Cover Page O P E R A T I N G M Cool Drawer TM Single and Dual Sensors PN 074-609-P1A A N U A L
Title Page O P E R A T I N G M A N U TM Cool Drawer Single and Dual Sensors PN 074-609-P1A ® www.inficon.com ©2014 INFICON re achus@inficon.
Trademarks The trademarks of the products mentioned in this manual are held by the companies that produce them. INFICON® is a trademark of INFICON Inc. ConFlat® is a registered trademark of Varian Corporation. Swagelok® is a registered trademark of Swagelok Co. Scotch-Brite® is a registered trademark of 3M. All other brand and product names are trademarks or registered trademarks of their respective companies. Disclaimer The information contained in this manual is believed to be accurate and reliable.
Warranty WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service.
Cool Drawer Single and Dual Sensors Operating Manual Table Of Contents Cover Page Title Page Trademarks Disclaimer Copyright Warranty Chapter 1 PN 074-609-P1A Introduction 1.1 1.2 1.3 1.3.1 1.4 1.5 1.5.1 1.5.1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-2 How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Cool Drawer Single and Dual Sensors Operating Manual Chapter 2 Sensor Installation 2.1 2.1.1 2.1.3 2.2 2.2.1 2.2.1.1 Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1 Sensor Installation with a XTC/3™, IC6™ or Cygnus 2™ Deposition Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1 Sensor Installation with a SQM-160™, SQC-310™, SQM-242™, IQM-233™, STM-2XM™, or STM-3™ Deposition Controller/Monitor . . . . .
Cool Drawer Single and Dual Sensors Operating Manual Sputtering System Concerns . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9 Leaf Spring Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9 Crystal Replacement Instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12 Crystal Drawer Maintenance . . . .
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Cool Drawer Single and Dual Sensors Operating Manual Chapter 1 Introduction 1.1 Introduction INFICON Cool DrawerTM sensors, see Figure 1-1, offer proven reliability and durability combined with excellent thermal stability. The Cool Drawer design allows crystal installation into the sensor from the side, convenient for systems with insufficient room for front load crystal installation.
Cool Drawer Single and Dual Sensors Operating Manual 1.2 Definition of Notes, Cautions and Warnings Before using this manual, please take a moment to understand the Cautions and Warnings used throughout. They provide pertinent information that is useful in achieving maximum instrument efficiency while ensuring personal safety. NOTE: Notes provide additional information about the current topic. CAUTION Failure to heed these messages could result in damage to the sensor.
Cool Drawer Single and Dual Sensors Operating Manual 1.3 How to Contact INFICON Worldwide customer support information is available under Contact >> Support Worldwide at www.inficon.com Sales and Customer Service Technical Support Repair Service If experiencing a problem with a Cool Drawer Sensor, please have the following information readily available: The Lot Identification Code, located on the side surface of the sensor head. A description of the problem.
Cool Drawer Single and Dual Sensors Operating Manual 1.4 Unpacking and Inspection 1 If the Cool Drawer sensor has not been removed from its packaging, do so now. The sensor and accessories are packaged in a single cardboard carton with a rigid foam insert. Carefully remove the packaged accessories before removing the sensor. 2 Carefully examine the sensor for damage that may have occurred during shipping. This is especially important if obvious rough handling is noticed on the outside of the container.
Cool Drawer Single and Dual Sensors Operating Manual 1.5.1 Specifications Maximum bakeout temperature with no water O-ring compression fitting terminations . . . . . . . . . . . . . . . .165°C Welded terminations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .200°C Maximum operating isothermal environment temperature with minimum water flow O-ring compression fitting terminations . . . . . . . . . . . . . . . .300°C Welded terminations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Cool Drawer Single and Dual Sensors Operating Manual 1.5.2 Installation Requirements Feedthrough . . . . . . . . . . . . . . . . . . . INFICON provided CF40 feedthrough or 2.54 cm (1 in.) bolt feedthrough Other . . . . . . . . . . . . . . . . . . . . . . . . XIU or oscillator to match specific controller/monitor CDS-X1XXX only: Solenoid Valve for air PN 750-420-G1 (see section 3.1 on page 3-1) Water Flow Rate. . . . . . . . . . . . . . . . Minimum 150 to 200 cm3/min, 30°C maximum Water Quality . . . . . .
Cool Drawer Single and Dual Sensors Operating Manual 1.5.3 Materials Body and Drawer . . . . . . . . . . . . . . . Stainless steel, gold plated Cool Drawer Springs, Electrical Contacts . . . . . . . Au plated Be-Ni Water and conduit tubes . . . . . . . . . 304 stainless steel Wire . . . . . . . . . . . . . . . . . . . . . . . . . Silicon insulated copper Braze . . . . . . . . . . . . . . . . . . . . . . . . Vacuum process high temperature Ni-In 1.5.4 Specifications for the Single Shutter Temperature . . .
Cool Drawer Single and Dual Sensors Operating Manual 1.5.5 Parts and Options Overview (Single Sensor) Cool Drawer Single Sensor . . . . . . .
Cool Drawer Single and Dual Sensors Operating Manual Figure 1-5 Cool Drawer sensors with 2.54 cm (1 in.
Cool Drawer Single and Dual Sensors Operating Manual Figure 1-7 Standard Cool Drawer sensor length with shutter 10.2 - 66 cm (4 - 26 in.) 1.20 cm (0.475 in.) REF Centerline of crystal aperture Figure 1-8 Right Angle Cool Drawer sensor length with shutter Surface of sensor crystal 10.2 - 66 cm (4 - 26 in.) This gap is shown for clarity. The actual dimension equals 0. PN 074-609-P1A 0.38 cm (0.150 in.
Cool Drawer Single and Dual Sensors Operating Manual 1.6 Cool Drawer Dual Sensor (PN CDD-XXXX) Figure 1-9 Cool Drawer dual crystal sensor 1.6.1 Specifications Maximum bakeout temperature with no water O-ring compression fitting terminations . . . . . . . . . . . . . . . .165°C Welded terminations. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .200°C PN 074-609-P1A Maximum operating isothermal environment temperature with minimum water flow O-ring compression fitting terminations . . . . . .
Cool Drawer Single and Dual Sensors Operating Manual 1.6.1.1 Size Maximum envelope without shutter . . . . . . . . . . . . . . . . . Standard Sensor 4.70 x 6.35 x 5.08 cm (1.85 x 2.50 x 2.00 in.) Figure 1-11 on page 1-15 Right Angle Sensor 4.70 x 10.54 x 4.45 cm (1.85 x 4.15 x 1.75 in.) Figure 1-11 on page 1-15 Length of sensor . . . . . . . . . . . . . . . 10.2 to 66.0 cm (4 to 26 in.) Water and conduit tubes . . . . . . . . . 3.175 mm (1/8 in.) OD seamless stainless steel, 0.406 mm (0.016 in.
Cool Drawer Single and Dual Sensors Operating Manual 1.6.2 Installation Requirements Feedthrough . . . . . . . . . . . . . . . . . . . INFICON provided CF40 feedthrough or 2.54 cm (1 in.) bolt feedthrough Other . . . . . . . . . . . . . . . . . . . . . . . . XIU or oscillator to match specific controller/monitor Solenoid Valve for air PN 750-420-G1 (see section 3.1 on page 3-1) Water Flow Rate. . . . . . . . . . . . . . . . Minimum 150 to 200 cm3/min, 30°C maximum Water Quality . . . . . . . . . . . . . .
Cool Drawer Single and Dual Sensors Operating Manual 1.6.4 Parts and Options Overview (Dual Sensor) Cool Drawer Dual Sensor . . . . . . . .
Cool Drawer Single and Dual Sensors Operating Manual 1.6.5 Dual Sensor Drawings Figure 1-11 displays Standard and Right Angle dual sensor outline drawings which provide dimensions and other relevant data necessary for planning equipment configurations. Figure 1-11 Standard and Right Angle configuration Cool Drawer dual sensors 1.27 (.50”) 5.08 (2.0”) 1.8 (.71”) .76 (.300”) 6.35 (2.5”) PN 074-609-P1A 1.7 Replacement Parts and Accessories Retainer Assembly with Ceramic Insulator. . . . . . . . . . . . .
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Cool Drawer Single and Dual Sensors Operating Manual Chapter 2 Sensor Installation 2.1 Pre-installation Sensor Check Prior to installing the sensor in the vacuum system, make certain that it is in proper working condition by following the appropriate procedure. CAUTION The sensor head, water tube, etc., should be clean and free of grease when installed in the vacuum chamber. Clean nylon gloves should be worn while handling.
Cool Drawer Single and Dual Sensors Operating Manual 2.1.2 Sensor Installation with a SQM-160™, SQC-310™, SQM-242™, IQM-233™, STM-2XM™, or STM-3™ Deposition Controller/Monitor 1 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011) to the BNC connector on the feedthrough. 2 Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector of the oscillator (PN 782-900-010 or 783-500-013) labeled "Feedthrough" or "Sensor.
Cool Drawer Single and Dual Sensors Operating Manual 2.1.3 Sensor Installation with a Q-pod™ or STM-2™ Deposition Monitor 1 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 782-902-011) to the BNC connector on the feedthrough. 2 Connect the other end of the 15.2 cm (6 in.) BNC cable to the connector on Q-pod or STM-2. 3 Connect one end of the USB cable (PN 068-0472) to the mating connector on Q-pod or STM-2.
Cool Drawer Single and Dual Sensors Operating Manual Figure 2-1 Typical installation Mounting Bracket Conduit Tube Source to Sensor 25.4 cm (10 in.
Cool Drawer Single and Dual Sensors Operating Manual 2.2.1 Sensor Installation The sensor head must be installed such that the face of the crystal is at 90° relative to the source. That is, the crystal must be square to the vapor stream. Two effects may arise if the sensor head is not square to the vapor stream: The deposit is not even across the crystal surface.
Cool Drawer Single and Dual Sensors Operating Manual To guard against spattering, use a source shutter to shield the sensor during initial soak periods. If the crystal is hit with only a very small particle of molten material, it may be damaged and stop oscillating. Even in cases when it does not completely stop oscillating, the crystal may immediately become unstable, or shortly after deposition begins, instability may occur.
Cool Drawer Single and Dual Sensors Operating Manual 2.3 Bending Tubes CAUTION Read this entire section before attempting to bend the tubes. Incorrect tube bending that damages the tubes beyond repair voids the warranty. If it is necessary to bend the tubes to clear obstacles inside the chamber or to bring the head into a proper mounting location, observe the following precautions: Support the tubes where the bends will be placed to avoid a tube being collapsed or pinched. See Figure 2-3.
Cool Drawer Single and Dual Sensors Operating Manual 2.4 Installing the Standard and Right Angle Sensors Standard and Right Angle sensors may be installed in any appropriate location within the vacuum system. Two tapped holes are provided on the back of each single sensor body, and four tapped holes on each dual sensor body, for attaching to the vacuum system. 2.5 Sensor Shutter Function Check Temporarily connect an air supply to the actuator air tube and test operation for 10 to 15 cycles.
Cool Drawer Single and Dual Sensors Operating Manual 2.6 Shutter Operation The shutter shields the crystal from molten pieces of material during the preconditioning and conditioning phases of a process. A dual sensor head comes standard with one shutter to protect the secondary crystal during the process. 2.6.1 Dual Sensor Head Shutter INFICON dual sensor heads are designed to provide automatic crystal failure backup or to provide separate crystals for use with two different materials.
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Cool Drawer Single and Dual Sensors Operating Manual Chapter 3 Installation of the Solenoid Valve 3.1 Introduction The solenoid valve (PN 750-420-G1) and the feedthrough should be installed at the same time. The same solenoid valve is used for both the 2.54 cm (1 in.) and the 7 cm (2-3/4 in.) feedthroughs. For Installation with 2.54 cm (1 in.) Bolts Feedthrough, see section 3.2. For Installation with 7 cm (2-3/4 in.) Feedthrough, see section 3.3. NOTE: The air line is 3.175 mm (1/8 in.
Cool Drawer Single and Dual Sensors Operating Manual 3.3 Installation with 7 cm (2-3/4 in.) Feedthrough Follow these steps: 1 Align the score line on the valve assembly bracket over the edge of a table or other square edge. 2 Using pliers, grasp the part of the bracket extending over the edge and push down. The assembly will break along the score line. 3 Use a file to smooth any rough edges which may occur along the break. 4 Install the feedthrough.
Cool Drawer Single and Dual Sensors Operating Manual 3.4 Electrical and Pneumatic Connections 3.4.1 Electrical To complete installation of the assembly, make electrical connections to either 24 V (ac) or 24 V (dc). Current required is approximately 70 mA. Figure 3-1 Miniature pneumatic solenoid tube connections Exhaust (Normally Open) P Supply (Normally Closed) Air Supply A Output Port To Air Fitting Of Feedthrough Tube Fitting (Provided With Valve) 3.
3-4 6.50 cm (2.56 in.) 5.00 cm (1.97 in.) 3.89 cm (1.532 in.) P Supply PN 074-609-P1A 5.08 cm (2.0 in.) 2.94 cm (1.156 in.) Manual Override Indicator 4.25 cm (1.675 in.) Exhaust Figure 3-2 Solenoid valve 2.54 cm (1.0 in.) A Output 0.94 cm (0.37 in.
Cool Drawer Single and Dual Sensors Operating Manual Chapter 4 Troubleshooting and Maintenance 4.1 Troubleshooting Guide If the Cool Drawer sensor fails to function, or appears to have diminished performance, the following Symptom, Cause, Remedy Table in section 4.2 on page 4-5 may be helpful. 4.1.1 Troubleshooting A useful tool for diagnosing sensor head problems is the DMM (Digital MultiMeter).
Cool Drawer Single and Dual Sensors Operating Manual A very useful tool for rapidly evaluating the cause of a persistent "Crystal Fail" is the test crystal, which is included with each non-modelock oscillator package, this tool utilizes a packaged crystal at 5.5 MHz and a connector that allows the direct connection to BNC cables. The test crystal provides a known "good" monitor crystal that provides a fast means of isolating sensor problems.
Cool Drawer Single and Dual Sensors Operating Manual 4.1.2.2 Feedthrough Diagnostic Procedure 1 Remove the crystal drawer from the sensor head. 2 Disconnect the 15.2 cm (6 in.) BNC cable from the feedthrough. 3 Using a DMM, verify continuity from the BNC center pin on the feedthrough to the center pin on the sensor head, refer to section 4.1.1 on page 4-1. A typical value would be less than 0.2 ohms. 4 Verify isolation of the center pin on the feedthrough from the electrical ground (feedthrough body).
Cool Drawer Single and Dual Sensors Operating Manual 4.1.2.3 System Diagnostics Pass But Crystal Fail Message Remains If the system is operating properly, yet the Crystal Fail message is still displayed, perform the following tasks. 1 On the retainer verify that the center rivet is secure. Repair or replace the retainer as necessary. 2 Inspect the inside of the drawer for a buildup of material. Clean or replace the drawer as necessary.
Cool Drawer Single and Dual Sensors Operating Manual 4.2 Symptom, Cause, Remedy Table 4-1 Symptom, Cause, Remedy SYMPTOM CAUSE REMEDY Large jumps of thickness reading during deposition. Mode hopping due to Replace the crystal. damaged or heavily damped crystal. Crystal is near the end of its Replace the crystal. life. Scratches or foreign particles Clean or polish the crystal on the crystal drawer seating seating surface on the crystal drawer. See section 4.5 on surface. page 4-12.
Cool Drawer Single and Dual Sensors Operating Manual Table 4-1 Symptom, Cause, Remedy (continued) SYMPTOM CAUSE Crystal does not oscillate or Damaged crystal. oscillates intermittently (both Existence of electrical short in vacuum and in air). or poor electrical contacts. REMEDY Replace the crystal. Check for electrical continuity and short in sensor contacts; check for electrical continuity in feedthroughs, refer to section 4.1.1 on page 4-1.
Cool Drawer Single and Dual Sensors Operating Manual Table 4-1 Symptom, Cause, Remedy (continued) SYMPTOM CAUSE REMEDY Poor thickness reproducibility. Erratic source emission characteristics Move sensor to a different location; check the evaporation source for proper operating conditions; ensure relatively constant pool height and avoid tunneling into the melt. Use multiple sensor option if available on controller. Material does not adhere to the crystal.
Cool Drawer Single and Dual Sensors Operating Manual 4.3.2 Maintain the Temperature of the Crystal Periodically measure the water flow rate through the crystal sensor to verify that it meets or exceeds the value specified on page 1-6. Depending upon the condition of the cooling water used, the addition of an in-line water filtering cartridge may be necessary to prevent flow obstructions. Many systems use parallel water supply taps that provide high total flows.
Cool Drawer Single and Dual Sensors Operating Manual 4.3.5 Sputtering System Concerns Cool Drawer sensors are suitable for Magnetron Sputtering and most other sputtering systems where the plasma is controlled and constrained. For radio frequency (RF) sputtering systems, the INFICON Sputtering sensor (PN 750-618-G1) is recommended.
Cool Drawer Single and Dual Sensors Operating Manual 4.4 Crystal Replacement Instructions CAUTION To preserve cleanliness and to maximize crystal performance, all work should be performed in a clean room environment. 1 Using a thumb and index finger, gently squeeze the sides of the retainer at mid-section, then lift the retainer up, away from the drawer, as shown in Figure 4-3. 2 Hold the drawer by the handle and turn it upside down to remove the spent crystal.
Cool Drawer Single and Dual Sensors Operating Manual Figure 4-3 Removing the crystal Contact Spring Figure 4-4 Replacing the crystal Retainer Crystal PN 074-609-P1A Orientation Notch Handle Drawer CAUTION Never deposit material on a sensor without the crystal drawer, retainer, and crystal installed. Material deposited on the exposed sensor body assembly will lead to complete failure of the crystal to oscillate or premature crystal failure.
Cool Drawer Single and Dual Sensors Operating Manual 4.5 Maintenance 4.5.1 Crystal Drawer Maintenance In dielectric coating applications, the surface where the crystal contacts the crystal drawer may require periodic cleaning. Since most dielectrics are insulators, any buildup on the crystal drawer will eventually cause: erratic or poor electrical contact between the crystal and the crystal drawer. a reduction in thermal transfer from the crystal to the crystal drawer.
