User's Manual
Table Of Contents
- Table of Contents
- Preface
- Introduction
- KT Automation System Hardware Components
- KT Automation Web UI
- Glossary
- Revision History
2. KT Automation System Hardware Components KT Automation FOUP
10 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide
2.2.5 Option: Emulating Occupied KT Automation FOUP Slots
An available KT Automation FOUP option is a set of emulation fins for slots that
contain any electronics boxes. The fins cause load port wafer mappers to
identify those slots as occupied.
Figure 2-5: KT Automation System Topology