Instruction Manual

Maintenance 47
Replacing Porex rods
1 Pull out the old Porex rods (8 pcs) using a pair of tweezers.
2 Remove any contaminants found on the turbo molecular pump and the cover
using a clean, lint-free cloth.
3 Insert new Porex rods (8 pcs) using a pair of tweezers.
Fig: 6 Changing the operating fluid reservoir
1 O-ring
2 Operating fluid reservoir
3 Porex rods
4 Ventilation screw
Material damage due to cleaning liquids
Cleaning liquids can damage the unit.
► Do not use any cleaning liquids.
► Use a clean, lint-free cloth.