Instruction Manual

Maintenance 45
7.4 Maintenance steps
7.4.1 Change operating fluid reservoir of turbo molecular
pump
1 Shut down mass spectrometer module, see Chapter 8, page 49.
2 Remove turbo molecular pump.
Flooding mass spectrometer and turbo molecular pump
The cover of the operating fluid reservoir cannot be unscrewed unless the reservoir
has been flooded.
1 Disconnect 24 V power supply pack from MSB box.
2 Wait until turbo molecular pump is drained (at least 1 min).
3 Allow the turbo molecular pump to cool down if necessary.
4 Open the ventilation screw slowly.
 Turbo molecular pump is flooded until it reaches atmospheric pressure.
Fig: 5 Turbo molecular pump SplitFlow 80
1 Cover
2 O-ring
3 Operating fluid reservoir
4 Ventilation screw