User's Manual

2. KT Automation System Hardware Components KT Automation FOUP
9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 9
2.2.3 KT Automation FOUP Data Storage and Transfer
• When the Wafer is back in the Automation FOUP, it automatically transmits
the data it collected during the mission to the Automation FOUP.
• When the Automation FOUP is placed on the Automation Station, the
Automation FOUP automatically transmits the data to the Automation
Controller to be stored in the centralized database.
• An Automation FOUP can store up to 10 hours of data.
2.2.4 KT Automation FOUP Battery
• When an Automation FOUP’s charge level goes down to 35%, an alarm is
sent to the host.
• The Automation FOUP goes into power-save mode:
• When the charge level goes down to 20%
• If it is not on a mission and has not been charged for 30 minutes
• When in power-save mode, the Automation FOUP can maintain its charge
for 6 months.
• To charge an Automation FOUP, place it on the FOUP Station and make sure
it is clamped (not in LOAD READY state), or use the manual
power/communication cable to connect it to a laptop.
NOTE
If the Automation FOUP was powered off, placing it on the Automation Station
and clamping it will power it on automatically.
• When powered off, the Automation FOUP can maintain its charge for 12
months.
NOTE
If the Automation FOUP loses its charge completely, please ask your KT service
representative to change the battery.