User's Manual

1. Introduction KT Automation System Operation
2 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide
1.2 KT Automation System Operation
The KT Automation System provided by KLA-Tencor is used to deploy and
manage instrumented wafers
in a semiconductor wafer fab to enable real-time
measurement and monitoring of parameters that are critical to fab yield and
productivity. Operation is completely automated (see Figure 1-1).
Measurement “missions” are executed automatically under control of the fab
manufacturing execution system (MES). The instrumented wafers are
transported by the fab OHT and automated material handling system (AMHS)
to and from the tool under test. Tests are executed on process tools without
removing them from full automated mode. Mission results are communicated
directly to the MES, plus results can be automatically available to engineers
inside and outside the fab through a web-based GUI and desktop analysis
software system.
Measurements are easy to accomplish without removing the process tools from
production use and without manual handling or recipe execution in the fab.
This enables KT metrology wafers to be used for in-line monitoring of process
and mechanical system parameters, preventing excursions that can cause yield
loss, and improving tool matching performance.
Examples of instrumented metrology wafers from KT that are supported by this
system are: the SensArray EtchTemp Wafer for monitoring etch temperature;
and the KT Automation Metrology Wafer for monitoring AMHS FOUP and
equipment front end wafer handling.
To create and launch a new mission (see Figure 1-2), the MES system sends
the instrumented wafer(s) in a KT Automation FOUP to the KT Automation
Station (1). The MES communicates with the KT Automation Station to initiate
the mission with a Control Job/Process Job (CJ/PC). If the correct wafers for
the mission are present in the FOUP with sufficient charge, the CJ/PJ is
completed (2). The FOUP is transported to the target tool under test by the
standard fab AMHS (3). The MES host system initiates the correct test recipe
on the target tool in full auto mode. When the test is complete, the Automation
FOUP is returned to the Automation Station (5). When the Automation FOUP
Figure 1-1: KT Automation System Topology