User's Manual

1. Introduction KT Automation Missions
9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 3
arrives at the Automation Station, the host executes another CJ/PJ to process
the data (6). The mission results are uploaded to the KT Automation Controller
and the Go/No Go results are reported to the host from the Station, per the
metrology recipe in effect (7).
1.3 KT Automation Missions
There are 3 ways to launch and control KT Automation missions:
1. Automatic missions: controlled by fab MES via Factory Automation (as
described above); results are reported back to the MES (see
9022552-000, KT Automation System GEM/SECS Reference
Manual)
2. User missions: initiated by an operator via the KT Automation Web UI;
the Automation FOUP is carried manually to the target tool and back to the
station
3. Manual missions: initiated through the SA Tools software installed on a
laptop that is directly connected to the Automation FOUP and provides all
the required parameters for starting a mission; the Automation FOUP is
carried manually to the target tool and the mission is manually executed
on that tool
Figure 1-2: KT Automation System Mission Sequence