User's Manual

2. KT Automation System Hardware Components KT Automation FOUP
8 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide
2.2.2 KT Automation FOUP Indicators and Controls
All FOUP indicators and controls are on the rear of the KT Automation FOUP
(see Figure 2-4).
Figure 2-4: KT Automation FOUP Indicators and Controls
Table 2-2: KT Automation FOUP Indicators and Controls
Control or Indicator Color Comments
Wafer Charging LED Green Blinks when the applicable Wafer is charging
Steady when the applicable Wafer is present but not charging
(Wafer is fully charged)
Orange Steady when the applicable Wafer is absent
FOUP Charging LED Green Blinks when the FOUP is charging
Steady when the FOUP is powered On and at the Station but not
charging (FOUP is fully charged)
Orange Steady when the FOUP is powered On but is not at the Station
Reset button n/a To press the Reset button, insert a thin stylus or pen tip into the
hole
Important: Reset the FOUP only if it is an error state.
Manual power/
communication connector
n/a Used to connect a laptop to the FOUP in order to perform
manual missions, or provide power to a FOUP that has not been
at the Station for a long time
ON/OFF button n/a To power down the FOUP, press and hold the ON/OFF button
until the FOUP Charging LED turns off