Instruction Manual

40 Operation
5xx Pressure and flow errors
500 W
Pressure sensor not
connected,
(pressure p1 voltage
[V])
58 144 0.5V
Pirani P1 not connected, IF
board or MSB defective
520 W
Pressure too high,
(pressure p1 [mbar])
73 148
18
mbar
Pressure p1 too high
521 W
Pressure rise, anode
break down,
(anode voltage [V])
73 148
< Nom.
Value -
20V
Pressure p1 too high,
message after 1.4s
522 W
Pressure rise emission
break down,
(emission current [A])
73 148
< 90%
Nom.
Value
> 110%
Nom.
value
Emission was stable
previously, pressure p1 too
high, message after 5s
540 W
Pressure too low,
sniffer blocked,
(pressure p1 [mbar])
63 62
Param
eter
Sniffer
flow
warnin
g
Sniffer clogged, sniffer
valve defective
541 E Sniffer blocked 62 146
Sniffer blocked, sniffer
valve defective (pressure
lower than half of the
configured warning value)
542 W
Sniffer broken,
(pressure p1 [mbar])
64 147 Sniffer broken
6xx Calibration errors
600 W
Calfac too low,
(calibration factor)
81 153 0.01
Calibration leak or machine
factor set incorrectly
601 W
Calfac too high,
(calibration factor)
81 153 5000
Calibration leak or machine
factor set incorrectly, split
flow factor too high
602 W
Calfac lower than last
calibration,
(calibration factor)
81 153
< 50%
old
value
Calibration leak, machine
factor or split flow factor
has changed
603 W
Calfac higher than last
calibration,
(calibration factor)
81 153
> 200%
old
value
Calibration leak, machine
factor or split flow factor
has changed
604 W
No int cal due to valve
control,
(valve control by user)
81 153 Test leak is not enabled
605 W Testleak too small
Test leak defective or
signal too weak
610 W
Machine factor too low,
(machine factor)
81 153
1.00E-
04
Machine factor adjustment
inaccurate
Error
number
Warning/
Error
Error message
LDS3000
Error
number
LDS1000
protocol
Error
number
ASCII
protocol*
Limit
values
Cause