Instruction Manual

Taking out of service 49
8 Taking out of service
8.1 Shutting down the leak detector
1 Switch off the leak detector on the power supply pack.
2 Wait until the turbo molecular pump has stopped running.
8.2 Disposing of the mass spectrometer module
The unit can be disposed of by the user or sent to INFICON.
Information The unit is made of materials that can be reused. By recycling these
materials you reduce waste and environmental impact.
► For disposal, always comply with local and regional environmental and safety
regulations.
8.3 Returning the mass spectrometer module
1 Fill out the "Declaration of Contamination".
Information We will be happy to send you the form “Declaration of Contamination”
upon request. Xerox copies of the form are permissible.
The Declaration of Conformity is essential to ensure compliance with statutory
requirements and the protection of our employees. Units submitted without an
enclosed Declaration of Conformity will be returned to the sender by INFICON.
2 Attach the form to the unit or enclose it in the unit's packaging.
Danger to health
Contaminated units can damage the health of INFICON's service staff.
► Use the Declaration of Contamination.