O P E R A T I N G M Guardian Co-Deposition Controller ™ IPN 074-517-P1D A N U A L
O P E R A T I N G M A N U Guardian Co-Deposition Controller ™ IPN 074-517-P1D ® www.inficon.com ©2012 INFICON re achus@inficon.
Trademarks The trademarks of the products mentioned in this manual are held by the companies that produce them. ConFlat® is a registered trademark of Varian Corporation. Guardian™ is a trademark of INFICON GmbH. LabVIEW™ is a trademark of National Instruments Windows®, Access®, Excel® and AxtiveX® are registered trademarks of Microsoft Corporation. Wonderware® is a registered trademark of Invensys plc All other brand and product names are trademarks or registered trademarks of their respective companies.
DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Place East Syracuse, NY 13057 USA meets the essential safety requirements of the European Union and is placed on the market accordingly.
CE Implementation Date: May 2008 (Updated May 2010) Authorized Representative: Steve Schill Thin Film Business Manager INFICON Inc. ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PRODUCTS SHOULD BE DIRECTED, IN WRITING, TO THE VICE-PRESIDENT OF OPERATIONS AT THE ABOVE ADDRESS.
Warranty WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service.
Guardian Co-Deposition Controller Operating Manual Table Of Contents Trademarks Disclaimer Copyright Chapter 1 Introduction and Specifications 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.8.1 1.8.2 1.8.3 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 EIES Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 EIES Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Guardian Co-Deposition Controller Operating Manual 2.4 2.4.1 2.4.2 2.4.3 2.4.4 2.4.5 2.4.6 2.5 2.5.1 2.5.2 2.5.3 2.5.4 2.5.5 2.5.6 Initial Setup. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18 Power-up Sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18 Communications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18 Detector Calibration . . . . . . . . . . . . . .
IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual 3.6.1 3.6.2 3.6.3 3.6.4 3.6.5 3.6.5.1 Layer Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17 Rate Ramps Grid . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18 X Chan (Cross Channel) Tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19 Ratio Display Grid. . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Guardian Co-Deposition Controller Operating Manual Chapter 4 4.1 4.2 4.2.1 4.2.2 4.2.3 4.2.4 4.2.4.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 Sensor / Feedthrough Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2 Sensor Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3 Sensor Covers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Guardian Co-Deposition Controller Operating Manual Chapter 5 Maintenance & Troubleshooting 5.1 5.2 5.3 5.3.1 5.3.2 5.4 5.5 How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1 Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1 Sensor Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2 Sensor Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Guardian Co-Deposition Controller Operating Manual 7.3 7.3.1 7.3.2 7.3.3 7.3.3.1 Guardian Controller Direct Communications . . . . . . . . . . . . . . . . . . . . . . . . 7-8 Serial Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8 Ethernet Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8 Guardian Controller Firmware Versions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-8 V3.
Guardian Co-Deposition Controller Operating Manual Chapter 1 Introduction and Specifications 1.1 Introduction The EIES-IV Guardian uses Electron Impact Emission Spectroscopy (EIES) to control vacuum deposition of thin films. In EIES, the material being deposited is energized by a thermionic emitter, which creates optical emission spectra. An optical filter passes a characteristic wavelength of the spectra to a detector, which measures the intensity of the emission.
Guardian Co-Deposition Controller Operating Manual 1.2 EIES Controller The EIES-IV Guardian Controller serves as the interface between the EIES sensor(s) and detector(s), the evaporation power supply, and the computer running the EIES software. See Figure 1-2. Figure 1-2 Guardian Controller with Detector The controller supplies power to both the filament of the sensor assembly and to the detector modules.
Guardian Co-Deposition Controller Operating Manual Figure 1-4 EIES Single Sensor and Feedthrough 016-600-Gxx The sensor assembly consists of a 1.33 in. sapphire viewport attached to a 2.75 in. Conflat® flange. On the vacuum side of the flange, a telescoping light tube and two electrical connections are attached to the thermionic emitter. The telescoping tube can be adjusted to locate the thermionic emitter in the vapor flux.
Guardian Co-Deposition Controller Operating Manual IPN 074-517-P1D Figure 1-5 Gas Compensating Sensor and Feedthrough 016-601-Gxx 1-4
Guardian Co-Deposition Controller Operating Manual 1.4 EIES Detector The EIES detector module's photomultiplier tube (PMT) measures the emission intensity of a characteristic wavelength of the deposited material. For detecting a single material, an optical filter and detector module can be attached directly to the viewport. See Figure 1-6. Figure 1-6 EIES Detector Filter Detector Sensor Viewport For multiple materials, a fiber optic beam splitter is attached to the viewport.
Guardian Co-Deposition Controller Operating Manual Figure 1-7 EIES Software 1.6 Quartz Crystal Monitor The EIES system uses the INFICON SQM-242™ PCI card or Q-pod™ Transducer for QCM calibration of the EIES detector(s). QCM calibration can be initiated by the user, or automatically at regular intervals during deposition. Control of a source is also possible with a QCM input. A separate Operating Manual covers installation of the SQM-242 or Q-pod, and hook up of the quartz sensors. 1.
Guardian Co-Deposition Controller Operating Manual 1.8 Specifications 1.8.1 Sensor Type . . . . . . . . . . . . . . . . . . . . . . . . . Single filament hot cathode or Dual filament Gas Compensating Sensor Materials . . . . . . . . . . . . . . . 304 SS, Inconel x-750,Tantalum, Ceramic Filament Life (typical) . . . . . . . . . . . . ~1000 hours @ 1 x 10-5 Torr Filament Material . . . . . . . . . . . . . . . Thoria coated Iridium, Optional Yttria coated Filament Current. . . . . . . . . . . . . . . .
Guardian Co-Deposition Controller Operating Manual 1.8.2 Detector Photomultiplier Tube (PMT) . . . . . . . Hamamatsu R7518 or equivalent Spectral Response . . . . . . . . . . . . . . 185 to 730 nm Detection Limit . . . . . . . . . . . . . . . . . >5 fW of optical input power PMT Gain . . . . . . . . . . . . . . . . . . . . . 103 to 107, programmable Resolution . . . . . . . . . . . . . . . . . . . . 20 bits Mounting . . . . . . . . . . . . . . . . . . . . . 1.035 in.
Guardian Co-Deposition Controller Operating Manual Operating Environment . . . . . . . . . . 0°C to 40°C 0 to 80% RH non-condensing 0 to 2,000 meters Indoor Use Only Class 1 Equipment (Grounded Type) Suitable for Continuous Operation Ordinary Protection (not protected against harmful ingress of moisture) Pollution Degree 2 Installation (Overvoltage) Category II for transient overvoltages IPN 074-517-P1D Storage Environment . . . . . . . . . . . .
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Guardian Co-Deposition Controller Operating Manual Chapter 2 Quick Start 2.1 Introduction This section covers the minimum system connections and software setup needed to run the EIES-IV Guardian system. Consult later chapters for more detailed installation and operating instructions. 2.2 Installation 2.2.1 Sensor Installation Placement of the EIES sensor is the most significant factor determining EIES system performance.
Guardian Co-Deposition Controller Operating Manual To install the sensor, loosen the collar that secures the telescoping tube and separate the 2.75” flange from the sensor assembly. Install the 2.75 in. CF feedthrough to the vacuum chamber port, with the telescoping tube inside the chamber. 2.2.1.1 Sensor Covers, High Rate and Standard Rate The High Rate cover 016-205-P1 is shipped installed on the flux sensor. The Standard Rate cover 016-205-P2 is shipped separately in a poly bag.
Guardian Co-Deposition Controller Operating Manual 2.2.2 Detector—Direct Installation For single detector applications, the detector may be mounted directly to the sensor assembly viewport. Please see section 4.3.2, Single-Detector Systems, on page 4-8 for detailed installation instructions. 2.2.3 Sensor to Fiber Optic Installation In multi-material applications, a fiber optic beam splitter attached to the viewport can tailor signal transmission and detector mounting to your needs.
Guardian Co-Deposition Controller Operating Manual 2.2.4 Controller Installation Mount the controller in a location that allows easy wiring access to the EIES sensor and detector assemblies. The controller may be placed up to 25 ft. from the EIES computer. See section 4.6, Controller Installation, on page 4-17 CAUTION Properly ground the system. Connect a heavy braided cable from the EIES controller to vacuum chamber ground.
Guardian Co-Deposition Controller Operating Manual WARNING Maintain adequate insulation and physical separation of sensor, detector, and I/O wiring from hazardous voltages. WARNING Relay contacts are rated for 30 V (dc) maximum duty. Any customer supplied relay contact circuit must be fused at not more than 5A if the circuit is capable of supplying more than 5A, including the available short circuit current. 2.2.
Guardian Co-Deposition Controller Operating Manual 2.3.2 EIES Main Screen Click the EIES-IV icon on your desktop (or click Start >> Programs >> INFICON >> EIES-IV). Initially, your display may look slightly different than Figure 2-3. Figure 2-3 Process Display Status Panel Control Panel Readings Panel The readings panel has three display modes: Process, Ratio and Readings. Click View >> Process to see the Process display.
Guardian Co-Deposition Controller Operating Manual IPN 074-517-P1D Figure 2-4 Readings Display Notice that, unlike the previous display, there are several references to a Gas sensor in both the Readings Panel and the Control Panel. The EIES Guardian controller can be configured for standard EIES sensors or Gas Compensating (GC) sensors. When a Gas Compensating controller is detected, the extra controls and readings are displayed automatically. Operation with GC sensors is covered later in the manual.
Guardian Co-Deposition Controller Operating Manual 2.3.3 Edit Film Each material deposited will require unique setup parameters for proper deposition. 25 materials can be programmed. Click the Edit >> Films to display the Edit Film dialog box shown in Figure 2-5. Figure 2-5 Edit Film Dialog Box Use the film drop-down to Rename the next three films In, Ga and Se. Close the Edit Film dialog box and return to the main screen. 2.3.
Guardian Co-Deposition Controller Operating Manual Layers are numbered sequentially starting at layer 1. After the layer number is the EIES software channel that will display readings. Next is the EIES Guardian output that will control the deposition power supply. And finally, the film that will be deposited. It is important to know which channels and outputs are being used in co-deposition, to avoid assigning more than one film to the same measurement channel or control output.
Guardian Co-Deposition Controller Operating Manual Figure 2-7 CoDep Option A co-deposition film has been added to the first layer. Click Paste again to create a three film co-deposition layer. Now select the Below option and click Paste to add a second layer below layer 1. Finally, select the CoDep option and click Paste to add a CoDep film to layer 2. See Figure 2-8. IPN 074-517-P1D Figure 2-8 Pasting CoDep Layer The CIGS process now consists of Layer1 and Layer2.
Guardian Co-Deposition Controller Operating Manual 2.3.5 Edit Layer Highlight Layer 1: Ch:1 Out:1 Cu and click Edit to display the Edit Layer dialog box. See Figure 2-9. The Edit Layer dialog box shows all of the parameters needed to deposit the selected layer. At the top of the dialog box you select the measurement channel and output to be used, and the film to be deposited in this layer. Select Channel 1, Output 1, and Film Se. We will set this up to be a QCM channel.
Guardian Co-Deposition Controller Operating Manual Click the X Chan tab to view the settings used to eliminate cross channel interference and display the ratio of two channel’s reading. For now we will not use these features. See Figure 2-10.
Guardian Co-Deposition Controller Operating Manual The Film and Film Cal(ibration) tabs are for the selected film, Se. On the Film tab set preconditioning Ramp1 Power, Ramp1 Time, and Soak1 Time as shown in Figure 2-11.
Guardian Co-Deposition Controller Operating Manual Now select the Film Cal(ibration) tab and verify Channel Input and Cal. QCM# are as shown in Figure 2-12. Note that the software for the Q-pod or SQM242 QCM to be used must be installed per the relevant instructions. Tooling must be established as described in the QCM manual or in this manual under Tooling Factor on page 6-7. Channel numbers correspond to inputs from up to eight EIES Detector Modules, up to four QCM inputs or up to four SAM inputs.
Guardian Co-Deposition Controller Operating Manual When you are ready, return to the Edit Process dialog box shown in Figure 2-13 and click the indented CoDep film, immediately below Layer 1 Ch:1 Out:1 Se. The Edit Layer dialog box will update to show the parameters for the selected layer. In the Edit Layer dialog box, set this CoDep film to Channel 2, Output 2, and select film In. On the Layer tab, enter a Setpoint of 5 Å/s and an Endpoint of 5 kÅ.
Guardian Co-Deposition Controller Operating Manual Figure 2-14 2-Layer CIGS Process Click OK to return to the main screen with CIGS as the active process. 2.3.6 Views On the main screen, click the View menu and select 3. Power. You may want to rearrange some program windows at this point. You can also resize the graph by dragging its window border. IPN 074-517-P1D Figure 2-15 Power Graph Graph 3.Power is normally a graph of the output power of the active channels during deposition.
Guardian Co-Deposition Controller Operating Manual Click Setup on the graph menu to show the Graph Setup dialog box. Figure 2-16 Graph Setup Dialog Box Assign channels 1 to 4 by checking the Show Channel check boxes. Also, check Graph On Top to keep the graph above other windows. When your Graph Setup dialog box matches the one above, close the Graph Setup dialog box. IPN 074-517-P1D 2.3.7 Software Summary Spend some time with this process to become familiar with its setup.
Guardian Co-Deposition Controller Operating Manual 2.4 Initial Setup Connect the Guardian controller rear panel RS-232 connector to your computer serial port using a straight through DB-9 Male-Female cable (IPN# 068-0464 in Guardian ship kit). Connect your detector module(s) to the rear panel of the Guardian controller with 782-505-065 (3 m) or 782-505-065-40 (10 m) cable(s). 2.4.1 Power-up Sequence 1 Press the power switch on the Guardian controller. 2 Start the EIES Software.
Guardian Co-Deposition Controller Operating Manual 2.4.3 Detector Calibration The internal electronics of each EIES detector module are pre-calibrated at the factory. To compensate for background noise once installed to a system, the following calibration must be performed. NOTE: Allow 1 hr warm-up for the PMT to reach optimum stability. If you replace or exchange a detector, you must recalibrate! To calibrate a detector, select the Channel tab of the System Edit dialog box.
Guardian Co-Deposition Controller Operating Manual 2.4.4 Sensor Setup The Guardian controller can operate up to two standard or gas compensating sensors. During operation, the controller must maintain a constant sensor emission current. As a sensor is used and material is deposited on the sensor, an unwanted leakage current can develop. When the leakage current becomes too large, the Guardian controller can no longer control emission current.
Guardian Co-Deposition Controller Operating Manual Guardian controllers with Gas Compensating sensors have additional Emission and Leakage parameters for the gas sensor. A Gas Calibration factor is used to null the gas effect from the main sensor readings. See Figure 2-20. Figure 2-20 Gas Calibration Factor See Sensor Tab on page 3-30 for a description of the Gas Cal parameter. For now, uncheck Enable Gas Sensors if it is checked. 2.4.
Guardian Co-Deposition Controller Operating Manual If the SQM-242 card is installed properly, Card: 2.XX, DLL: OK is displayed. If you are using a Q-pod, its serial number appears. Verify that each sensor attached to the QCM displays a frequency reading on the main screen. 2.4.6 Digital I/O The I/O tab of the Edit System dialog box assigns the Guardian controller's relays and digital inputs to program functions. See Figure 2-22. Most digital I/O is not necessary for initial operation.
Guardian Co-Deposition Controller Operating Manual 2.5.2 Setup Layer Parameters Display the Edit Layer dialog box for the channel you are using by clicking the Edit button to the left of that channel on the main screen. Select the Layer tab of the Edit Layer dialog box, see Figure 2-23, and verify that the Endpoint is a value high enough to avoid prematurely halting the process during calibration.
Guardian Co-Deposition Controller Operating Manual Figure 2-24 Film Tab Full Scale Voltage Select the Film Cal(ibration) tab, and verify that the PMT volts setting is about 700. IPN 074-517-P1D Figure 2-25 PMT Voltage Setting If you are using QCM calibration of the EIES measurements, select the proper QCM Sensor# and enter the material Density and ZFactor (Z-Ratio) (see Appendix B). For now, it is probably best to disable QCM calibration by setting Cal QCM# to None.
Guardian Co-Deposition Controller Operating Manual 2.5.3 Start Deposition NOTE: Pump down the vacuum chamber to below 1E-5 Torr before operating the EIES-IV system! Allow 1 hr warm-up for the PMT to reach optimum stability. On the EIES main screen verify that there is no error message in the Film column on the channel(s) being used, and verify that Rate reading is near zero.
Guardian Co-Deposition Controller Operating Manual Figure 2-27 Channel Edit Button The Edit Layer dialog box is displayed. On the Film Cal. tab of the Edit Layer dialog box, adjust the PMT Volts until the readings for the appropriate channel are stable and low. HINT: Low PMT values cause low flux readings. High values increase noise and may saturate the PMT.
Guardian Co-Deposition Controller Operating Manual 2.5.4 Manual Calibration Calibrate the main screen rate reading to match the actual rate by entering a Cal. Gain on the Edit Layer, Film Cal. tab. The Cal. Gain parameter is calculated by equation [1]. EIES Measure Rate Cal. Gain = ----------------------------------------------Actual Rate [1] 2.5.5 QCM Calibration If you are not using the QCM calibration option, skip to section 2.5.6.
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Guardian Co-Deposition Controller Operating Manual Chapter 3 EIES Software 3.1 Introduction The EIES-IV Guardian Windows program is a turnkey deposition control program for the EIES Guardian controller. The program uses ASCII commands to communicate with the Guardian controller. The EIES-IV Guardian software is a powerful PC-based thin film deposition controller that can: Measure up to eight materials simultaneously. Operate two standard or gas compensating (GC) sensors.
Guardian Co-Deposition Controller Operating Manual Figure 3-1 3 Phases of Deposition Cycle During pre-conditioning, the source material is prepared for deposition. The first ramp/soak pre-conditioning phase is used to bring the material to a uniform molten state. The second ramp/soak phase is typically set to a power that produces evaporation below but near the desired deposition rate. When pre-conditioning ends, PID rate control of deposition begins.
Guardian Co-Deposition Controller Operating Manual 3.2 Installation NOTE: The EIES program may be installed and used in Simulate mode without an EIES-IV Guardian controller. This is useful for learning the software, and for off-line process development. To install the EIES software, insert the INFICON Program CD-ROM. If the setup program does not start automatically, click Start, then Run, then type :UtilityDisk (where is the drive you are using). The Program Disk main menu should appear.
Guardian Co-Deposition Controller Operating Manual Figure 3-3 EIES Program Main Screen The EIES main screen displays the last used Process, and the film(s) defined for the first layer of the process. In Figure 3-3, three films (Se, In, and Cu) will be deposited simultaneously in the first layer. The main screen can show from four to eight channels of data. For most users four channels will be adequate. To select the number of channels displayed, click the Edit menu, then System.
Guardian Co-Deposition Controller Operating Manual 3.3 Main Screen The EIES main screen, see Figure 3-5, consists of three panels and a menu bar. The Status Panel (top) displays information on the active process. The Control Panel (left) controls operation of the EIES-IV Guardian system. The Readings Panel displays readings from each of the channels used by the active process layer. Finally, the menu bar provides access to process recipe and instrument setup functions. Figure 3-5 EIES Main Screen 3.3.
Guardian Co-Deposition Controller Operating Manual Layer Time: The accumulated time for this layer. Resets to 0 if the layer is stopped. Phase: The current layer phase. Phases consist of pre conditioning (Ramp1, Soak1, Ramp2, Soak2), Shutter Delay, Deposition, and post conditioning (Idle Ramp). Additional phases, such as Stopped, Layer Stopped and Filter change are also displayed. Phase Time: Phase time is shown as ElapsedTime/TimeRemaining.
Guardian Co-Deposition Controller Operating Manual 3.3.3 Readings Panel—Process Mode The readings panel, see Figure 3-8, has two display modes: Process and Readings. Click View >> Process to see the process display. The Process display mode shows process related information such as films, setpoints, and manual operating controls. Only channels that are defined for the selected layer are displayed. Use Edit >> System >> Display to select a 4 to 8 channel display.
Guardian Co-Deposition Controller Operating Manual Manual (Power): Switches the output power between PID loop control and manual user setting. When pressed, the background of Manual power button and the Power display turns green. The initial manual power value is the same as it was when the Manual power button was pressed. In Manual power mode, you may type a new power setting and press Enter to change the output power setting. Click the Manual button again to return to auto (PID control) mode.
Guardian Co-Deposition Controller Operating Manual 3.3.5 Readings Panel—Readings Mode Click View >> Readings to see the readings display. See Figure 3-10. The readings display mode shows unfiltered channel (detector), sensor, and QCM readings. Figure 3-10 Readings Panel Readings Display 3.3.5.1 Channel Readings IPN 074-517-P1D Each channel uses either two or three measurements to calculate the channel current signal.
Guardian Co-Deposition Controller Operating Manual Flux (nA): The flux plus gas signal, minus the background light. Flux %: The % of full scale for the PMT and A/D converter circuits. Large values risk overloading the measurement circuit. Small values cause poor signal to noise ratios. Adjust the detector PMT voltage to achieve 30 to 80%. Gas (nA): equals PMTCurGas minus PMTCurOff. Gas %: The % of full scale for the PMT and A/D converter circuits of the GC sensor. Bkg (nA): The ambient light signal. 3.3.5.
Guardian Co-Deposition Controller Operating Manual Thick(ness): The deposited thickness measured by each QCM sensor. Zero: Click to zero the measured thickness, or Shift-click to zero all thickness. Normally handled automatically by the EIES software when a new layer begins. Frequency: The measured frequency of each QCM sensor. A negative value indicates a sensor failure. A QCM requires a density, Z-Ratio, and tooling factor to properly display rate and thickness. However, frequency is always displayed.
Guardian Co-Deposition Controller Operating Manual Save Database As: Saves the current process database to disk under a different name in the default folder. The path cannot be changed. This is useful for saving the process database for backup!, or for making trial changes without affecting your working database. Process databases are saved in Microsoft Access format. 3.4.3 File >> Data Log On/Off Turns disk data logging on/off. Data is logged only while the process is running.
Guardian Co-Deposition Controller Operating Manual Log Interval: The elapsed time between data log entries. The data log is updated only when the process is running. Overwrite: The log file will be overwritten each time data logging is started by pressing DataLog On on the main screen. Only the last run of the process is saved, and it appears as FileName.LOG. Append: Data is added to the end of the existing FileName.LOG file. Run#: A data file, FileName_Run#.LOG, is written for each process run.
Guardian Co-Deposition Controller Operating Manual 3.4.6 File >> Page Setup Provides printer selection and page orientation for the Print Screen function. 3.4.7 File >> Exit Stops the current process, turns off Emissions, and exits the EIES program. 3.5 Edit Process The Edit Process dialog box provides the functions needed to create and edit thin film deposition processes. A few definitions will be helpful as you use this manual. A Process is a sequence of Layers of different Films.
Guardian Co-Deposition Controller Operating Manual NOTE: The Edit Process dialog box can only be accessed when the process is stopped. To add layers to a process, click any existing layer (in any process) then click Copy. See Figure 3-13. This places a copy of the highlighted layer on the clipboard, and enables the Paste button. Figure 3-13 Edit Process Highlighted Layer There are four Paste options: Below: Insert the clipboard layer below the highlighted layer.
Guardian Co-Deposition Controller Operating Manual 3.6 Edit Layer A Layer establishes the desired rate and thickness (plus a few other parameters) for a deposited film. The Edit Layer dialog box, see Figure 3-14, can be accessed by clicking a channel Edit button on the Main Screen, or by highlighting a layer and clicking Edit on the Edit Process dialog box. NOTE: The Channel and Output settings can only be changed by accessing Edit Layer from the Edit Process dialog box when the process is stopped.
Guardian Co-Deposition Controller Operating Manual 3.6.1 Layer Grid Parameters on the Layer tab are unique to this layer. Those on the Film and FilmCal tabs pertain to any layer using the film. Pause the mouse over any parameter to see a brief description. Edit a parameter by clicking in the parameter's value cell, then typing a value, or by selecting a value from a drop-down menu. Time values may be entered in hh:mm:ss format, or as whole seconds (which are automatically converted to hh:mm:ss format).
Guardian Co-Deposition Controller Operating Manual Start Mode: A layer may start in three ways. In Auto, the layer starts immediately upon completion of the previous layer. In Manual, the layer waits for the user to click the Start button. If there are CoDep channels, they will also wait for a user Start if any channel Start Mode is set to Manual. Constant start is a special case used for controlling constant process variables such as temperature and pressure.
Guardian Co-Deposition Controller Operating Manual 3.6.3 X Chan (Cross Channel) Tab Parameters on the X Chan tab are unique to this layer. Those on the Film and FilmCal tabs pertain to any layer using the film. Each EIES detector channel measures an emission line that is unique to the material. However, other materials being evaporated at the same time may have emission lines that overlap the bandwidth of the desired material's filter.
Guardian Co-Deposition Controller Operating Manual Current: A percent of each xChan Detector current is subtracted, before any material calibration, tooling factors, etc. have been calculated. The advantage of this method is that a change in the xChan calibration factors does not impact the amount of xChan compensation. Rate: A percent of each xChan Detector rate is subtracted, after material calibration, tooling factors, etc. have been calculated.
Guardian Co-Deposition Controller Operating Manual Ratio Filter: The number of readings averaged for the ratio display. 0 disables the function. Because we are dividing two channels, and possibly multiplying their readings, a larger filter may be desirable. The value displayed is: Ratio Display = (Chan. Reading x Chan. Multiplier) / (Ratio Chan Reading x Ratio Chan Multiplier) [5] 3.6.5 Edit Layer Film Tab NOTE: The parameters on the Film tab are Film parameters.
Guardian Co-Deposition Controller Operating Manual 3.6.5.1 Deposit Grid P Term: Sets the gain of the control loop. High gains yield more responsive (but potentially unstable) loops. Try a low value then gradually increase/decrease to respond as desired to step changes in setpoint. I Term: The integral term controls the time constant of the loop response. A small I term, say 0.5 to 1 seconds, will smooth the response of most loops. An I value of 0 effectively disables PID control.
Guardian Co-Deposition Controller Operating Manual 3.6.5.2 Condition Grid Ramp1 Power: The power level desired at the end of the Ramp 1 phase, in % of full scale. Ramp1 Time: The time to ramp linearly from the initial power to the Ramp 1 Power. If multiple channels have preconditioning programmed, the start of Ramp1 may be delayed so that the Soak2 phase for all channels ends at the same time. Soak1 Time: The time the output remains at Ramp 1 Power. At the end of Soak 1 Time, the Ramp 2 phase starts.
Guardian Co-Deposition Controller Operating Manual 3.6.6 Edit Layer Film Cal NOTE: The parameters on the Film Cal. tab are Film parameters. They are determined by the Film selected for a layer. If you change the parameters on either of these tabs, they will be changed for any layer (in any process) that uses the selected film.The Film Cal. tab displays parameters that control the calibration and display of channel readings.
Guardian Co-Deposition Controller Operating Manual Cal Gain: The multiplier used to convert EIES current measurements to calibrated rate/thickness. You may enter a value manually, or the value is updated each time QCM Calibrate is clicked. Cal Zero: Due to gas background emission, there may be an EIES rate reading when there is no deposition. Enter the background rate to correct EIES rate to zero.
Guardian Co-Deposition Controller Operating Manual 3.6.6.2 QCM Grid Cal QCM#: Establishes which QCM sensor is used to calibrate this channel's EIES detector. Density: Sets the QCM density for this material. Material density has a significant impact on deposition calculations when a QCM is used for calibration or control. See Appendix B for common material densities. Z-Factor: Sets the QCM Z-Factor or Z-Ratio, the measure of a material's effect with increased thickness on QCM accuracy.
Guardian Co-Deposition Controller Operating Manual 3.7 Edit: Film A Film sets the parameters for the material to be deposited in a layer, the control loop tuning, pre/post conditioning, and many of the instrument hardware parameters associated with that material. Figure 3-20 Edit Film Dialog Box IPN 074-517-P1D The Film tab displays the deposition and pre/post conditioning parameters for the selected film. The Film Calibration (Film Cal.) tab contains instrument, display, and QCM parameters.
Guardian Co-Deposition Controller Operating Manual 3.7.1 Deposit Grid Refer to section 3.6.5.1. 3.7.2 Condition Grid Refer to section 3.6.5.2. 3.7.3 Film Cal(ibration) Tab Refer to section 3.6.6. IPN 074-517-P1D Figure 3-21 Edit Film Calibration Tab 3.7.3.1 Calibration Grid Refer to section 3.6.6.1. 3.7.3.2 QCM Grid Refer to section 3.6.6.2.
Guardian Co-Deposition Controller Operating Manual 3.8 Edit >> System The Edit System dialog box contains parameters that apply to all of the processes in a process database. The settings are arranged on a tabbed dialog box. 3.8.1 Channel Tab Figure 3-22 Edit System Channel Tab Sensor: Must be set to the EIES sensor (standard or gas compensating) that the channel detector module is attached to. IPN 074-517-P1D Update: The rate at which readings are returned from the EIES detector.
Guardian Co-Deposition Controller Operating Manual 3.8.2 Sensor Tab The format of the Sensor tab is determined by the type of sensor used. Figure 3-23 is shown when a gas compensating (GC) controller is used. For non-GC controllers, only Emission SetPt and Maximum Leakage fields are visible. Figure 3-23 Edit System Sensor Tab Refer to the label attached to your sensor or emitter assembly package for correct emission current settings.
Guardian Co-Deposition Controller Operating Manual Gas Cal: INFICON's gas compensating sensors provide a measurement of the emission caused by background gases. The gas calibration factor is used to null this portion of the signal from the main flux sensor measurements. If the EIES rate reading with no evaporation is negative, decrease the Gas Cal. parameter until the rate averages near zero. If the rate reading is positive with no evaporation, increase the Gas Cal.
Guardian Co-Deposition Controller Operating Manual Q-pod: INFICON's Q-pod transducers are used for QCM measurements. The serial number and revision of each installed Q-pod is shown. Figure 3-25 QCM Tab Q-pod Selection Period: Sets the QCM measurement period between .2 seconds (5 readings per second) and 2 seconds. A longer period gives higher reading accuracy, especially at low rates. IPN 074-517-P1D Max/Init/Min Frequency: The frequency values for the quartz crystal sensors used as inputs to the QCM.
Guardian Co-Deposition Controller Operating Manual 3.8.4 Digital I/O Tab Figure 3-26 Edit System I/O Tab 3.8.4.1 Relay Assign IPN 074-517-P1D To assign a deposition event to a relay, click the Relay #, then select the desired event from the drop-down menu. The Set, Clear, and Clear All buttons manually operate the selected relay. A description of each relay event follows: Process Running and Stopped Relays: These relays indicate the overall status of the process.
Guardian Co-Deposition Controller Operating Manual Time Setpoint Relay: This relay will close when Run Time equals the Time Setpoint. Channel Relays 1 to 8: These relays control EIES sensor shutters. They close during shutter delay and deposition. Source Relays 1 to 8: These relays control the Shutter that covers the deposition source. They close during deposition. QCM Relays 1 to 4: These relays control QCM sensor shutters. These relays close during shutter delay and deposition. 3.8.4.
Guardian Co-Deposition Controller Operating Manual 3.8.5 Comm Tab The Comm Tab sets up communications between the EIES program and the Guardian controller. Settings are made in two panels, Guardian and External. Figure 3-27 Edit System Comm Tab 3.8.5.1 Guardian Comm Port: . . . . . . . . . . . . . . . . . . Disabled, Com 1 to 9, Ethernet IPN 074-517-P1D Selects a computer RS-232 serial port or Ethernet port for communicating with the Guardian controller.
Guardian Co-Deposition Controller Operating Manual Show Comm: Displays a diagnostic screen that shows communications between the EIES program and the Guardian controller. See Figure 3-28. For troubleshooting purposes, you can manually send ASCII commands to the EIES instrument and see the response. For example, send an @ to see the EIES instrument version. Figure 3-28 Guardian Communications Dialog Box This option is not supported, set External Communication Comm Port to Disabled, (see Figure 3-27).
Guardian Co-Deposition Controller Operating Manual 3.8.6 Display Tab Figure 3-29 Edit System Display Tab Show 1 to : Sets the main screen to display 4 or more (max. 8) channels of EIES data. The minimum number of channels is four to allow adequate space on the left control panel. Update Frequency: The frequency, 1,2, 5 or 10 at which the main screen readings are updated per second. IPN 074-517-P1D Require Ctrl Key: When checked, you must press and hold the key to activate main screen controls.
Guardian Co-Deposition Controller Operating Manual 3.9 View Menu 3.9.1 Process, Ratio, Readings The Process, Ratio and Readings menu items are described at section 3.3.3 on page 3-7, section 3.3.4 on page 3-8 and section 3.3.5 on page 3-9, respectively. The check mark indicates which one is active. Click on the title to select that display. In addition, four graphs may be viewed as described below. 3.9.2 Graph Selection The EIES program supports four independent graphs.
Guardian Co-Deposition Controller Operating Manual 3.9.2.1 Graph Setup The Graph Setup dialog box provides access to the most commonly used graph setup parameters. It also provides total control of graph setup, using the Advanced Property Editor. Figure 3-31 View Setup Title: The caption that appears at the top of the graph window and on the main dialog box's Graph menu. However, the graph's setup properties are always stored on disk as Graph 1 to Graph 4.
Guardian Co-Deposition Controller Operating Manual 3.9.2.1.2 Y Axis Left/Right Caption: The caption shown along the graph's left or right axis. Min: The minimum value for the Y axis. Max: The maximum value for the Y axis. x.xxEx: Shows the selected Y axis values in scientific format (i.e., 2.00E-4). Log10: Shows the selected Y axis in Log base 10 values. 3.9.2.1.3 X Axis Range: Sets the width of the X axis in seconds, minutes, or hours.
Guardian Co-Deposition Controller Operating Manual Chapter 4 Installation 4.1 Introduction Chapter 2 provided a "quick start" guide to installation and operation of the Guardian system. This chapter provides more detail on mechanical and optical installation requirements, and our recommendations to help you achieve the best results from your Guardian system. Optical components (filters, lenses, light tubes, beam-splitters, fiber optics, etc.) are a critical part of the EIES system.
Guardian Co-Deposition Controller Operating Manual 4.2 Sensor / Feedthrough Assembly The sensor will not pass through the 2.75 in.CF (NW35CF) port. If the chamber is too small to allow installation from the inside by securing the sensor to the optical tube and connecting the in-vacuum filament cable at the feedthrough and sensor, a 4.5 in. CF (NW63CF) or larger flange adapted to the 2.75 in. CF flange is required to allow the entire sensor to pass through.
Guardian Co-Deposition Controller Operating Manual Figure 4-2 EIES Gas Compensating Sensor 016-601-Gxx IPN 074-517-P1D 4.2.1 Sensor Position Location of the sensor within the vacuum system is the most significant factor in determining EIES system performance. The optical signal generated by the sensor is often small, especially when the deposition rate for a material is low.
Guardian Co-Deposition Controller Operating Manual Figure 4-3 EIES Sensor Cutouts Larger Cutout The EIES sensor has two cutouts that allow the flux to pass through the sensor.
Guardian Co-Deposition Controller Operating Manual 4.2.3 Rigid Sensor Installation Figure 4-5 Rigid Sensor Installation Large Cutout Collars 2.75 in. Flange Small Cutout Chamber 1 Loosen the telescoping tube collars and separate the sensor from the feedthrough. 2 Attach the feedthrough 2.75 in. CF flange to the mating port on the vacuum chamber wall with the telescoping tube inside the chamber.
Guardian Co-Deposition Controller Operating Manual 7 Wrap aluminum foil (may not be suitable for use with Se) or other shielding around the light tube, cables, and sensor assembly. Be sure you do not obstruct the flow of material vapor through the sensor opening. 8 Include special provisions for cooling if your process requires, to allow Sensor temperature to remain below 450°C. 9 Be sure the Sensor is in an area with less than 2 gauss of stray magnetic field during deposition.
Guardian Co-Deposition Controller Operating Manual 4.3 Detector Your specific system configuration and space constraints will determine what you need to connect the light output from the sensor feedthrough to one or more detectors. Couplings, extension tubes, filters, and many other optical components are available from INFICON and a variety of other suppliers, such as those listed at the beginning of this chapter. The detector uses a Thorlabs BC1 mounting plate to interface to other optical components.
Guardian Co-Deposition Controller Operating Manual 4.3.2 Single-Detector Systems For single-material thin film systems, only one detector is needed and it can be mounted directly to the feedthrough as shown below. Figure 4-7 Single Sensor Direct Mounting Retaining Ring C70-1620 Sensor PM Detector Assy Lens Tube 070-1622 Optical Filter 1 Thread the 070-1622 Lens Tube into the 782-900-030 PMT Detector.
Guardian Co-Deposition Controller Operating Manual signal losses can be significant, which may result in a signal that has a low signal/noise ratio. As a general rule, we recommend splitting the beam into three detectors at most. 4.3.3.1 Fiber Optic Beam Splitting Fiber optic components cost more, but introduce lower light losses than equivalent optical components. They are especially beneficial when the signal is low or must be split into several components.
Guardian Co-Deposition Controller Operating Manual 3 Now attach each leg of the fiber optic bundle to an EIES detector. See Figure 4-10. Figure 4-10 Attaching Fiber Ends to Detectors Retaining Ring 782-900-030 PMT Detector Lens Tube 070-1622 Optical Filter Fiber Optic Adapter 782-020-042 Fiber Optic Single Strand 1 Thread an 070-1620 Retaining Ring part way into the 070-1622 Lens Tube so that it is approximately 0.45 in. (1 cm) deep into the lens tube.
Guardian Co-Deposition Controller Operating Manual CAUTION Be careful when bending fiber optic lines. Individual internal fibers are easily broken, which reduces the light signal at the output. Also, the detectors must be supported by an external means. Do not hang the detector from the Optical Beam Splitter fibers. Be sure power to the PMT Detector Module is turned off whenever the PMT is exposed to room light to avoid damage to the PMT. 4.3.3.
Guardian Co-Deposition Controller Operating Manual adjustments to compensate for these differences; however, that does not adequately compensate for the lower signals inherent in the setup. If you use this configuration, install the first detector (#1 in this example) on the material with the lowest deposition rate (lowest signal). 4.4 Optical Filters A 1 in. (25 mm) round optical filter is mounted in the inlet of each detector. See section 4.3.2 and section 4.3.
Guardian Co-Deposition Controller Operating Manual 4.5 Computer Connections Guardian requires a connection to an external computer via RS232 cable or ethernet cable. If the EIES Guardian software is to be installed, please see Installation on page 3-3. 4.5.1 RS232 Serial Interface Connect a serial cable from the Guardian serial port to the computer’s serial port. The cable required is a DB9 female-to-male. A USB to RS232 converter is required if the computer only provides the USB connection.
Guardian Co-Deposition Controller Operating Manual To access the Network Connection on the PC, select Network Connections from the Windows® Start menu or from the Control Panel. See Figure 4-12. Figure 4-12 Accessing Network Connections Select the Local Area Connection to be changed, right-click and select Properties. See Figure 4-13.
Guardian Co-Deposition Controller Operating Manual On the General tab, select Internet Protocol (TCP/IP) and press the Properties button. See Figure 4-14. Figure 4-14 Internet Protocol (TCP/IP) Properties IPN 074-517-P1D Select the button for Use the following IP address, enter the IP address and Subnet mask shown in Figure 4-15, and press OK. With this selection, the PC is assigned an IP address to use when communicating with the Guardian.
Guardian Co-Deposition Controller Operating Manual Figure 4-15 Entering the IP Address and Subnet mask IPN 074-517-P1D Click OK to all open dialogs to close out the Internet Protocol setup for the Local Area Connection.
Guardian Co-Deposition Controller Operating Manual 4.6 Controller Installation Mount the controller in a location that allows easy wiring access to the EIES sensor and detector assemblies. The controller may be placed up to 25 feet from the EIES computer. 4.6.1 Digital I/O Two connectors on the rear panel provide digital inputs and relay output connections. Connect the Emission Interlock connector or equivalent to the INPUTS connector as described at section 4.6.3.1 Emission Interlock.
Guardian Co-Deposition Controller Operating Manual 4.6.2 Relay Connector Pinout Table 4-1 Relay Connector Pinout Relay Pins Relay Pins 1 9,27 7 6,24 2 10,28 8 13,31 3 8,26 9 4,22 4 11,29 10 5,23 5 7,25 11 14,32 6 12,30 12 15,33 The relays are Form1A (SPST, normally open) mechanical relays rated for 30 V (dc) at 3 A max. WARNING IPN 074-517-P1D Relay contacts are rated for 30 V (dc) maximum duty.
Guardian Co-Deposition Controller Operating Manual 4.6.3 Input Connector Pinout Table 4-2 Input Connector Pinout Input Pin Input Pin 1 13 7 19 2 14 8 20 3 17 9 21 4 15 10 22 5 (Interlock) 16 11 23 6 18 12 24 Common 10 Ground 3,4,5,6 +12V 1 Tie Common (pin 10) to a supply voltage (+12 V is available on pin1). Inputs are activated by pulling the input pin to ground (pin 3, 4 5 or 6).
Guardian Co-Deposition Controller Operating Manual 4.6.4 Sensor(s) Connect the sensor filament cable (IPN 600-1407-P10 [10 ft. (3 m)] or P40 [40 ft. (12 m)] Dual or 600-1406-P10 or P40 Single) from the controller to the appropriate electrical connections on the sensor feedthrough. WARNING - Risk Of Electric Shock IPN 074-517-P1D The sensor outputs are energized at ±180 V (dc) and constitute a potential shock hazard. If a sensor cable is damaged, contact INFICON for a replacement.
Guardian Co-Deposition Controller Operating Manual 4.6.5 Control Outputs Connect a BNC cable (not supplied) from the EIES Control Output, (see Figure 4-16 on page 4-17) for each channel to the control input of your evaporation power supply. The channel control signal is a DC voltage from 0 volts to +/-10 V (dc). Consult your power supply vendor's manual for proper connection. CAUTION Properly ground the system. Connect a heavy braided cable from the EIES controller to vacuum chamber ground.
Guardian Co-Deposition Controller Operating Manual 4.6.7 Mains Power With the power switch OFF, connect the AC mains to the controller power input. The controller automatically accepts 100-240 V (ac), 50-60 Hz. NOTE: Observe the power-up sequence described below to avoid power glitches appearing at the evaporation power supply outputs during startup. WARNING Power up in this sequence: (1) Press the power switch on the Guardian controller. (2) Start the EIES Software.
Guardian Co-Deposition Controller Operating Manual 4.7 Quartz Crystal Monitor Option (QCM) A Quartz Crystal Monitor (QCM) is commonly used with EIES systems for calibration of the EIES sensor, and control of materials for which EIES measurement is not suitable. INFICON's SQM-242 PCI Card or Q-pod is the recommended QCM for use with the Guardian system because they can be integrated to provide convenient calibration.
Guardian Co-Deposition Controller Operating Manual 4.8 Monochromator Option The 782-900-070 Monochromator Kit, see Figure 4-18, contains just one optical element, an aberration-corrected holographic grating. It has no internal mirrors. Specifications Focal length 100 mm, Aperture F/3.5, Bandwidth 5 nm Grating: Groove density 1200 gr/mm, Blazed for 250 nm Wavelength counter: Digital, direct reading in nm, graduated in 0.
IPN 074-517-P1D Figure 4-18 Monochromator Kit Guardian Co-Deposition Controller Operating Manual 4 - 25
Guardian Co-Deposition Controller Operating Manual 4.8.2 Monochromator Operation IPN 074-517-P1D Once the monochromator is installed, you can set the wavelength readout to the chosen point, using the readout and adjustment knob and making sure the wavelength lock is loose (left position). Once deposition has begun, the wavelength may be selected more accurately by varying it slightly around the initial set point. The maximum rate reading (at constant power) indicates that the wavelength has been tuned.
Guardian Co-Deposition Controller Operating Manual Chapter 5 Maintenance & Troubleshooting WARNING There are no adjustments or user-serviceable parts inside the EIES Guardian Controller or Detectors. 5.
Guardian Co-Deposition Controller Operating Manual 5.3 Sensor Maintenance The only maintenance required for the sensor is periodic cleaning, and occasional filament replacement (782-530-015 for discontinued 782-900-029 and 782-900-052 Sensor and Feedthrough Assemblies) or emitter assembly (016-201-G1 for all 016-600-Gxx and 016-601-Gxx Sensor and Feedthrough Assemblies), see Figure 5-1 and Figure 5-2.
Guardian Co-Deposition Controller Operating Manual 5.3.2 EIES Filament or Emitter Assembly Replacement NOTE: The emitter assembly 016-201-Gx (G1=Thoria, G2=Yttria) itself is not considered a repairable item. While average filament and emitter life is approximately 1000 hours at 2 mA for Yttria filaments and 4 mA for Thoria filaments, process parameters can affect this figure. Refer to the label attached to your emitter packaging for correct emission current setting.
Guardian Co-Deposition Controller Operating Manual Figure 5-2 New 016-Series Sensor Exploded Cover 016-201-G1 Emitter Assy. Faraday Collector Assy. Housing Assy. Ref: #2-56 Hex Screws 1 Unplug the in-vacuum cable from the Sensor connector pins by grasping the connector body and pulling outward with a slight rocking motion. 2 If necessary, loosen the clamping ring at the end of the optical tube to remove the Sensor from the vacuum system. 3 Carefully, pry the cover off the Sensor housing.
Guardian Co-Deposition Controller Operating Manual 7 Replace the Sensor cover. 8 Check the resistance between the emitter’s connector pins (it should be approximately 1 ohm) and between one pin and the Sensor housing assembly (it should exceed 1 megohm). Use the highest resistance range when checking between a connector pin and the housing. Use the lowest when checking between connector pins.
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Guardian Co-Deposition Controller Operating Manual Chapter 6 Theory & Calibration 6.1 Introduction This chapter contains information that is useful for determining calibration values to achieve the best possible performance and accuracy from your EIES-IV Guardian system. 6.2 Theory of EIES Measurements Electron Impact Emission Spectroscopy (EIES) uses a thermionic emitter to excite outer shell electrons to a higher valence band.
Guardian Co-Deposition Controller Operating Manual Within the sensor housing, electrons from the filament strike the evaporant atoms, raising the energy level of the outer electrons. These excited electrons immediately return to their normal energy level, emitting photons. The wavelength of the photons is characteristic of the material, and the intensity is proportional to the number density of the atoms.
Guardian Co-Deposition Controller Operating Manual 6.2.2 Optical Discrimination IPN 074-517-P1D Figure 6-2 Spectra for Aluminum, Copper, and a codeposition of 94%Al-6%Cu Issues common to material codeposition are clearly illustrated in Figure 6-2. The Al line near 4000 Å is useful. The intensity is not diminished when codeposited with Cu, and no interfering emission lines are nearby.
Guardian Co-Deposition Controller Operating Manual However, for Cu the line near 3250 Å is not only attenuated, but is also near the secondary Al line around 3100 Å. To accurately measure the Cu emission, we need a discriminating device with the conflicting goals of a narrow bandwidth and low attenuation of the desired signal. Thin film optical filters are both efficient and selective. In addition they are readily available, small, and relatively inexpensive.
Guardian Co-Deposition Controller Operating Manual 6.3 Theory of QCM Measurements As material is deposited on a quartz crystal, its frequency decreases. The frequency change correlates to a thickness, using the QCM equation: Nq Dq Fq – Fc T f = ---------------------------------- atan Z tan ----------------------------- Dm Fc Z Fq 5 [4] AT crystal constant: N q = 1.668 10 Hz-Cm [5] Density of quartz: gm D q = 2.648 ---------3 cm [6] 6.3.
Guardian Co-Deposition Controller Operating Manual Z-Ratio can be calculated using the Shear Modulus of quartz (Uq) and the deposited material (Um): Z = Dq * Uq Dm * Um 12 [10] where: Uq = 32 Gpa Unfortunately, Z-Ratio and Shear Modulus are not readily available for many materials. Z-Ratio can also be calculated empirically using this method: 1 Deposit the material until Crystal Life is near 50%, or near the end of life, whichever is sooner.
Guardian Co-Deposition Controller Operating Manual 6.3.3 Tooling Factor Tooling Factor adjusts for the difference in material deposited on the quartz sensor versus the substrate. Tooling may be less than or greater than 100% as shown in Figure 6-5. Figure 6-5 Tooling Value Substrate Substrate Tooling Over 100% Tooling Under 100% 1 Place your substrate and a new quartz sensor in their normal position. 2 Set Tooling to an approximate value; Density as determined above; Z-Ratio =1.
Guardian Co-Deposition Controller Operating Manual 6.4 EIES Calibration EIES is an accurate means of measuring deposition rate and deposition thickness over a wide dynamic range. However, as with any instrument, it must be set up properly and calibrated periodically for accurate results. NOTE: Allow a one hour warm-up for the PMT Detector prior to calibration. The following discussion assumes you know how to operate the software (refer to Chapter 3). 6.4.
Guardian Co-Deposition Controller Operating Manual On the Edit Layer dialog box, adjust the PMT voltage until the % Current reading on the Edit System dialog box shows 50% to 70%. Typical PMT voltage values are 500 V to 700 V. The 50% to 70% value may seem low, but some headroom may be necessary when other materials are being codeposited. 6.4.3 Zero Calibration The EIES detector may read a residual gas signal, even when no deposition is occurring. Allow a one hour warm-up for the PMT Detector module.
Guardian Co-Deposition Controller Operating Manual 6.4.5 Gain Calibration - QCM A Quartz Crystal Monitor (QCM) provides an accurate means of calibrating EIES detector gain. While it can be used in the manner described above, INFICON SQM-242 or Q-pod provides an automated approach. Show the channel's Edit Layer dialog box, FilmCal. tab. Select the QCM input you want to use in the Cal. QCM # drop-down. Enter the Density and ZFactor (Z-Ratio) for the material being calibrated.
Guardian Co-Deposition Controller Operating Manual 6.4.6 Cross Channel Calibration The EIES detector may detect optical emission from background gases or other materials. This is particularly true if the emission wavelengths of other materials are near the wavelength of the material being measured. To compensate for this effect, you need to measure and subtract the interfering (cross channel) rate(s). In the EIES software, create a codeposition layer for the materials to be calibrated.
Guardian Co-Deposition Controller Operating Manual Create a One-Layer Test Process: Create a new process that has a single film as its only layer, and select it as the current process. Set the film's Initial Rate to your desired rate and Final Thickness to a large value, say 10X your desired Final Thickness. Select the proper Sensor(s), Output, and Material. Set Max Power to 100% and Slew rate to 100%. Set Error Action to Ignore. Test the Setup: Press Auto/Manual to start the layer in Manual mode.
Guardian Co-Deposition Controller Operating Manual Continue to Start the process and adjust PID until steady-state response is smooth and the step response is reasonably controlled. It’s not necessary to totally eliminate ringing during the step if the steady-state response is smooth. Preconditioning will minimize step changes. IPN 074-517-P1D Once PID terms are established for a material, they will typically be similar for other materials.
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Guardian Co-Deposition Controller Operating Manual Chapter 7 Communications 7.1 Introduction The computer interface capabilities of the EIES-IV software allow operation from an external computer via Ethernet or RS-232 serial communications using a simple ASCII command set. Programs like the EIES_Vxxx_COMM.EXE running on the same computer as the EIES software can control the EIES-IV software using ActiveX®.
Guardian Co-Deposition Controller Operating Manual 7.2.3 EIES ActiveX Comm Program Protocol EIES program commands fall into two categories: Query commands that request data from the EIES program and Update commands that update a setting or instruct the program to take an action. 7.2.3.
Guardian Co-Deposition Controller Operating Manual Example Response: Set Process Update Failed @UP;;;?? Where: 01 Illegal Command 02 Illegal Parameter 03 Illegal Format 04 Checksum Error 05 Request Denied 06 Unknown Error IPN 074-517-P1D 7.2.3.
Guardian Co-Deposition Controller Operating Manual Stop Layer Reset Set Run # Next Layer Set Active Layer # DataLog Off DataLog On DataLog FileName DataLog Interval DataLog Type (0=Overwrite, 1=Append, 2=Run#) Channel n (1 to 8) to Auto Power Set all active channels to Auto Power Channel n (1 to 8) to Manual Power ( = % Power) Set all active channels to Manual Power ( = % Power) Zero all totals Query/Update Layer @QL;;;@UL;; NOTE: A value
IPN 074-517-P1D Guardian Co-Deposition Controller Operating Manual 03 05 06 10 11 12 13 14 15 16 17 18 19 20 21 22 23 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 D Term Shutter Timeout Shutter Accuracy Calibration Accuracy Calibration Sample Time Calibration Interval Time Ramp 1 Power Ramp 1 Time Soak 1 Time Ramp 2 Power Ramp 2 Time Soak 2 Time Not Used Not Used Not Used Idle Power Idle Ramp Time Slew Rate QCM Density QCM Tooling QCM Z-Factor (Z-Ratio) Input Type PMT Voltage Cal Gain Cal Offset User
Guardian Co-Deposition Controller Operating Manual Query Sensor @QS; where is: 01 Sensor 1 Status (0=Off, 1=On) 03 Sensor 2 Status (0=Off, 1=On) 05 Gas 1 Status (0=Off, 1=On) 07 Gas 2 Status (0=Off, 1=On) 1n Sensor n Emission SetPt (mA) 1=Sens1, 2=Sens2, 3=Gas1, 4=Gas2 2n Sensor n Maximum Leakage (mA) 1=Sens1, 2=Sens2, 3=Gas1, 4=Gas2 3n Sensor n Gas Calibration 1=Sens1, 2=Sens2 Update Sensor @US;; where is: 01 Sensor 1 Off 02 Sensor 1 On 03 Sensor 2 Off 04 Sensor 2
Guardian Co-Deposition Controller Operating Manual Query/Update Utility @QU; @UU;; 02 Simulate Mode (0/1) 06 Front Panel Disable Param 1 is sum of these disable values: 1 Start Buttons 32 Zero 2 Emission 1 64 Manual Power 4 Emission 2 128 File Menu 8 DataLog 256 Edit Menu 16 Chan Edit 512 Graph Setup For example: = 9 would disable Start Buttons and DataLog 07 Application Visible (0/1) 11 EIES Software Version (Query only) 12 EIES Computer Operating System (Query only) 13 EI
Guardian Co-Deposition Controller Operating Manual 7.3 Guardian Controller Direct Communications If you prefer to control the Guardian without using the EIES-IV software, you can create your own deposition control program using these same commands as described in the following. NOTE: The Guardian (V4+) only responds to commands received. It never initiates communications. 7.3.1 Serial Interface Connect a serial cable from the Guardian serial port to the computer’s serial port.
Guardian Co-Deposition Controller Operating Manual 7.3.3.1 V3.XX Controller Command/Response Format The V3.XX controller command format is: (Command) (Data) (LF) Where: (Command) = ASCII command letter (Data) = command parameters (LF) = Hex 0A (end of message) The V3.XX controller response format is: (Command) (Data) (LF) Where: (Command) = the command the message is responding to (LF) = Hex 0A (end of message) 7.3.3.2 V4.XX Controller Command/Response Format Version 4.XX and higher differs from V3.
Guardian Co-Deposition Controller Operating Manual The CRC is computed using the following algorithm: · The CRC is initialized to 3FFF hex. · Each character in the message is examined, bit by bit, and added to the CRC in the following manner: · The character is exclusive OR'd with the CRC. · The CRC is shifted right one bit position. · If a character's least significant bit is a 0 then the CRC is exclusive OR'd with 2001h. · Steps b and c are repeated for each of the 8 bits in the character.
Guardian Co-Deposition Controller Operating Manual private static byte crcHigh(short crc) { byte val = (byte) (((crc >> 7) & 0x7f) + 34); return val; } private static byte crcLow(short crc) { byte val = (byte) ((crc & 0x7f) + 34); return val; } public static byte[] pack(String str) { int cursor = 0; byte[] cmd = null; str += " "; cmd = new byte[str.length() + 5]; cmd[cursor++] = (byte) '!'; cmd[cursor++] = (byte) (34 + str.length() + 1); char[] chrs = str.toCharArray(); for (int ix = 0; ix < str.
Guardian Co-Deposition Controller Operating Manual 7.3.4 Command Summary for V3.XX and V4.XX Guardian Controller NOTE: # is channel, V is value 7.3.4.1 @ Description: Returns controller firmware version Parameters: None Example: @ The complete command string is: !%@Md(LF) That is, Hex (21)(25)(40)(20)(4D)(64)(0A) Returns: EIESVX.XX A typical response from a V4.XX Guardian controller is: !.AEIESV4.03 (59)(55)(OA) That is, Hex (21)(2E)(45)(49)(45)(53)(56)(34)(2E)(30)(33)(20)(59)(55)(0A) 7.3.4.
Guardian Co-Deposition Controller Operating Manual 7.3.4.4 C Description: Sets the bias current into the PMT module A to D converter. This command is used to calibrate the PMT module. To calibrate, set a 100nA bias current and take readings from the PMT module (G command). Next set a 2000nA bias current and take readings. For normal operation, be sure to leave the current at 2000nA. Calculate the slope and intercept of the y=mx + b transfer function, where y is counts and x is current, as shown below.
Guardian Co-Deposition Controller Operating Manual 7.3.4.7 G Description: Get PMT readings. Readings are returned as a comma delimited string of average A to D counts (Cts) and number of A to D conversions (Cnv) use to calculate the average Cts. The readings for each PMT module are separated by a semi colon. Readings are only returned for modules with a new reading available.
Guardian Co-Deposition Controller Operating Manual 7.3.4.9 K Description: Sets the output voltage of control outputs 1 to 6 to a value between -10 V to +10 V. The command is in DAC counts with 0 = -10V, 32767= 0 V, and 65535=+10 V See Note in section 7.3.3.2 on page 7-9 re "safe mode" timeout. See the W command below for outputs 7 & 8. Parameters: Out#,Counts Example: K1,32767 (set Output 1 to 0 V) Returns: K 7.3.4.10 M Description: Reads the state of the digital inputs.
Guardian Co-Deposition Controller Operating Manual 7.3.4.13 T Description: Reads voltage on one of the eight controller outputs. Value is returned in DAC counts, with 0 = -10 V, 32767 = 0V, and 65535 = +10 V. Parameters: Output# Example: T1 (reads Output 1 voltage) Returns: T 7.3.4.14 V Description: Sets sensor emission current using a comma delimited string of four current values: Sensor1 Current, Sensor1 Gas Current, Sensor2 Current, Sensor2 Gas Current. The emission current value is sent as mA x 100.
Guardian Co-Deposition Controller Operating Manual Appendix A Material Optical Parameters NOTE: Items in parenthesis indicate additional lines for a material (2), or lines that overlap other materials Au (Co).
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Guardian Co-Deposition Controller Operating Manual IPN 074-517-P1D Appendix B Material QCM Parameters Material Aluminum Aluminum Oxide Antimony Arsenic Barium Beryllium Bismuth Bismuth Oxide Boron Cadmium Cadmium Selenium Cadmium Sulfide Cadmium Teluridium Calcium Calcium Fluoride Carbon Diamond Carbon Graphite Cerium Fluoride Cerium Oxide Chromium Chromium Oxide Cobalt Copper Copper Sulfide Copper Sulfide B Copper Sulfide A Dysprosium Erbium Gadolinium Gallium Gallium Arsenide Germanium Gold Hafnium Hafn
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Guardian Co-Deposition Controller Operating Manual Index A ActiveX 3-1, 7-1 add layer 3-15 B background noise 2-19 C Cal Zero 6-9 Calibrate Channel 3-29 Calibration 3-24 Channel 2-14, 3-9 Channel Readings 3-9 Channel Relay 3-34 Communications 1-8, 2-18, 4-13, 7-8 network protocol 4-13 Cross Channel Calibration 3-19, 6-11 Customer Support Customer Service 5-1 Repair Service 5-1 Return Material Authorization 5-1 Sales 5-1 Service Center 5-1 Technical Support 5-1 IPN 074-517-P1C D F Fiber Optic 2-3, 4-
Guardian Co-Deposition Controller Operating Manual Q T QCM Calibration 2-27 Query command 7-2 TCP/IP 4-13 Tooling 3-26 R U Ratio 2-6, 3-8, 3-20, 3-21 Relay 2-4, 2-5, 3-33, 4-18, 4-22 residual gas 2-2, 6-9 RS232 3-3, 4-13 S W warm-up 2-19 Z Zero Calibration 6-9 Z-Factor 3-26, 6-5 Z-Ratio 3-26, 6-5 IPN 074-517-P1C Sensor Installation 2-1 Specification 1-7 Standard Rate cover 2-2, 4-4 standard sensor 2-2 Subnet mask 4-13 system interlock 2-4, 4-19 Update command 7-2 USB 3-12, 4-13, 4-21 Index - 2
