User's Manual

3. KT Automation Web UI KT Automation Home Page
9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 15
3.3.3 Connected FOUPs
The Connected FOUPs area displays all KT Automation FOUPs (carriers) in
the system and their statuses.
For each FOUP, the following information is displayed:
1. Carrier ID
2. Carrier status
3. Wafer IDs
4. Battery level of KT Automation FOUP