Datasheet
TEK.COM 5
2606B System SourceMeter
®
SMU Instrument
Current Accuracy Specifications
3
Range
Source Measure
Programming
Resolution
Accuracy
±(% reading + amperes)
Typical Noise (peak to peak)
0.1 Hz to 10 Hz
Display
Resolution
Accuracy
5
± (% reading + amperes)
100 nA 2 pA 0.06% + 100 pA 5 pA 100 fA 0.05% + 100 pA
1 µA 20 pA 0.03% + 800 pA 25 pA 1 pA 0.025% + 500 pA
10 µA 200 pA 0.03% + 5 nA 60 pA 10 pA 0.025% + 1.5 nA
100 µA 2 nA 0.03% + 60 nA 3 nA 100 pA 0.02% + 25 nA
1 mA 20 nA 0.03% + 300 nA 6 nA 1 nA 0.02% + 200 nA
10 mA 200 nA 0.03% + 6 µA 250 nA 10 nA 0.02% + 2.5 µA
100 mA 2 µA 0.03% + 30 µA 600 nA 100 nA 0.02% + 20 µA
1 A 20 µA 0.05% + 1.8 mA 70 µA 1 µA 0.03% + 1.5 mA
3 A 20 µA 0.06% + 4 mA 150 µA 1 µA 0.05% + 3.5 mA
Supplemental Characteristics
The following specifications are supplemental characteristics that provide additional information about
instrument functions and performance. These characteristics are nonwarranted specifications; they
describe the typical performance of the 2606B.
Additional Source Characteristics
Noise 10 Hz to 20 MHz < 20 mV peak-peak, < 3 mV RMS, 6 V range
Minimum Programmable Pulse Width
6, 7
100 µs
Note: Minimum pulse width for settled source at a given I/V output and load can be longer than 100 ms.
Source value Load
Source settling time
(% of range) Minimum pulse width
6 V
2 Ω
0.2% 150 µs
3 A
2 Ω
0.2% 150 µs
Notes
3. For temperatures 0°C to 18°C and 28°C to 50°C, accuracy is degraded by ±(0.15 × accuracy specification)/°C.
5. Derate accuracy specification for NPLC setting <1 by increasing the error term. Add appropriate typical percent of reading term for resistive loads using the table below.
NPLC Setting 200 mV Range 2 V–200 V Ranges 100 nA Range 1 μA–100 mA Ranges 1 A–1.5 A Ranges
0.1 0.01% 0.01% 0.01% 0.01% 0.01%
0.01 0.08% 0.07% 0.1% 0.05% 0.05%
0.001 0.8% 0.6% 1% 0.5% 1.1%
6. Times measured from the start of pulse to the start off-time; see figure below.
Pulse Level
Bias Level
Start t
on
Start t
off
90%
10%
t
on
t
off
10%
7. With source settling set to SETTLE_SMOOTH_100NA