5-3 Dimensions
5-16
5
Specifications
IL-E
z IL-S025
z IL-030
z IL-S065/IL-065
z IL-100
Spot Diameter
25mm
25
4
190
(500µm)
(1650µm)
(550µm)
(1750µm)
(600µm)
(1850µm)
Refer to the figures in parentheses for IL-065
IL-100
20mm
20mm
300µm
1150µm
400µm
500µm
1550µm
1350µm
