Instruction Manual

48 Maintenance
Inserting a new operating fluid reservoir
The new operating fluid reservoir will be positioned correctly when you screw in the
cover:
1 Do not slide in the new operating fluid reservoir into the pump completely, but stop
once you reach the o-ring.
2 Use a face pin wrench to screw in the cover.
3 Insert a new o-ring.
4 Screw in the cover (tightening torque 13 Nm +/-10%).
5 Tighten the ventilation screw by hand.
6 Install the turbo molecular pump.
7 Put the mass spectrometer module into operation.
Confirm maintenance work
 Control unit installed
 Access = Integrator
► Confirm maintenance work on control unit:
A
CCESS CTRL > INTEGRATOR > MAINTENANCE > MAINTENANCE WORK
Material damage if o-ring is mounted improperly
An improperly mounted o-ring can cause leaks. The unit will experience
malfunctions and become damaged.
► Insert the o-ring carefully.