that is the square root of the sum of the difference between successive measurements squared. sccm Standard Cubic Centimeters per Minute, a measure of gas flow rate. Self Resonance A term that refers to the possible vibration modes of the individual components in an acoustical system.
Composer Operating Manual Transducer That portion of the instrument system containing the physical measuring apparatus; including; the resonant chamber, gas line connectors, heaters, PRT, sending microphones, receiving microphone, and mounting enclosure. IPN 074-289L Weight Fraction A term used in the Bulk Flow Control mode that is used to describe the portion of the total weight of gas flowing that belongs to a specific component, usually the precursor. The range is 0 to 1.00.
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Composer Operating Manual Chapter 11 Recommended Parts List 11.1 Replacement Parts Table 11-1 provides details about the recommended spare parts. Table 11-1 Inventory of Supplied Items Description 062-077 Fuse, 3.
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Composer Operating Manual Chapter 12 Quick Use Guide 12.1 Introduction IPN 074-289L The Quick Use Guide provides a reference for data concerning configuration, interfacing, and logic flow. You will also find convenient references to sections of the manual that provide more detailed explanations.
Composer Operating Manual STATUS For descriptions of LEDs, see section 4.3.5.1. CONCENTRATION RECEIVING TEMPERATURE SENDING STEADY HALT USER SET ZERO WARNING See Table 6-7 for error codes. POWER GAS COMPOSITION CONTROLLER COMPOSER Standard LED Controller NOTE: Information on Bulk SW# - FUNCTION See section 4.3.6.6. Flow Control is given in 1 CONCENTRATION OUTPUT section 3.1.13.
POWER FAIL *SWEEP FREQUENCY UNTIL PEAKS ARE FOUND *REDUCE GAIN OR DRIVE IF SIGNAL IS SATURATED 0.
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Composer Operating Manual Index A accuracy 3-2 acoustic generator problems 6-3 noisy environment 6-4 receiver problems 6-3 Algorithm 10-1 altitude 1-9 Ambient 10-1 amplitude data 2-5 amplitude of sound transmission 2-5 Amplitude Track 3-5, 8-1, 8-5, 8-21, 10-1 AMU 10-1 analog voltage 4-27 Application Support 1-4 IPN 074-289L B Back Pressure Controller 1-21, 3-1, 10-1 baseline frequency 8-5 BNC cable 1-12 Bubbler 10-1 control voltage 8-22 MFC (sccm) 8-15 Bubbler flow rate 3-23 Bulk Flow 3-11, 10-1 configu
Composer Operating Manual D connectors 1-12 damped curve 3-24 data terminal 7-1 DB-25 connector 4-22 DC power 1-13 Dead Time 3-22, 3-23, 3-30, 4-16, 8-17 Declaration Of Contamination 1-5 Delivery Line 10-2 Delivery System 10-2 fast 3-21, 3-23 slow 3-21, 3-22 diagnostics 6-1 errors 6-7 warnings 6-7 diaphragm 3-5, 10-2 cleaning 5-1 digital link 4-1 digital set-up link 1-21 Diluent 10-3 Dilution Flow 3-24, 8-4, 8-22, 10-2 Dilution Flow gas 1-21 Dilution MFC (sccm) 8-16 downloading parameters 4-1 Drive Microph
Composer Operating Manual K O KALREZ 1-5, 3-9 offset error, measured composition 3-2 OMVPE 10-4 optimize performance 3-33 o-ring properties 3-9 L Laplace transform 2-6 LCD Display 4-2, 4-9, 4-17 leak detection 5-2 primary containment vessel 5-2 secondary containment vessel 5-3 test 5-2 LOCKED 4-12 Loop Parameters 8-16 Type 8-17 Lorentzian 2-5, 10-4 low frequencies 2-5 LSB 10-4 IPN 074-289L M Manipulated Variable 10-4 Mass Flow 3-1 MAX FLOW BUBBLER 4-17 MAX FLOW DIL 4-17 MAX INPUT (USER #5) 4-17 measu
Composer Operating Manual S sccm 4-10, 10-6 SEC 4-10 Self Resonance 2-5, 10-6 SEND 4-12 SENDING 4-8 Sensitivity 1-3 sensor connector 4-24 installation 1-21 temperature control 2-17 vaccum range 1-21 software Monitor 8-1 solder 1-12 cup connector 1-5 cup contacts 1-12 sound transmission 3-6 spare parts 11-1 Specific Heat Ratio 3-2, 4-1, 8-26, 10-6 speed of sound 1-1, 2-4, 2-5, 2-13, 3-7, 4-2 SPST 10-6 stagnant zones 1-10 Standing Acoustic Wave 10-6 START 4-20 STEADY 4-8, 4-13 STOP 4-11, 4-19, 8-22 stop in B
Composer Operating Manual W IPN 074-289L WARNING 4-8, 4-12 wavelength 3-6 Index - 5
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