Instruction Manual

10 Description
4 Description
The mass spectrometer module is part of the leak detection system LDS3000. The
mass spectrometer module can be operated as part of a test system without the need
for additional equipment from INFICON.
4.1 Construction of the unit
1 - Terminal block
Connections for test system, backing pump, PIRANI gauge, internal calibration leak
and sniffer line.
1: Connection U
LTRA, 2: Connection FINE/SNIFFER, 3: Connection GROSS/FOREPUMP
Fig: 1 Mass spectrometer module LDS3000
Fig: 2 Connection block