Instruction Manual

Description 11
2- Turbo molecular pump
Turbo molecular pump with cooling unit
3 - Pre-amplifier
Pre-amplifier of the mass spectrometer module
4 - MSB box
Interfaces of the mass spectrometer module (see Chapter 4.1.1, page 11)
5 - Inverter turbo molecular pump
Electronic controller of the turbo molecular pump
6 - Rating plate
Rating plate containing mass spectrometer module specifications
7 - Fasteners
Fasteners for installing the mass spectrometer module in a test system
8 - PIRANI pressure measurement location
PIRANI gauge for measuring the pressure of the backing pump
4.1.1 MSB box
1 - OUTPUT
Connection for gas ballast and three valves (not used, reserve)
Connection plug arrangement
2 - SNIFFER
Electrical connection for the sniffer line
Fig: 3 MSB box connections
1 Valve 2 (gas ballast), 24 V, max. 1 A
2 Valve 3 (not used)
3 Valve 4 (not used)
4 Valve 6 (not used)
5GND