User's Manual

KLA-Tencor Technical Publications
One Technology Drive,
Milpitas, CA. 95035
KLA-Tencor Corporation
is preliminary document is not complete. This document contains significant
omissions and inaccuracies. GSS Technical Publications distributes this
preliminary draft for review purposes only. Customers and KLA- Customer
Service Engineers should not use this document while installing, servicing, or
using the KT Automation System. Any input regarding the accuracy of the
content of this document is welcome and appreciated.
KLA-Tencor Confidential - Restricted Distribution
KT Automation User Guide