Datasheet

Page 10
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Technical Specifications and Characteristics
Specification conditions
Temperature: 23°C ± 5°C
Humidity: 30% to 80% RH
After 1 hour warm-up
Ambient temperature change: less than ± 3°C after self-calibration
Calibration period: 1 year
Resistance measurement
Measurement range Display resolution Accuracy ± (% + offset)
1, 2
Auto voltage source Current measure range
1 MΩ 1 Ω 0.135 + 1 Ω 20 V 200 μA
10 MΩ 10 Ω 0.135 + 10 Ω 20 V 20 μA
100 MΩ 100 Ω 0.185 + 100 Ω 20 V 2 μA
1 GΩ 1 kΩ 0.285 + 1 kΩ 20 V 200 nA
10 GΩ 10 kΩ 0.285 + 10 kΩ 20 V 20 nA
100 GΩ 100 kΩ 0.41 + 100 kΩ 20 V 2 nA
1 TΩ 1 MΩ 0.45 + 1 MΩ 200 V 2 nA
10 TΩ 10 MΩ 0.625 + 10 MΩ 200 V 200 pA
100 TΩ 100 MΩ 0.75 + 100 MΩ 200 V 20 pA
1 PΩ 1 GΩ 2.6 + 1 GΩ 200 V 2 pA
Temperature coefficient 0 to 18°C and 28 to 45°C ± (0.1 x Accuracy)/°C
Notes
Conditions: Auto V-source ohms, properly zeroed, 6½-Digit, 1 PLC, median filter on, digital filter = 10 readings.
1. In the manual mode resistance can be calculated from specific source voltage and measured current. The measurement accuracy in the manual mode is
determined by voltage source accuracy and ammeter accuracy as follows: Measurement Error = R reading x (Voltage% error + Voltage offset error/
Voltage + Current measurement% error + 10 x Current measurement offset error / Current measurement range)
2. Current measurement range for both Auto and Manual modes: 10% of current range ≤ measured current ≤ 100% of current range
Current measurement
Measurement range Display resolution Accuracy
± (% + offset)
Input burden voltage at
SelfCal ± 3°C
1
Measurement settling
time
1, 2
2 pA 1 aA 1 + 3 fA 20 μV 16 s
20 pA 10 aA 0.5 + 3 fA 20 μV 1.4 s
200 pA 100 aA 0.5 + 5 fA 20 μV 1.4 s
2 nA 1 fA 0.2 + 300 fA 20 μV 13 ms
20 nA 10 fA 0.2 + 500 fA 20 μV 13 ms
200 nA 100 fA 0.2 + 5 pA 20 μV 1.2 ms
2 μA 1 pA 0.1 + 50 pA 20 μV 550 μs
20 μA 10 pA 0.05 + 500 pA 20 μV 600 μs
200 μA 100 pA 0.05 + 5 nA 100 μV 600 μs
2 mA 1 nA 0.05 + 50 nA 1 mV 100 μs
20 mA 10 nA 0.05 + 500 nA 6 mV 100 μs
Temperature coefficient 0 to 18°C and 28 to 45°C ± (0.05 x Accuracy)/°C
Supplemental characteristics
Temperature coefficient of input voltage burden < 10 μV/°C on pA, nA and μA ranges
RMS noise 140 aA for 2 pA range, 10 s duration, no cable, open cap
NMRR
3
> 60 dB
Maximum input capacitance 10 nF on less than 20 μA ranges, 1 μF on other ranges
Notes
Conditions: properly zeroed, 6½-digit, 1 PLC, median filter on, moving average 10 points
1. Supplemental characteristics
2. 0.1% of final value, step size 0% to 100% of range
3. Normal mode rejection ratio, integration time = 1, 2, …, 100 PLC; power line frequency ± 0.1%