Manual

Index - 1
IPN 074-517-P1C
Guardian Co-Deposition Controller Operating Manual
Index
A
ActiveX 3-1, 7-1
add layer
3-15
B
background noise 2-19
C
Cal Zero 6-9
Calibrate Channel
3-29
Calibration
3-24
Channel
2-14, 3-9
Channel Readings
3-9
Channel Relay
3-34
Communications
1-8, 2-18, 4-13, 7-8
network protocol
4-13
Cross Channel Calibration
3-19, 6-11
Customer Support
Customer Service
5-1
Repair Service
5-1
Return Material Authorization
5-1
Sales
5-1
Service Center
5-1
Technical Support
5-1
D
Data Log 3-12
Declaration Of Contamination
5-1
Density
2-24, 6-5, 6-7, 6-10
deposition flux
3-9
Detector Calibration
2-19, 6-8
E
Edit Layer 3-16
Edit Process
2-8, 3-14
EIES Calibration
6-8
EIES Sensor
1-2
Emission current
3-10
Emission Interlock
4-17
emitter
1-1, 5-2
Emitter Assembly Replacement
5-3
ethernet
2-19, 3-3, 4-13
F
Fiber Optic 2-3, 4-8
filament
5-3, 6-1
filament cable
4-2, 4-6, 4-20
filament replacement
5-2
film
2-8, 3-27
Film Calibration
3-24
flux sensor
2-2, 4-4
G
Gain Calibration 6-9, 6-10
Gas Compensating
1-3
H
High Rate cover 2-2, 4-4
I
Input 2-4, 3-34
Interlock
2-4, 3-34, 4-19, 5-5
IP Address
4-13
L
layer 2-8, 2-11, 3-1, 3-14, 3-16
Layer Time
3-6
leakage
2-20, 3-6, 3-10, 3-30
Loop Tuning
6-11
M
Manual Calibration 2-27
Monochromator
4-13
N
noise 2-26, 3-10
O
optical filter 4-8, 4-10, 4-12, 6-1, 6-4
P
Pinout 4-18, 4-19
PMT
1-5, 2-3, 2-19, 6-4
PMT Detector Module
4-7
PMT noise
3-24
power-up
2-4, 4-22
process database
3-11
Process display
2-6